I-SiC silicon carbide wafer SiC wafer 4H-N 6H-N HPSI (High purity Semi-Insulating) 4H/6H-P 3C -n uhlobo 2 3 4 6 8inch olutholakalayo
Izakhiwo
I-4H-N kanye ne-6H-N (Ama-SiC Wafers ohlobo lwe-N)
Isicelo:Isetshenziswa ngokuyinhloko kuma-electronics wamandla, ama-optoelectronics, nezinhlelo zokusebenza ezishisa kakhulu.
Ibanga Lobubanzi:50.8 mm kuya ku-200 mm.
Ubukhulu:350 μm ± 25 μm, enogqinsi lokuzikhethela luka-500 μm ± 25 μm.
Ukungazweli:N-uhlobo 4H/6H-P: ≤ 0.1 Ω·cm (Z-grade), ≤ 0.3 Ω·cm (P-grade); N-uhlobo 3C-N: ≤ 0.8 mΩ·cm (Z-grade), ≤ 1 mΩ·cm (P-grade).
Ukuqina:I-Ra ≤ 0.2 nm (CMP noma i-MP).
Ukuminyana kweMibhobho (MPD):< 1 eya/cm².
I-TTV: ≤ 10 μm kuwo wonke amadayamitha.
I-Wap: ≤ 30 μm (≤ 45 μm ngamawafa angama-intshi angu-8).
Ukukhishwa komphetho:3 mm kuya ku-6 mm kuye ngohlobo lwe-wafer.
Ukupakishwa:Ikhasethi le-wafer eningi noma isiqukathi se-wafer esisodwa.
Ohter usayizi otholakalayo 3inch 4inch 6inch 8inch
I-HPSI (High Purity Semi-Insulating SiC Wafers)
Isicelo:Isetshenziselwa amadivayisi adinga ukumelana okuphezulu nokusebenza okuzinzile, okufana namadivayisi e-RF, izinhlelo zokusebenza zezithombe, nezinzwa.
Ibanga Lobubanzi:50.8 mm kuya ku-200 mm.
Ubukhulu:Ukujiya okujwayelekile okungu-350 μm ± 25 μm ngezinketho zamawafa amakhulu afika ku-500 μm.
Ukuqina:I-Ra ≤ 0.2 nm.
Ukuminyana kweMibhobho (MPD): ≤ 1 eya/cm².
Ukungazweli:Ukumelana okuphezulu, okuvame ukusetshenziswa ezinhlelweni zokuvikela i-semi-insulating.
I-Wap: ≤ 30 μm (ngosayizi abancane), ≤ 45 μm kumadiamitha amakhulu.
I-TTV: ≤ 10 μm.
Ohter usayizi otholakalayo 3inch 4inch 6inch 8inch
4H-P,6H-P&3C Isicwecwana se-SiC(P-uhlobo lwe-SiC Wafers)
Isicelo:Ikakhulukazi amandla kanye namadivayisi anemvamisa ephezulu.
Ibanga Lobubanzi:50.8 mm kuya ku-200 mm.
Ubukhulu:350 μm ± 25 μm noma izinketho ezenziwe ngokwezifiso.
Ukungazweli:P-uhlobo 4H/6H-P: ≤ 0.1 Ω·cm (Z-grade), ≤ 0.3 Ω·cm (P-grade).
Ukuqina:I-Ra ≤ 0.2 nm (CMP noma i-MP).
Ukuminyana kweMibhobho (MPD):< 1 eya/cm².
I-TTV: ≤ 10 μm.
Ukukhishwa komphetho:3 mm kuya ku-6 mm.
I-Wap: ≤ 30 μm osayizi abancane, ≤ 45 μm osayizi abakhulu.
Ohter usayizi otholakalayo 3inch 4inch 6inch5×5 10×10
Ithebula Lepharamitha Yedatha Eyingxenye
Impahla | 2 intshi | 3inch | 4intshi | 6intshi | 8inch | |||
Uhlobo | 4H-N/HPSI/ | 4H-N/HPSI/ | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI/4H-SEMI | |||
Ububanzi | 50.8 ± 0.3 mm | 76.2±0.3mm | 100±0.3mm | 150±0.3mm | 200 ± 0.3 mm | |||
Ubukhulu | 330 ± 25 um | 350 ±25 um | 350 ±25 um | 350 ±25 um | 350 ±25 um | |||
350±25um | 500±25um | 500±25um | 500±25um | 500±25um | ||||
noma ngokwezifiso | noma ngokwezifiso | noma ngokwezifiso | noma ngokwezifiso | noma ngokwezifiso | ||||
Ubulukhuni | I-Ra ≤ 0.2nm | I-Ra ≤ 0.2nm | I-Ra ≤ 0.2nm | I-Ra ≤ 0.2nm | I-Ra ≤ 0.2nm | |||
I-Wap | ≤ 30um | ≤ 30um | ≤ 30um | ≤ 30um | ≤45um | |||
I-TTV | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | |||
Klwelwa/Dig | I-CMP/MP | |||||||
I-MPD | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | |||
Isimo | Round, Flat 16mm; OF ubude 22mm; OF Ubude 30/32.5mm; OF Ubude obungama-47.5mm; I-NOCH; I-NOCH; | |||||||
Bevel | 45°, SEMI Spec; C Umumo | |||||||
Ibanga | Ibanga lokukhiqiza le-MOS&SBD; Ibanga locwaningo; Ibanga le-Dummy, Ibanga le-Seed wafer | |||||||
Ukuphawula | Ububanzi, Ubukhulu, Ukuma, ukucaciswa okungenhla kungenziwa ngokwezifiso ngesicelo sakho |
Izinhlelo zokusebenza
·Amandla kagesi
Amawafa ohlobo lwe-SiC abalulekile kumishini kagesi enamandla ngenxa yekhono lazo lokuphatha amandla kagesi aphezulu kanye namandla aphezulu. Avame ukusetshenziswa ekuguquleni amandla, ama-inverter, namadrayivu ezimoto ezimbonini ezifana namandla avuselelekayo, izimoto zikagesi, kanye ne-automation yezimboni.
