Ama-2 inch Silicon Carbide Wafers 6H noma 4H N-uhlobo noma amaSemi-Insulating SiC Substrates
Imikhiqizo Enconyiwe
I-4H SiC wafer N-uhlobo
Ububanzi: 2 intshi 50.8mm | 4 intshi 100mm | 6 intshi 150mm
Umumo: ku-axis 4.0˚ kuya ku-<1120> ± 0.5˚
Ukumelana: <0.1 ohm.cm
Ukuqina: I-Si-face CMP Ra <0.5nm, i-C-face optical polish Ra <1 nm
I-4H SiC wafer Semi-insulating
Ububanzi: 2 intshi 50.8mm | 4 intshi 100mm | 6 intshi 150mm
Umumo: ku-eksisi {0001} ± 0.25˚
Ukumelana: >1E5 ohm.cm
Ukuqina: I-Si-face CMP Ra <0.5nm, i-C-face optical polish Ra <1 nm
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