I-wafer ye-substrate ye-Al2O3 engu-99.999% engu-Dia101.6×0.65mmt enobude obuyisicaba obuyinhloko.
Incazelo
Imininingwane evamile yama-wafers e-sapphire angu-4-intshi yethulwa kanje:
Ubukhulu: Ubukhulu be-common sapphire wafers buphakathi kuka-0.2 mm no-2 mm, futhi ubukhulu obuthile bungenziwa ngokwezifiso ngokwezidingo zamakhasimende.
Umngcele Wokubekwa: Ngokuvamile kunengxenye encane emaphethelweni e-wafer ebizwa ngokuthi "umngcele wokubekwa" evikela ubuso nomngcele we-wafer, futhi ngokuvamile ayiguquki.
Ukulungiswa kwendawo: Ama-wafer avamile e-sapphire ayagaywa ngomshini futhi acwebezelwe ngamakhemikhali ukuze kusheleleke indawo.
Izakhiwo Zomphezulu: Ubuso be-sapphire wafers buvame ukuba nezakhiwo ezinhle zokukhanya, njengokukhanya okuphansi kanye ne-refractive index ephansi, ukuze kuthuthukiswe ukusebenza kwedivayisi.
Izicelo
● Isisekelo sokukhula samakhemikhali e-III-V kanye ne-II-VI
● Izinto zikagesi kanye ne-optoelectronics
● Izinhlelo zokusebenza ze-IR
● I-Silicon On Sapphire Integrated Circuit (SOS)
● Isekethe Ehlanganisiwe Yemvamisa Yomsakazo (RFIC)
Imininingwane
| Into | Ama-wafer e-Sapphire angu-4-intshi (0001) angu-650μm | |
| Izinto Zekristalu | 99,999%, Ukuhlanzeka Okuphezulu, i-Monocrystalline Al2O3 | |
| Ibanga | I-Prime, i-Epi-Ready | |
| Ukuqondiswa Komphezulu | Indiza ye-C(0001) | |
| Indiza engu-C engaphandle kwe-engeli ebheke ku-M-axis 0.2 +/- 0.1° | ||
| Ububanzi | 100.0 mm +/- 0.1 mm | |
| Ubukhulu | 650 μm +/- 25 μm | |
| Ukuqondiswa Okuyisisekelo Okuyisicaba | Indiza engu-A(11-20) +/- 0.2° | |
| Ubude Obuphansi Obuyinhloko | 30.0 mm +/- 1.0 mm | |
| I-Side Single Polished | Ubuso Bangaphambili | I-Epi-polished, i-Ra < 0.2 nm (nge-AFM) |
| (SSP) | Indawo Yangemuva | Inhlabathi enhle, i-Ra = 0.8 μm kuya ku-1.2 μm |
| Ipholishwe Kabili Ehlangothini | Ubuso Bangaphambili | I-Epi-polished, i-Ra < 0.2 nm (nge-AFM) |
| (i-DSP) | Indawo Yangemuva | I-Epi-polished, i-Ra < 0.2 nm (nge-AFM) |
| I-TTV | < 20 μm | |
| UKUGOBHOZA | < 20 μm | |
| I-WARP | < 20 μm | |
| Ukuhlanza / Ukupakisha | Ukuhlanza nokupakisha i-vacuum cleanroom yekilasi le-100, | |
| Izingcezu ezingu-25 ephaketheni lekhasethi elilodwa noma ephaketheni elilodwa. | ||
Sineminyaka eminingi yesipiliyoni embonini yokucubungula i-sapphire. Kubandakanya imakethe yabaphakeli baseShayina, kanye nemakethe yezidingo zomhlaba wonke. Uma unezidingo, sicela ukhululeke ukuxhumana nathi.
Umdwebo Oningiliziwe