· Optoelectronics
Izinto ze-SiC zohlobo lwe-N, ikakhulukazi izinhlelo zokusebenza ze-optoelectronic, zisetshenziswa kumadivayisi afana nama-light-emitting diode (ama-LED) nama-laser diode. I-thermal conductivity ephezulu kanye ne-bandgap ebanzi izenza zilungele amadivayisi we-optoelectronic asebenza kahle kakhulu.
·Izinhlelo Zezinga Lokushisa Eziphezulu
Amawafa e-4H-N 6H-N SiC afaneleka kahle ezindaweni ezinethempelesha eliphezulu, njengezinzwa namadivayisi kagesi asetshenziswa endaweni ye-aerospace, yezimoto, nezinhlelo zokusebenza zezimboni lapho ukunqanyulwa kokushisa nokuzinza emazingeni okushisa aphakeme kubaluleke kakhulu.
·Amadivayisi e-RF
Amawafa e-4H-N 6H-N SiC asetshenziswa kumadivayisi wefrikhwensi yomsakazo (RF) asebenza kumabanga amafrikhwensi aphezulu. Zisetshenziswa ezinhlelweni zokuxhumana, ubuchwepheshe be-radar, kanye nokuxhumana ngesathelayithi, lapho amandla aphezulu nokusebenza kuyadingeka.
·Izicelo Photonic
Ku-photonics, ama-wafer e-SiC asetshenziselwa amadivayisi afana nama-photodetectors nama-modulators. Izakhiwo ezihlukile zento esetshenziswayo ziyivumela ukuthi isebenze ngempumelelo ekukhiqizeni ukukhanya, ukuguquguquka, nokutholwa ezinhlelweni zokuxhumana ezibonakalayo namadivayisi wokuthwebula izithombe.
·Izinzwa
Ama-wafers e-SiC asetshenziswa ezinhlobonhlobo zezinhlelo zokusebenza zezinzwa, ikakhulukazi ezindaweni ezinokhahlo lapho ezinye izinto zingase zehluleke. Lokhu kufaka phakathi izinga lokushisa, ingcindezi, nezinzwa zamakhemikhali, ezibalulekile emikhakheni efana nezimoto, uwoyela negesi, nokuqapha imvelo.
·I-Electric Vehicle Drive Systems
Ubuchwepheshe be-SiC budlala indima ebalulekile ezimotweni zikagesi ngokwenza ngcono ukusebenza kahle nokusebenza kwezinhlelo zokushayela. Ngama-semiconductors amandla e-SiC, izimoto zikagesi zingafinyelela impilo engcono yebhethri, izikhathi zokushaja ngokushesha, nokusebenza kahle kwamandla okukhulu.
·Izinzwa Ezithuthukile neziguquli zezithombe
Kubuchwepheshe bezinzwa ezithuthukisiwe, amawafa e-SiC asetshenziselwa ukudala izinzwa ezinemba okuphezulu zezinhlelo zokusebenza kumarobhothi, izinto zezokwelapha, nokuqapha indawo ezungezile. Kuma-photonic converters, izakhiwo ze-SiC ziyasetshenziswa ukuze kunikwe amandla ukuguqulwa okusebenzayo kwamandla kagesi abe amasignali abonakalayo, okubalulekile kwezokuxhumana kanye nengqalasizinda ye-inthanethi enesivinini esikhulu.
Q&A
Q:Iyini i-4H ku-4H SiC?
A:"4H" ku-4H SiC ibhekisela esakhiweni sekristalu se-silicon carbide, ikakhulukazi ifomu eliyi-hexagonal elinezendlalelo ezine (H). I-"H" ikhombisa uhlobo lwe-polytype ene-hexagonal, ilwehlukanisa kwamanye ama-SiC polytypes afana no-6H noma u-3C.
Q:Iyini i-thermal conductivity ye-4H-SiC?
A:I-thermal conductivity ye-4H-SiC (Silicon Carbide) icishe ibe ngu-490-500 W/m·K ekamelweni lokushisa. Lokhu kuhanjiswa kwe-thermal ephezulu kuyenza ifaneleke ezinhlelweni zikagesi zikagesi nasezindaweni ezinezinga lokushisa eliphezulu, lapho ukulahlwa kokushisa okusebenzayo kubalulekile.