I-LT Lithium Tantalate (LiTaO3) I-Crystal 2inch/3inch/4inch/6寸inch Orientaiton Y-42°/36°/108° Ukuqina 250-500um
Imingcele yezobuchwepheshe
Igama | I-Optical-grade LiTaO3 | Izinga lethebula lomsindo LiTaO3 |
I-Axial | U-Z usike + / - 0.2 ° | 36 ° Y ukusika / 42 ° Y ukusika / X ukusika(+ / - 0.2 °) |
Ububanzi | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm +/-0.3mm 0r 150±0.5mm |
Indiza ye-Datum | 22mm +/ - 2mm | 22mm +/-2mm32mm +/-2mm |
Ubukhulu | 500um +/-5mm1000um +/-5mm | 500um +/-20mm350um +/-20mm |
I-TTV | ≤ 10um | ≤ 10um |
Izinga lokushisa le-Curie | 605 °C + / - 0.7 °C (Indlela ye-DTA) | 605 °C + / -3 °C (Indlela ye-DTA |
Ikhwalithi yobuso | Ukupholisha okunezinhlangothi ezimbili | Ukupholisha okunezinhlangothi ezimbili |
Imiphetho e-Chamfered | ukuzungeza unqenqema | ukuzungeza unqenqema |
Izimpawu Ezisemqoka
1.Isakhiwo SeCrystal kanye nokusebenza kukagesi
· I-Crystallographic Stability: 100% 4H-SiC polytype dominance, zero multicrystalline inclusions (isb, 6H/15R), ene-XRD rocking curve ububanzi obugcwele ku-half-maximum (FWHM) ≤32.7 arcsec.
· I-High Carrier Mobility: Ukuhamba kwe-Electron okungu-5,400 cm²/V·s (4H-SiC) nokuhamba kwembobo okungu-380 cm²/V·s, okunika amandla amadizayini edivayisi amaza aphezulu.
·Ukuqina Kokushisa: Imelana neradiation ye-neutron engu-1 MeV enomkhawulo womonakalo wokufuduka ongu-1×10¹⁵ n/cm², ilungele i-aerospace nezinhlelo zokusebenza zenuzi.
2.Izakhiwo ezishisayo nezemishini
· I-Exceptional Thermal Conductivity: 4.9 W/cm·K (4H-SiC), kathathu kune-silicon, esekela ukusebenza okungaphezu kuka-200°C.
· I-Coefficient Yokwandisa Okushisayo Ephansi: I-CTE ye-4.0×10⁻⁶/K (25–1000°C), iqinisekisa ukuhambisana nokupakishwa okusekelwe ku-silicon nokunciphisa ukucindezeleka okushisayo.
3.Ukulawula Iphutha kanye Nokunemba Kokucubungula
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· Ukuminyana Kwe-Micropipe: <0.3 cm⁻² (ama-wafers amayintshi angu-8), ukuminyana kokuhlukaniswa <1,000 cm⁻² (kuqinisekiswe nge-KOH etching).
· Ikhwalithi Yokuphezulu: I-CMP-ipholishwe yaba ngu-Ra <0.2 nm, ehlangabezana nezimfuneko ze-EUV lithography-grade flatness.
Izinhlelo zokusebenza ezibalulekile
Isizinda | I-Application Scenarios | Izinzuzo Technical |
I-Optical Communications | Ama-lasers angu-100G/400G, amamojula we-silicon photonics hybrid | Ama-substrates embewu ye-InP anika amandla i-bandgap eqondile (1.34 eV) ne-Si-based heteroepitaxy, enciphisa ukulahleka kokuxhumanisa kokubona. |
Izimoto Ezintsha Zamandla | Ama-inverters angu-800V aphezulu, amashaja angaphakathi (OBC) | Ama-substrates e-4H-SiC amelana > ne-1,200 V, ehlisa ukulahleka kokuqhuba ngo-50% kanye nomthamo wesistimu ngo-40%. |
I-5G Communications | Imishini ye-Millimeter-wave RF (PA/LNA), izikhulisamandla zamandla esiteshi | Ama-Semi-insulating SiC substrates (ukumelana >10⁵ Ω·cm) anika amandla ukuhlanganiswa kokungenzi lutho kwe-high-frequency (60 GHz+). |
Izisetshenziswa zezimboni | Izinzwa zokushisa okuphezulu, iziguquli zamanje, iziqaphi ze-nuclear reactor | Ama-substrates embewu ye-InSb (0.17 eV bandgap) aletha ukuzwela kazibuthe kufika ku-300%@10 T. |
I-LiTaO₃ Wafers - Izimpawu Ezisemqoka
1. Ukusebenza okuphezulu kwePiezoelectric
· Ama-coefficients aphezulu e-piezoelectric (d₃₃~8-10 pC/N, K²~0.5%) anika amandla amadivayisi e-SAW/BAW emvamisa ephezulu ngokulahlekelwa kokufakwa okungu-<1.5dB kwezihlungi ze-5G RF
· Ukuhlanganiswa okuhle kakhulu kwe-electromechanical kusekela umkhawulokudonsa obanzi (≥5%) imiklamo yesihlungi yezinhlelo zokusebenza ezingaphansi kwe-6GHz kanye ne-mmWave
2. Izakhiwo ze-Optical
· Ukubonakala kwe-Broadband (>70% ukudluliswa kusuka ku-400-5000nm) kumamojula we-electro-optic afinyelela >40GHz bandwidth
· Ukuba nokwenzeka okuqinile kokubona okungaqondile (χ⁽²⁾~30pm/V) kusiza isizukulwane sesibili se-harmonic (SHG) kumasistimu we-laser
3. Ukuzinza Kwemvelo
· Izinga lokushisa eliphezulu le-Curie (600°C) ligcina impendulo ye-piezoelectric endaweni yezinga lezimoto (-40°C kuya ku-150°C)
· Ukungangeni kwamakhemikhali ngokumelene nama-acids/alkali (pH1-13) kuqinisekisa ukwethembeka ekusetshenzisweni kwezinzwa zezimboni
4. Amakhono Okwenza ngokwezifiso
Unjiniyela wokuqondisa: X-cut (51°), Y-cut (0°), Z-cut (36°) ukuze uthole izimpendulo ze-piezoelectric ezenzelwe wena.
