Imishini Yokusika Indandatho Ye-Wafer Ezenzakalelayo Ngokugcwele Usayizi Wokusebenza 8inch/12inch Wafer Ring Cutting

Incazelo emfushane:

I-XKH ithuthukise ngokuzimela uhlelo lokusika umphetho we-wafer oluzenzakalelayo ngokuphelele, olumele ikhambi elithuthukisiwe elenzelwe izinqubo zokukhiqiza i-semiconductor engaphambili. Lo mshini uhlanganisa ubuchwepheshe bokulawula obusha obuhambisanayo be-multi-axis futhi unesistimu ye-spindle enokuqina okuphezulu (isivinini esiphezulu sokujikeleza: 60,000 RPM), enikeza ukusika umphetho ngokunemba ngokunemba kokusika kufika ku-±5μm. Uhlelo lubonisa ukuhambisana okuhle kakhulu nezingxenye ezahlukene ze-semiconductor, okuhlanganisa kodwa kungagcini lapho:
1. Ama-wafer e-Silicon (Si): Afanele ukucutshungulwa komphetho wama-wafer angu-8-12 intshi ;
2. Ama-semiconductor ahlanganisiwe: Izinto ze-semiconductor zesizukulwane sesithathu njenge-GaAs ne-SiC;
3. Izingxenye ezikhethekile: Ama-wafer ezinto ze-piezoelectric afaka phakathi i-LT/LN;

Idizayini ye-modular isekela ukushintshwa okusheshayo kwezinto eziningi ezisetshenziswayo okuhlanganisa ama-blade edayimane namakhanda okusika nge-laser, okuhambisanayo kudlula amazinga embonini. Ngezidingo zenqubo ezikhethekile, sinikeza izixazululo eziphelele ezihlanganisa:
· Ukunikezwa kwezinto ezisetshenziswayo zokusika ezinikezelwe
· Izinsizakalo zokucubungula ngokwezifiso
· Izixazululo zokwenza ngcono ipharamitha yenqubo


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  • Izici

    Amapharamitha obuchwepheshe

    Ipharamitha Iyunithi Imininingwane
    Usayizi Omkhulu Womsebenzi mm ø12"
    I-Spindle    Ukucushwa I-Spindle Eyodwa
    Isivinini 3,000–60,000 ngomzuzu
    Amandla Okukhipha 1.8 kW (2.4 uma uthanda) ku-30,000 min⁻¹
    I-Max Blade Dia. Ø58 mm
    I-X-Axis Ububanzi Bokusika 310 mm
    I-Y-Axis   Ububanzi Bokusika 310 mm
    Ukwanda kwesinyathelo 0.0001 mm
    Ukunemba Kokubeka ≤0.003 mm/310 mm, ≤0.002 mm/5 mm (iphutha elilodwa)
    I-Z-Axis  Isixazululo Sokunyakaza 0.00005 mm
    Ukuphindaphinda 0.001 mm
    I-θ-Axis Ukujikeleza Okuphezulu 380 degrees
    Uhlobo lwe-Spindle   I-spindle eyodwa, ifakwe i-blade eqinile yokusika indandatho
    Ukunemba Kokusika Indandatho μm ±50
    Ukunemba Kokubeka I-Wafer μm ±50
    Ukusebenza Kahle Kwe-Single-Wafer iminithi/i-wafer 8
    Ukusebenza Kahle Kwama-Wafer Amaningi   Kufika kuma-wafer angu-4 acutshungulwa ngasikhathi sinye
    Isisindo Semishini kg ≈3,200
    Ubukhulu Bemishini (W×D×H) mm 2,730 × 1,550 × 2,070

    Isimiso Sokusebenza

    Uhlelo lufeza ukusebenza okuhle kakhulu kokunciphisa ngokusebenzisa lobu buchwepheshe obuyinhloko:

    1. Uhlelo Lokulawula Ukunyakaza Oluhlakaniphile:
    · I-drive yemoto eqondile eqondile (ukunemba kokubeka okuphindaphindiwe: ± 0.5μm)
    · Ukulawula okuvumelanayo okune-axis eziyisithupha okusekela ukuhlela okuyinkimbinkimbi kwendlela
    · Ama-algorithms okucindezela ukudlidliza ngesikhathi sangempela aqinisekisa ukusika ukuzinza

    2. Uhlelo Lokuthola Okuthuthukisiwe:
    · Inzwa yokuphakama ye-laser ye-3D ehlanganisiwe (ukunemba: 0.1μm)
    · Ukuma okubonakalayo kwe-CCD okunesinqumo esiphezulu (ama-megapixel angu-5)
    · Imodyuli yokuhlola ikhwalithi eku-inthanethi

    3. Inqubo Ezenzakalelayo Ngokugcwele:
    · Ukulayisha/ukukhulula okuzenzakalelayo (i-interface ejwayelekile ye-FOUP iyahambisana)
    · Uhlelo lokuhlunga oluhlakaniphile
    · Iyunithi yokuhlanza evaliwe (ukuhlanzeka: Ibanga 10)

    Izicelo Ezijwayelekile

    Lo mshini unikeza inani elibalulekile kuzo zonke izinhlelo zokusebenza zokukhiqiza ze-semiconductor:

    Insimu Yesicelo Izinto Zokucubungula Izinzuzo Zobuchwepheshe
    Ukukhiqizwa kwe-IC Ama-Silicon Wafer angu-8/12" Kuthuthukisa ukuqondanisa kwe-lithography
    Amadivayisi Amandla Ama-Wafer e-SiC/GaN Kuvimbela ukukhubazeka komphetho
    Izinzwa ze-MEMS Ama-SOI Wafers Iqinisekisa ukuthembeka kwedivayisi
    Amadivayisi e-RF Ama-Wafer e-GaAs Kuthuthukisa ukusebenza kwemvamisa ephezulu
    Ukupakisha Okuthuthukisiwe Ama-Wafers Aphinde Akhiwa Kwandisa isivuno sokupakisha

