I-wafer ye-substrate ye-Al2O3 engu-99.999% engu-Dia101.6×0.65mmt enobude obuyisicaba obuyinhloko.

Incazelo emfushane:

I-wafer yesafire engamasentimitha angu-4 (cishe angu-101.6 mm) iyi-wafer eyenziwe ngezinto zesafire enobubanzi obungamasentimitha angu-4.


Izici

Incazelo

Imininingwane evamile yama-wafers e-sapphire angu-4-intshi yethulwa kanje:

Ubukhulu: Ubukhulu be-common sapphire wafers buphakathi kuka-0.2 mm no-2 mm, futhi ubukhulu obuthile bungenziwa ngokwezifiso ngokwezidingo zamakhasimende.

Umngcele Wokubekwa: Ngokuvamile kunengxenye encane emaphethelweni e-wafer ebizwa ngokuthi "umngcele wokubekwa" evikela ubuso nomngcele we-wafer, futhi ngokuvamile ayiguquki.

Ukulungiswa kwendawo: Ama-wafer avamile e-sapphire ayagaywa ngomshini futhi acwebezelwe ngamakhemikhali ukuze kusheleleke indawo.

Izakhiwo Zomphezulu: Ubuso be-sapphire wafers buvame ukuba nezakhiwo ezinhle zokukhanya, njengokukhanya okuphansi kanye ne-refractive index ephansi, ukuze kuthuthukiswe ukusebenza kwedivayisi.

Izicelo

● Isisekelo sokukhula samakhemikhali e-III-V kanye ne-II-VI

● Izinto zikagesi kanye ne-optoelectronics

● Izinhlelo zokusebenza ze-IR

● I-Silicon On Sapphire Integrated Circuit (SOS)

● Isekethe Ehlanganisiwe Yemvamisa Yomsakazo (RFIC)

Imininingwane

Into

Ama-wafer e-Sapphire angu-4-intshi (0001) angu-650μm

Izinto Zekristalu

99,999%, Ukuhlanzeka Okuphezulu, i-Monocrystalline Al2O3

Ibanga

I-Prime, i-Epi-Ready

Ukuqondiswa Komphezulu

Indiza ye-C(0001)

Indiza engu-C engaphandle kwe-engeli ebheke ku-M-axis 0.2 +/- 0.1°

Ububanzi

100.0 mm +/- 0.1 mm

Ubukhulu

650 μm +/- 25 μm

Ukuqondiswa Okuyisisekelo Okuyisicaba

Indiza engu-A(11-20) +/- 0.2°

Ubude Obuphansi Obuyinhloko

30.0 mm +/- 1.0 mm

I-Side Single Polished

Ubuso Bangaphambili

I-Epi-polished, i-Ra < 0.2 nm (nge-AFM)

(SSP)

Indawo Yangemuva

Inhlabathi enhle, i-Ra = 0.8 μm kuya ku-1.2 μm

Ipholishwe Kabili Ehlangothini

Ubuso Bangaphambili

I-Epi-polished, i-Ra < 0.2 nm (nge-AFM)

(i-DSP)

Indawo Yangemuva

I-Epi-polished, i-Ra < 0.2 nm (nge-AFM)

I-TTV

< 20 μm

UKUGOBHOZA

< 20 μm

I-WARP

< 20 μm

Ukuhlanza / Ukupakisha

Ukuhlanza nokupakisha i-vacuum cleanroom yekilasi le-100,

Izingcezu ezingu-25 ephaketheni lekhasethi elilodwa noma ephaketheni elilodwa.

Sineminyaka eminingi yesipiliyoni embonini yokucubungula i-sapphire. Kubandakanya imakethe yabaphakeli baseShayina, kanye nemakethe yezidingo zomhlaba wonke. Uma unezidingo, sicela ukhululeke ukuxhumana nathi.

Umdwebo Oningiliziwe

Ubude Obuphansi Obuyinhloko (1)
Ubude Obuyisisekelo Obuyisicaba (2)
Ubude Obuphansi Obuyinhloko (3)

  • Okwedlule:
  • Olandelayo:

  • Bhala umlayezo wakho lapha bese uwuthumela kithi