50.8mm 2inch GaN ku-sapphire Epi-layer wafer
Ukusetshenziswa kweshidi le-gallium nitride GaN epitaxial
Ngokusekelwe ekusebenzeni kwe-gallium nitride, ama-chips e-gallium nitride epitaxial afaneleka kakhulu amandla aphezulu, imvamisa ephezulu, kanye nezicelo ze-voltage ephansi.
Kubonakala ku:
I-1) I-bandgap ephezulu: I-bandgap ephezulu ithuthukisa izinga le-voltage yamadivayisi we-gallium nitride futhi ingakhipha amandla aphezulu kunamadivayisi e-gallium arsenide, afaneleka ngokukhethekile iziteshi eziyisisekelo zokuxhumana ze-5G, i-radar yezempi nezinye izinkambu;
I-2) Ukusebenza kahle kokuguqulwa okuphezulu: ukumelana nokumelana kwe-gallium nitride switching power electronics ama-oda angu-3 obukhulu obuphansi kunalawo we-silicon, okunganciphisa kakhulu ukulahlekelwa ekushintsheni;
I-3) I-conductivity ephezulu yokushisa: ukushisa okuphezulu kwe-gallium nitride kwenza kube nokusebenza okuhle kakhulu kokukhipha ukushisa, okulungele ukukhiqizwa kwamandla aphezulu, izinga lokushisa eliphezulu kanye nezinye izinkambu zamadivayisi;
I-4) Amandla ensimu kagesi yokuwohloka: Nakuba amandla ensimu kagesi ewohlokayo ye-gallium nitride eseduze naleyo ye-silicon nitride, ngenxa yenqubo ye-semiconductor, ukungafani kwe-lattice yezinto ezibonakalayo nezinye izici, ukubekezelelwa kwamandla kagesi kumadivayisi we-gallium nitride kuvame ukuba ngu-1000V, kanti I-voltage yokusebenzisa ephephile ngokuvamile ingaphansi kuka-650V.
Into | I-GaN-TCU-C50 | I-GaN-TCN-C50 | I-GaN-TCP-C50 |
Ubukhulu | e 50.8mm ± 0.1mm | ||
Ubukhulu | 4.5±0.5 um | 4.5±0.5um | |
Ukuqondisa | Indiza ye-C(0001) ±0.5° | ||
Uhlobo Lokuqhuba | N-uhlobo (Akususiwe) | N-uhlobo (Si-doped) | Uhlobo lwe-P (Mg-doped) |
Ukumelana(3O0K) | <0.5 Q・cm | <0.05 Q・cm | ~ 10 Q・cm |
I-Carrier Concentration | <5x1017cm-3 | > 1x1018cm-3 | > 6x1016 cm-3 |
Ukuhamba | ~ 300 cm2/Vs | ~ 200 cm2/Vs | ~ 10cm2/Vs |
Ukuminyana Kokususwa | Ngaphansi kuka-5x108cm-2(kubalwe ama-FWHM e-XRD) | ||
Isakhiwo se-substrate | I-GaN on Sapphire(Okujwayelekile: Inketho ye-SSP: DSP) | ||
Indawo Esetshenziswayo Yobuso | > 90% | ||
Iphakheji | Ipakishwe endaweni yegumbi elihlanzekile lekilasi elingu-100, kumakhasethi angama-25pcs noma ezitsheni eziyisinkwa esiyisinkwa esisodwa, ngaphansi kwesimo se-nitrogen. |
* Okunye ukujiya kungenziwa egcizelele