4H-N/6H-N SiC Wafer Reasearch ukukhiqizwa kwe-Dummy grade Dia150mm I-Silicon carbide substrate

Incazelo emfushane:

Singahlinzeka ngokushisa okuphezulu kwe-superconducting encane yefilimu substrate, amafilimu amancane kazibuthe kanye ne-ferroelectric encane yefilimu substrate, i-semiconductor crystal, i-crystal optical, i-laser crystal materials, ngesikhathi esifanayo ihlinzeka ngokuma, ukusika i-crystal, ukugaya, ukupholisha kanye nezinye izinsizakalo zokucubungula.Ama-substrates ethu e-SiC avela e-Tankeblue Factory e-China.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

6 intshi ububanzi be-silicon carbide (SiC) ukucaciswa kwe-substrate

Ibanga	Zero MPD	Ukukhiqiza	IBanga Lokucwaninga	Dummy Grade
Ububanzi	150.0mm±0.25mm
Ubukhulu	4H-N	350um±25um
	4H-SI	500um±25um
I-Wafer Orientation	Ku-eksisi :<0001>±0.5° ku-4H-SI Ku-axis engaxhunyiwe : 4.0° ukuya ku-<1120>±0.5° ku-4H-N
Ifulethi eliyisisekelo	{10-10}±5.0°
Ubude Befulethi obuyisisekelo	47.5mm±2.5mm
Ukukhishwa eceleni	3mm
TTV/Bow/Warp	≤15um/≤40um/≤60um
I-Micropipe Density	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Ukumelana 4H-N 4H-SI	0.015~0.028Ω!cm
	≥1E5Ω!cm
Ubulukhuni	I-Polish Ra ≤1nm CMP Ra≤0.5nm
#Ukuqhekeka ngokukhanya okukhulu kakhulu	Lutho		1 okuvunyelwe,≤2mm	Ubude obuhlanganisiwe ≤10mm, ubude obubodwa≤2mm
*Amapuleti e-Hex ngokukhanya okuphezulu kakhulu	Indawo eqoqiwe ≤1%		Indawo eqoqiwe ≤ 2%	Indawo eqoqiwe ≤ 5%
*Izindawo ze-Polytype ngokukhanya okukhulu kakhulu	Lutho		Indawo eqoqiwe ≤ 2%	Indawo eqoqiwe ≤ 5%
*&Iklwejwa ngokukhanya okukhulu	3 imihuzuko ukuya ku-1 x wafer ububanzi ubude obukhulayo		5 ukuklwebheka ukuya ku-1 x wafer ubude bobude obukhulayo	5 iziklwebhile ukuya ku-1 x wafer ububanzi ubude obukhulayo
I-Edge chip	Lutho		3 kuvunyelwe,≤0.5mm ngakunye	5 okuvunyelwe,≤1mm ngakunye
Ukungcoliswa ukukhanya okunamandla aphezulu	Lutho

Ukuthengisa Nesevisi Yekhasimende

Ukuthengwa Kwezinto Zokusebenza

Umnyango othenga izinto zokwakha unomthwalo wemfanelo wokuqoqa zonke izinto ezingavuthiwe ezidingekayo ukukhiqiza umkhiqizo wakho.Ukulandeleka okuphelele kwayo yonke imikhiqizo nezinto zokwakha, okuhlanganisa ukuhlaziya kwamakhemikhali nokomzimba kuhlala kutholakala.

Ikhwalithi

Ngesikhathi nangemva kokwakhiwa noma ukwenziwa kwemikhiqizo yakho, umnyango wokulawula ikhwalithi uyabandakanyeka ekuqinisekiseni ukuthi zonke izinto ezisetshenziswayo nokubekezelela ziyahlangabezana noma zedlule izicaciso zakho.

Isevisi

Siyaziqhenya ngokuba nabasebenzi bobunjiniyela bokuthengisa abanolwazi olungaphezu kweminyaka emi-5 embonini ye-semiconductor.Baqeqeshelwe ukuphendula imibuzo yobuchwepheshe kanye nokunikeza izingcaphuno ezifika ngesikhathi zezidingo zakho.

siseduze kwakho nganoma yisiphi isikhathi uma unenkinga, futhi uyixazulule emahoreni ayi-10.