I-LT Lithium Tantalate (LiTaO3) Ikristalu 2inch/3inch/4inch/6inch I-Orientaiton Y-42°/36°/108° Ubukhulu 250-500um
Amapharamitha obuchwepheshe
| Igama | I-LiTaO3 yezinga lokubona | Izinga lethebula lomsindo i-LiTaO3 |
| I-Axial | u-Z usike + / - 0.2 ° | 36 ° ukusika okungu-Y / 42 ° ukusika okungu-Y / X ukusika(+ / - 0.2 °) |
| Ububanzi | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm |
| Indiza ye-Datum | 22mm + / - 2mm | 22mm + /-2mm32mm + /-2mm |
| Ubukhulu | 500um + /-5mm1000um + /-5mm | 500um + /-20mm350um + /-20mm |
| I-TTV | ≤ 10um | ≤ 10um |
| Izinga lokushisa le-Curie | 605 °C + / - 0.7 °C (indlela ye-DTA) | 605 °C + / -3 °C (indlela ye-DTA |
| Ikhwalithi ephezulu | Ukupholisha okunezinhlangothi ezimbili | Ukupholisha okunezinhlangothi ezimbili |
| Imiphetho enezimbobo | ukuzungeza unqenqema | ukuzungeza unqenqema |
Izici Eziyinhloko
1. Isakhiwo sekristalu kanye nokusebenza kukagesi
· Ukuzinza kwe-Crystallographic: Ukubusa kwe-polytype engu-100% 4H-SiC, ukufakwa kwe-multicrystalline okungu-zero (isb., 6H/15R), nge-XRD rocking curve egcwele ububanzi obuphelele ku-half-maximum (FWHM) ≤32.7 arcsec.
· Ukuhamba Okuphezulu Kwesithwali: Ukuhamba kwe-electron okungu-5,400 cm²/V·s (4H-SiC) kanye nokuhamba kwemigodi okungu-380 cm²/V·s, okuvumela ukwakheka kwamadivayisi anemvamisa ephezulu.
·Ukuqina Kwemisebe: Imelana nokushiswa kwemisebe ye-neutron engu-1 MeV ngomkhawulo womonakalo wokufuduka ongu-1×10¹⁵ n/cm², ofanele ukusetshenziswa kwezindiza kanye nezinhlelo zenuzi.
2. Izakhiwo Zokushisa Nezomshini
· Ukushisa Okumangalisayo: 4.9 W/cm·K (4H-SiC), okuphindwe kathathu kune-silicon, okusekela ukusebenza okungaphezu kuka-200°C.
· I-Coefficient Yokukhulisa Ukushisa Okuphansi: I-CTE engu-4.0×10⁻⁶/K (25–1000°C), okuqinisekisa ukuhambisana nokupakishwa okusekelwe ku-silicon nokunciphisa ukucindezeleka kokushisa.
3. Ukulawula Okuphelele Nokucubungula Okunembile
.
· Ubuningi be-Micropipe: <0.3 cm⁻² (ama-wafer angu-8 intshi), ubuningi be-dislocation <1,000 cm⁻² (kuqinisekiswe nge-KOH etching).
· Ikhwalithi Yomphezulu: I-CMP-ipholishwe ku-Ra <0.2 nm, ihlangabezana nezidingo ze-EUV lithography-grade flatness.
Izinhlelo Zokusebenza Eziyinhloko
| Isizinda | Izimo Zokusebenza | Izinzuzo Zobuchwepheshe |
| Ukuxhumana Kwamehlo | Amamojula e-100G/400G e-laser, i-silicon photonics hybrid | Izingxenye zembewu ze-InP zivumela i-bandgap eqondile (1.34 eV) kanye ne-heteroepitaxy esekelwe ku-Si, okunciphisa ukulahleka kokuxhuma kwe-optical. |
| Izimoto Ezintsha Zamandla | Ama-inverter aphezulu angu-800V, amashaja angaphakathi (OBC) | Ama-substrate angu-4H-SiC amelana no->1,200 V, okunciphisa ukulahlekelwa kokuqhuba ngo-50% kanye nomthamo wesistimu ngo-40%. |
| Ukuxhumana kwe-5G | Amadivayisi e-RF angamagagasi e-Millimeter (PA/LNA), ama-amplifier kagesi esiteshini esiyisisekelo | Ama-substrate e-SiC angenawo umswakama (ukumelana >10⁵ Ω·cm) avumela ukuhlanganiswa okungenamsebenzi kwe-high-frequency (60 GHz+). |
| Imishini Yezimboni | Izinzwa zokushisa okuphezulu, ama-transformer amanje, izikrini ze-reactor yenuzi | Izingxenye zembewu ze-InSb (i-bandgap engu-0.17 eV) zinikeza ukuzwela okunamandla okufika ku-300% @ 10 T. |
Ama-Wafer e-LiTaO₃ - Izici Eziyinhloko
1. Ukusebenza Okuphezulu Kwe-Piezoelectric
· Ama-coefficient aphezulu e-piezoelectric (d₃₃~8-10 pC/N, K²~0.5%) avumela amadivayisi e-SAW/BAW asebenza ngesivinini esiphezulu ngokulahlekelwa kokufakwa <1.5dB kwezihlungi ze-5G RF
· Ukuhlanganiswa okuhle kakhulu kwe-electromechanical kusekela imiklamo yokuhlunga ye-wide-bandwidth (≥5%) yezinhlelo zokusebenza ze-sub-6GHz kanye ne-mmWave
2. Izakhiwo Zokubona
· Ukucaca kwe-Broadband (ukudluliselwa okungu->70% kusuka ku-400-5000nm) kwama-modulators e-electro-optic afinyelela ku-bandwidth engu->40GHz
· Ukuzwela okunamandla kokukhanya okungeyona i-linear (χ⁽²⁾~30pm/V) kwenza kube lula ukukhiqizwa kwe-harmonic yesibili (SHG) okuphumelelayo ezinhlelweni ze-laser
3. Ukuzinza Kwemvelo
· Izinga lokushisa eliphezulu le-Curie (600°C) ligcina impendulo ye-piezoelectric ezindaweni ze-automotive-grade (-40°C kuya ku-150°C)
· Ukungakwazi ukusebenza kwamakhemikhali ngokumelene nama-asidi/ama-alkali (pH1-13) kuqinisekisa ukuthembeka ekusetshenzisweni kwezinzwa zezimboni
4. Amakhono Okwenza Ngokwezifiso
· Ubunjiniyela bokuqondisa: X-cut (51°), Y-cut (0°), Z-cut (36°) ukuze kutholakale izimpendulo ze-piezoelectric ezenzelwe wena.
