4H-N/6H-N SiC Wafer Ukukhiqizwa kabusha kocwaningo lwe-Dummy grade Dia150mm Silicon carbide substrate

Incazelo emfushane:

Singahlinzeka nge-substrate yefilimu encane eqhuba ukushisa okuphezulu, amafilimu amancane amagnetic kanye ne-substrate yefilimu encane ye-ferroelectric, ikristalu ye-semiconductor, ikristalu ye-optical, izinto zekristalu ye-laser, ngasikhathi sinye zihlinzeka ngokuqondisa, ukusika ikristalu, ukugaya, ukupholisha kanye nezinye izinsizakalo zokucubungula. Ama-substrate ethu e-SiC avela eTankeblue Factory eShayina.


Izici

Imininingwane ye-substrate ye-silicon carbide (SiC) engu-6 intshi ububanzi

Ibanga

I-MPD engekho

Ukukhiqizwa

Ibanga Locwaningo

Ibanga Eliyimbumbulu

Ububanzi

150.0mm±0.25mm

Ubukhulu

4H-N

350um±25um

4H-SI

500um±25um

Ukuqondiswa kwe-Wafer

Ku-axis:<0001>±0.5° ye-4H-SI
I-axis evaliwe: 4.0°ukuya ku-<1120>±0.5°ye-4H-N

Ifulethi Eliyinhloko

{10-10}±5.0°

Ubude Obuphansi Obuyinhloko

47.5mm±2.5mm

Ukukhishwa komngcele

3mm

I-TTV/Umnsalo/I-Warp

≤15um/≤40um/≤60um

Ubuningi be-Micropipe

≤1cm-2

≤5cm-2

≤15cm-2

≤50cm-2

Ukumelana 4H-N 4H-SI

0.015~0.028Ω!cm

≥1E5Ω!cm

Ubulukhuni

I-Polish Ra ≤1nm CMP Ra≤0.5nm

#Iqhekeka ngenxa yokukhanya okunamandla aphezulu

Akukho

1 ivunyelwe , ≤2mm

Ubude obuhlanganisiwe ≤10mm, ubude obubodwa ≤2mm

*Amapuleti e-Hex ngokukhanya okuphezulu

Indawo ehlanganisiwe ≤1%

Indawo eqongelelekayo ≤ 2%

Indawo eqongelelekayo ≤ 5%

* Izindawo ze-Polytype ngokukhanya okuphezulu

Akukho

Indawo eqongelelekayo ≤ 2%

Indawo eqongelelekayo ≤ 5%

*&Iklwebheka ngokukhanya okunamandla aphezulu

Ukuklwebheka okungu-3 kuya ku-1 x ubude obuhlanganisiwe obungu-wafer ububanzi

Imihuzuko emi-5 kuya ku-1 x ubude obuhlanganisiwe obungu-wafer ububanzi

Ukuklwebheka okungu-5 kuya ku-1 x ubude obuhlanganisiwe be-wafer ububanzi

I-chip yomphetho

Akukho

Kuvunyelwe okungu-3, ​​≤0.5mm ngakunye

5 kuvunyelwe, ≤1mm ngayinye

Ukungcoliswa ukukhanya okunamandla kakhulu

Akukho

Ukuthengisa kanye Nesevisi Yamakhasimende

Ukuthengwa Kwezinto Ezisetshenziswayo

Umnyango wokuthenga izinto zokwakha unesibopho sokuqoqa zonke izinto zokusetshenziswa ezidingekayo ukuze kukhiqizwe umkhiqizo wakho. Ukulandeleka okuphelele kwayo yonke imikhiqizo nezinto zokwakha, okuhlanganisa ukuhlaziywa kwamakhemikhali nokwenyama kuyatholakala njalo.

Ikhwalithi

Ngesikhathi nangemva kokukhiqizwa noma ukushintshwa kwemikhiqizo yakho, umnyango wokulawula ikhwalithi uhilelekile ekuqinisekiseni ukuthi zonke izinto zokwakha kanye nokubekezelelana kuyahlangabezana noma kudlula imininingwane yakho.

Isevisi

Siyaziqhenya ngokuba nabasebenzi bobunjiniyela bokuthengisa abanolwazi olungaphezu kweminyaka emi-5 embonini ye-semiconductor. Baqeqeshwe ukuphendula imibuzo yobuchwepheshe kanye nokunikeza izingcaphuno ngesikhathi esifanele ngezidingo zakho.

Siseceleni kwakho nganoma yisiphi isikhathi uma unenkinga, futhi siyixazulule emahoreni ayi-10.

Umdwebo Oningiliziwe

Isisekelo se-silicon carbide (1)
Isisekelo se-silicon carbide (2)

  • Okwedlule:
  • Olandelayo:

  • Bhala umlayezo wakho lapha bese uwuthumela kithi