Izinketho zokudotshwa: I-Mg-doped (ukumelana nomonakalo obonakalayo), i-Zn-doped (ithuthukisiwe d₃₃)
· Ukuphela kokuqedwa kwendawo: Ukupholisha okulungele i-Epitaxial (Ra<0.5nm), i-ITO/Au metallization
I-LiTaO₃ Wafers - Izicelo Eziyinhloko
1. RF Front-End Amamojula
· Izihlungi ze-5G NR SAW (Ibhendi n77/n79) ene-temperature coefficient of frequency (TCF) <|-15ppm/°C|
· I-Ultra-wideband BAW resonators ye-WiFi 6E/7 (5.925-7.125GHz)
2. I-Photonics Edidiyelwe
· Amamojula we-Mach-Zehnder anesivinini esikhulu (>100Gbps) okuxhumana okuhambisanayo kokubona
· Izitholi ze-infrared ze-QWIP ezinamaza amaza amaza anqamulekayo ukusuka ku-3-14μm
3. Ugesi Wezimoto
· Izinzwa zokupaka ze-Ultrasonic ezine->200kHz imvamisa yokusebenza
· Ama-transducer e-TPMS piezoelectric asinda -40°C kuya ku-125°C ukuhamba ngebhayisikili okushisayo
4. Izinhlelo Zokuvikela
· Izihlungi zesamukeli ze-EW ezine>60dB yokunqatshwa ngaphandle kwebhendi
· Amawindi e-IR afuna imicibisholo adlulisa imisebe engu-3-5μm MWIR
5. Emerging Technologies
· Ama-Optomechanical quantum transducer okuguqulwa kwe-microwave-to-optical
· Ukuhlelwa kwe-PMUT kwesithombe se-ultrasound yezokwelapha (>20MHz ukulungiswa)
I-LiTaO₃ Wafers - Izinsizakalo ze-XKH
1. Ukuphathwa kwe-Supply Chain
· Ukucutshungulwa kwe-Boule-to-wafer okunesikhathi sokuhola esingamaviki angu-4 sokucaciswa okujwayelekile
· Ukukhiqiza okunezindleko ezingcono kakhulu okuletha inzuzo yentengo engu-10-15% uma kuqhathaniswa nezimbangi
2. Izixazululo Ngokwezifiso
· I-Orientation-specific wafering: 36°±0.5° Y-cut ukuze uthole ukusebenza kahle kwe-SAW
· Izingoma ezihlanganisiwe: I-MgO (5mol%) ye-doping yezinhlelo zokusebenza zamehlo
Amasevisi ensimbi: Cr/Au (100/1000Å) iphethini ye-electrode
3. Ukusekelwa Kwezobuchwepheshe
· Isici esibalulekile: XRD amajika okunyakazisa (FWHM<0.01°), ukuhlaziya indawo ye-AFM
· Ukulingiswa kwedivayisi: Ukumodela kwe-FEM kokwenziwa ngcono kwedizayini yesihlungi se-SAW
Isiphetho
Ama-wafer e-LiTaO₃ ayaqhubeka nokunika amandla intuthuko yezobuchwepheshe kukho konke ukuxhumana kwe-RF, ama-photonics ahlanganisiwe, nezinzwa zemvelo ezinokhahlo. Ubuchwepheshe bezinto ezibonakalayo be-XKH, ukunemba kokukhiqiza, nokwesekwa kobunjiniyela bohlelo kusiza amakhasimende anqobe izinselele zokuklama kumasistimu kagesi esizukulwane esilandelayo.