· Izinketho zokusebenzisa i-doping: I-Mg-doped (ukumelana nomonakalo we-optical), i-Zn-doped (i-d₃₃ ethuthukisiwe)
· Ukuqeda umphezulu: Ukupholisha okulungele i-Epitaxial (Ra<0.5nm), i-ITO/Au metallization
Ama-Wafer e-LiTaO₃ - Izinhlelo Zokusebenza Eziyinhloko
1. Amamojula E-RF Front-End
· Izihlungi ze-5G NR SAW (Ibhendi n77/n79) ezinesilinganiso sokushisa kwemvamisa (TCF) <|-15ppm/°C|
· Ama-resonator e-BAW e-Ultra-wideband e-WiFi 6E/7 (5.925-7.125GHz)
2. Ama-Photonics Ahlanganisiwe
· Ama-modulators e-Mach-Zehnder asheshayo (>100Gbps) okuxhumana okubonakalayo okuhlangene
· Izitholi ze-infrared ze-QWIP ezinama-wavelength anqunyiwe angashintshwa kusukela ku-3-14μm
3. Izimoto zikagesi
· Izinzwa zokupaka ze-Ultrasonic ezinemvamisa yokusebenza engu->200kHz
· Ama-transducer e-TPMS piezoelectric asinda ekushiseni okungu--40°C kuya ku-125°C
4. Izinhlelo Zokuzivikela
· Izihlungi ze-EW receiver ezine->60dB out-of-band ukwenqatshwa
· Amafasitela e-IR asebenzisa imisebe ye-MWIR engu-3-5μm
5. Ubuchwepheshe Obusha
· Ama-transducer e-optomechanical quantum okuguqulwa kwe-microwave-to-optical
· Ama-PMUT arrays okuthwebula izithombe ze-ultrasound yezokwelapha (isisombululo esingu->20MHz)
Ama-Wafer e-LiTaO₃ - Izinsizakalo ze-XKH
1. Ukuphathwa Kwezinketho Zokuphakelwa
· Ukucutshungulwa kwe-boule-to-wafer kanye nesikhathi sokuhola samaviki ama-4 ukuze kutholakale imininingwane ejwayelekile
· Ukukhiqizwa okwenziwe ngcono ngezindleko kuletha inzuzo yentengo engu-10-15% uma kuqhathaniswa nabancintisana nabo
2. Izixazululo Zenziwe Ngokwezifiso
· Ukugoba okuqondile kokuqondisa: 36°±0.5° Y-cut ukuze kusebenze kahle kakhulu i-SAW
· Izakhi ezifakwe i-doped: i-MgO (5mol%) i-doping yezinhlelo zokusebenza ze-optical
Izinsizakalo zokwenziwa kwensimbi: Ukuhlela amaphethini e-electrode e-Cr/Au (100/1000Å)
3. Usekelo Lobuchwepheshe
· Ukuhlukaniswa kwezinto: Ama-curve okugwedla e-XRD (FWHM<0.01°), ukuhlaziywa kobuso be-AFM
· Ukulingisa idivayisi: Ukumodela kwe-FEM kokwenza ngcono ukwakheka kwesihlungi se-SAW
Isiphetho
Ama-wafer e-LiTaO₃ ayaqhubeka nokuvumela ukuthuthuka kwezobuchwepheshe kuzo zonke izixhumanisi ze-RF, ama-photonics ahlanganisiwe, kanye nezinzwa zemvelo ezinzima. Ubuchwepheshe be-XKH, ukunemba kokukhiqiza, kanye nokusekelwa kobunjiniyela bezinhlelo zokusebenza kusiza amakhasimende ukunqoba izinselele zokuklama ezinhlelweni ze-elekthronikhi zesizukulwane esilandelayo.









