4 intshi Ukuhlanzeka okuphezulu kwe-Al2O3 99.999% isicwecwana se-Sapphire substrate i-Dia101.6×0.65mmt enobude obuyisisekelo obuyisicaba
Incazelo
Ukucaciswa okujwayelekile kwama-4-inch sapphire wafers kwethulwa ngale ndlela elandelayo:
Ubukhulu: Ugqinsi lwamawafa esafire avamile luphakathi kuka-0.2 mm no-2 mm, futhi ukujiya okuthile kungenziwa ngokwezifiso ngokuya ngezidingo zamakhasimende.
I-Placement Edge: Ngokuvamile kuba nengxenye encane emaphethelweni e-wafer ebizwa ngokuthi "i-placement edge" evikela ingaphezulu le-wafer, futhi ngokuvamile i-amorphous.
Ukulungiswa kwendawo: Amawafa esafire avamile agaywa ngomshini futhi aphucuziwe ngokomshini ukuze asheleleze indawo engaphezulu.
Izakhiwo ezingaphezulu: Ingaphezulu lama-wafers wesafire ngokuvamile linezinto ezinhle zokubona, ezifana nokubukeka okuphansi kanye nenkomba ephansi ye-refractive, ukuthuthukisa ukusebenza kwedivayisi.
Izinhlelo zokusebenza
● I-substrate yokukhula yezinhlanganisela ze-III-V ne-II-VI
● Ugesi kanye ne-optoelectronics
● Izinhlelo zokusebenza ze-IR
● I-Silicon On Sapphire Integrated Circuit(SOS)
● I-Radio Frequency Integrated Circuit(RFIC)
Ukucaciswa
Into | 4-intshi C-indiza(0001) 650μm Sapphire Wafers | |
I-Crystal Materials | 99,999%, Ukuhlanzeka Okuphezulu, i-Monocrystalline Al2O3 | |
Ibanga | Prime, Epi-Ready | |
I-Surface Orientation | I-C-plane(0001) | |
Indiza ye-C-engeli ebheke ku-M-eksisi 0.2 +/- 0.1° | ||
Ububanzi | 100.0 mm +/- 0.1 mm | |
Ubukhulu | 650 μm +/- 25 μm | |
Isisekelo se-Flat Orientation | Indiza(11-20) +/- 0.2° | |
Ubude Befulethi obuyisisekelo | 30.0 mm +/- 1.0 mm | |
Uhlangothi Olulodwa Lupholishiwe | Indawo Engaphambili | I-Epi-polished, Ra <0.2 nm (by AFM) |
(SSP) | Indawo Engemuva | Umhlabathi omuhle, uRa = 0.8 μm kuya ku-1.2 μm |
Uhlangothi Olukabili Lupholishiwe | Indawo Engaphambili | I-Epi-polished, Ra <0.2 nm (by AFM) |
(DSP) | Indawo Engemuva | I-Epi-polished, Ra <0.2 nm (by AFM) |
I-TTV | < 20 μm | |
KHOTHAMA | < 20 μm | |
I-WARP | < 20 μm | |
Ukuhlanza / Ukupakisha | Ukuhlanza igumbi lokuhlanza le-Class 100 kanye nokupakishwa kwe-vacuum, | |
Izingcezu ezingama-25 ephaketheni lekhasethi elilodwa noma ephaketheni lesiqephu esisodwa. |
Sinesipiliyoni seminyaka eminingi embonini yokucubungula isafire. Kubandakanya imakethe yabahlinzeki bempahla baseShayina, kanye nemakethe yezidingo zomhlaba wonke. Uma unezidingo, sicela ukhululeke ukuxhumana nathi.