I-SiC substrate 3inch 350um ukujiya HPSI uhlobo Prime Grade Dummy grade
Izakhiwo
Ipharamitha | Ibanga Lokukhiqiza | IBanga Lokucwaninga | Dummy Grade | Iyunithi |
Ibanga | Ibanga Lokukhiqiza | IBanga Lokucwaninga | Dummy Grade | |
Ububanzi | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
Ubukhulu | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
I-Wafer Orientation | Ku-eksisi: <0001> ± 0.5° | Ku-eksisi: <0001> ± 2.0° | Ku-eksisi: <0001> ± 2.0° | iziqu |
I-Micropipe Density (MPD) | ≤1 | ≤ 5 | ≤ 10 | cm−2^-2−2 |
Ukungazweli Kagesi | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
I-Dopant | Kuhlehlisiwe | Kuhlehlisiwe | Kuhlehlisiwe | |
Isisekelo se-Flat Orientation | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | iziqu |
Ubude Befulethi obuyisisekelo | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
Ubude Befulethi besibili | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
I-Flat Orientation yesibili | 90° CW kusukela efulethini lokuqala ± 5.0° | 90° CW kusukela efulethini lokuqala ± 5.0° | 90° CW kusukela efulethini lokuqala ± 5.0° | iziqu |
Ukukhishwa komkhawulo | 3 | 3 | 3 | mm |
LTV/TTV/Bow/Warp | 3/10 / ±30/40 | 3/10 / ±30/40 | 5/15 / ±40/45 | µm |
Ukuqina Kobuso | Ubuso beSi: CMP, C-face: Bupholishiwe | Ubuso beSi: CMP, C-face: Bupholishiwe | Ubuso beSi: CMP, C-face: Bupholishiwe | |
Imifantu (High-Intensity Light) | Lutho | Lutho | Lutho | |
I-Hex Plates (Ukukhanya Okunamandla Kakhulu) | Lutho | Lutho | Indawo eqoqiwe 10% | % |
Izindawo ze-Polytype (Ukukhanya Okunamandla Kakhulu) | Indawo ehlanganisiwe 5% | Indawo eqoqiwe 20% | Indawo eqoqiwe 30% | % |
Ukuklwebheka (Ukukhanya Okumandla Kakhulu) | ≤ 5 imihuzuko, ubude obukhulayo ≤ 150 | ≤ 10 imihuzuko, ubude obuningi ≤ 200 | ≤ 10 imihuzuko, ubude obuningi ≤ 200 | mm |
I-Edge Chipping | Lutho ≥ 0.5 mm ububanzi/ukushona | 2 okuvunyelwe ≤ 1 mm ububanzi/ukushona | 5 okuvunyelwe ≤ 5 mm ububanzi/ukushona | mm |
Ukungcoliswa kobuso | Lutho | Lutho | Lutho |
Izinhlelo zokusebenza
1. High-Power Electronics
I-thermal conductivity ephakeme kanye ne-bandgap ebanzi yama-wafers e-SiC awenza alungele amandla aphezulu, amadivaysi amafrikhwensi aphezulu:
●Ama-MOSFET nama-IGBT okuguqulwa kwamandla.
● Amasistimu wamandla emoto kagesi athuthukile, afaka ama-inverter namashaja.
● Ingqalasizinda yegridi ehlakaniphile nezinhlelo zamandla avuselelekayo.
2. I-RF kanye neMicrowave Systems
Ama-substrates e-SiC anika amandla ama-high-frequency RF kanye nezicelo ze-microwave ezinokulahlekelwa okuncane kwesignali:
● Ezokuxhumana kanye nezinhlelo zesathelayithi.
● Amasistimu we-radar emkhathini.
●Izingxenye zenethiwekhi ye-5G ethuthukisiwe.
3. Ama-Optoelectronics nezinzwa
Izakhiwo eziyingqayizivele ze-SiC zisekela izinhlelo zokusebenza ezihlukahlukene ze-optoelectronic:
● Izitholi ze-UV zokuqapha imvelo nezinzwa zezimboni.
● I-LED ne-laser substrates yokukhanyisa-isimo esiqinile nezisetshenziswa ezinembayo.
●Izinzwa zokushisa okuphezulu kwe-aerospace nezimboni zezimoto.
4. Ucwaningo Nentuthuko
Ukwehlukahlukana kwamabanga (Ukukhiqiza, Ucwaningo, I-Dummy) kunika amandla ukuhlola okuphambili kanye ne-prototyping yedivayisi kuzemfundo nakwezimboni.
Izinzuzo
●Ukwethembeka:Ukumelana okuhle kakhulu nokuzinza kuwo wonke amabanga.
●Ukwenza ngokwezifiso:Ukuma ofanelanisiwe nokuqina ukuze kuhambisane nezidingo ezahlukahlukene.
●Ukuhlanzeka okuphezulu:Ukwakhiwa okungahlehlisiwe kuqinisekisa ukuhluka okuncane okuhlobene nokungcola.
●Scalability:Ihlangabezana nezidingo zakho kokubili ukukhiqizwa ngobuningi kanye nocwaningo lokuhlola.
Amawafa we-SiC angama-intshi angu-3 ayisango lakho lokuya kumadivayisi asebenza kahle kakhulu kanye nentuthuko yezobuchwepheshe emisha. Ngemibuzo kanye nemininingwane enemininingwane, xhumana nathi namuhla.
Isifinyezo
I-3-inch High Purity Silicon Carbide (SiC) Wafers, etholakala ku-Production, Research, kanye namaBanga e-Dummy, angama-premium substrates aklanyelwe ugesi wamandla aphezulu, amasistimu e-RF/microwave, optoelectronics, ne-R&D ethuthukisiwe. Lawa mawafa afaka izakhiwo ezingagudluki, ezivikela kancane ezinokumelana okuhle kakhulu (≥1E10 Ω·cm Yebanga Lokukhiqiza), ukuminyana kwe-micropipe ephansi (≤1 cm−2^-2−2), kanye nekhwalithi yendawo ehlukile. Zenzelwe izinhlelo zokusebenza ezisebenza kahle kakhulu, okuhlanganisa ukuguqulwa kwamandla, ezokuxhumana, izinzwa ze-UV, nobuchwepheshe be-LED. Ngomumo owenzeka ngendlela oyifisayo, ukuqhutshwa kwe-thermal okuphezulu, kanye nezakhiwo eziqinile zemishini, lawa mawafa e-SiC anika amandla ukwakhiwa kwedivayisi okusebenzayo, okuthembekile kanye nokuqanjwa kabusha okudabukisayo kuzo zonke izimboni.