    Izici

    1. Ukucushwa kwesiteshi esine ukuze kucutshungulwe kahle kakhulu;
    2. Ukususwa nokususwa kwendandatho ye-TAIKO eqinile ;
    3.Ukuhambisana okuphezulu nezinto ezisetshenziswayo eziyinhloko ;
    4. Ubuchwepheshe bokusika obuhambisanayo be-Multi-axis buqinisekisa ukusika okuqondile komphetho;
    5. Ukugeleza kwenqubo okuzenzakalelayo ngokugcwele kunciphisa kakhulu izindleko zabasebenzi ;
    6. Umklamo wetafula lokusebenza owenziwe ngokwezifiso uvumela ukucutshungulwa okuzinzile kwezakhiwo ezikhethekile ;

    Imisebenzi

    1. Uhlelo lokuthola indandatho;
    2. Ukuhlanza itafula lokusebenza okuzenzakalelayo ;
    3. Uhlelo lokususa izibopho ze-UV oluhlakaniphile ;
    4. Ukuqoshwa kwelogi yokusebenza ;
    5. Ukuhlanganiswa kwemodyuli yokuzenzakalela kwefektri ;

    Ukuzibophezela Kwenkonzo

    I-XKH inikeza izinsizakalo zokusekela eziphelele neziphelele eziklanyelwe ukwandisa ukusebenza kahle kwemishini kanye nokusebenza kahle kuyo yonke indlela yakho yokukhiqiza.
    1. Izinsizakalo Zokwenza Ngokwezifiso
    · Ukucushwa Kwemishini Eyenzelwe Wena: Ithimba lethu lobunjiniyela lisebenzisana eduze namakhasimende ukuze lenze ngcono amapharamitha esistimu (isivinini sokusika, ukukhethwa kwe-blade, njll.) ngokusekelwe ezicini ezithile zezinto (i-Si/SiC/GaAs) kanye nezidingo zenqubo.
    · Ukusekelwa Kokuthuthukiswa Kwezinqubo: Sinikeza ukucutshungulwa kwamasampula ngemibiko yokuhlaziya enemininingwane ehlanganisa ukulinganiswa kobulukhuni bomphetho kanye nokuhlelwa kwemephu yamaphutha.
    · Ukuthuthukiswa Kokubambisana Kwezinto Ezisetshenziswayo: Ngezinto ezintsha (isib. i-Ga₂O₃), sibambisana nabakhiqizi abaphambili bezinto ezisetshenziswayo ukuthuthukisa ama-blade/ama-laser optics aqondene nohlelo lokusebenza.

    2. Usekelo Lobuchwepheshe Lochwepheshe
    · Ukusekelwa Okuzinikele Esizeni: Nika onjiniyela abaqinisekisiwe izigaba ezibalulekile zokunyuka (ngokuvamile amasonto ama-2-4), okuhlanganisa:
    Ukulinganiswa kwemishini kanye nokulungiswa kwenqubo
    Ukuqeqeshwa kwamakhono omqhubi
    Isiqondiso sokuhlanganiswa kwegumbi lokuhlanza le-ISO Class 5
    · Ukulungiswa Okubikezelayo: Ukuhlolwa kwempilo kwekota ngokuhlaziywa kokudlidliza kanye nokuxilongwa kwe-servo motor ukuvimbela isikhathi sokungasebenzi esingahleliwe.
    · Ukuqapha Kude: Ukulandelela ukusebenza kwemishini ngesikhathi sangempela ngeplatifomu yethu ye-IoT (JCFront Connect®) ngezaziso ezizenzakalelayo ezingavamile.

    3. Izinsizakalo Ezenezelwe Inani
    · Isisekelo Solwazi Lwenqubo: Finyelela izindlela zokupheka zokusika eziqinisekisiwe ezingaphezu kuka-300 zezinto ezahlukahlukene (ezibuyekezwa njalo ngekota).
    · Ukuqondaniswa Kwemephu Yobuchwepheshe: Ukuvikela ukutshalwa kwezimali kwakho esikhathini esizayo ngezindlela zokuthuthukisa ihadiwe/isofthiwe (isb., imodyuli yokuthola amaphutha esekelwe ku-AI).
    · Impendulo Ephuthumayo: Ukuxilongwa okukude okuqinisekisiwe kwamahora ama-4 kanye nokungenelela endaweni amahora angama-48 (ukumbozwa komhlaba wonke).

    4. Ingqalasizinda Yesevisi
    · Isiqinisekiso Sokusebenza: Ukuzibophezela kwenkontileka esikhathini sokusebenza semishini esingu-≥98% ngezikhathi zokuphendula ezisekelwa yi-SLA.

    Intuthuko Eqhubekayo

    Senza izinhlolovo zokwaneliseka kwamakhasimende kabili ngonyaka futhi sisebenzisa izinhlelo zeKaizen zokuthuthukisa ukulethwa kwezinsizakalo. Ithimba lethu le-R&D lihumusha ukuqonda kwensimu ekuthuthukisweni kwemishini - u-30% wokuthuthukiswa kwe-firmware uvela kwimpendulo yamakhasimende.

    Imishini Yokusika Indandatho Ye-Wafer Ezenzakalelayo Ngokugcwele 7
    Imishini Yokusika Indandatho Ye-Wafer Ezenzakalelayo Ngokugcwele 8

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