Isisetshenziswa Se-Sapphire Ingot Sokukhulisa I-Czochralski CZ Indlela Yokukhiqiza Ama-Sapphire Wafers angu-2inch-12inch
Isimiso Sokusebenza
Indlela ye-CZ isebenza ngezinyathelo ezilandelayo:
1. Ukuncibilika Kwezinto Eziluhlaza: Ukuhlanzeka okuphezulu kwe-Al₂O₃ (ukuhlanzeka >99.999%) kuncibilika ku-iridium crucible ku-2050–2100°C.
2. Isingeniso se-Crystal Seed: Ikristalu yembewu yehliselwa ekuncibilikeni, kulandelwa ukudonsa ngokushesha ukuze kwakheke intamo (ububanzi obungu-<1 mm) ukuze kuqedwe ukugudluka.
3. Ukwakhiwa Kwamahlombe Nokukhula Kwenqwaba: Isivinini sokudonsa sincishiswa sibe ngu-0.2–1 mm/h, kancane kancane sandise ububanzi bekristalu bufinyelele kusayizi okuhlosiwe (isb, amayintshi angu-4–12).
4. I-Annealing and Cooling: I-crystal ipholiswe ku-0.1-0.5 ° C/min ukuze kuncishiswe ukuqhekeka okubangelwa ukucindezeleka okushisayo.
5. Izinhlobo Zekristalu Ezihambisanayo:
Ibanga le-Electronic: Ama-semiconductor substrates (TTV <5 μm)
Ibanga Lokubona: amawindi e-UV laser (ukudlulisa >90%@200 nm)
Izinhlobonhlobo ze-Doped: I-Ruby (i-Cr³⁺ concentration 0.01–0.5 wt.%), ishubhu yesafire eluhlaza okwesibhakabhaka
Izingxenye Zesistimu Eziyinhloko
1. Isistimu yokuncibilika
I-Iridium Crucible: Imelana no-2300 ° C, imelana nokugqwala, iyahambisana nokuncibilika okukhulu (100-400 kg).
I-Induction Heating Furnace: Ukulawulwa kwezinga lokushisa okuzimele kwezindawo eziningi (± 0.5°C), ama-gradients athuthukisiwe ashisayo.
2. Uhlelo Lokudonsa kanye Nokuzungezisa
I-High-Precision Servo Motor: Ukulungiswa kokudonsa ngu-0.01 mm/h, ukugxila okujikelezayo <0.01 mm.
I-Magnetic Fluid Seal: Ukudluliswa okungaxhunywanga kokukhula okuqhubekayo (>amahora angama-72).
3. Uhlelo Lokulawula Ukushisa
I-PID Closed-Loop Control: Ukulungiswa kwamandla esikhathi sangempela (50–200 kW) ukuze kuzinziswe inkambu eshisayo.
I-Inert Gas Protection: Ingxube ye-Ar/N₂ (ubumsulwa obungama-99.999%) ukuze kuvinjelwe i-oxidation.
4. Okuzenzakalelayo kanye nokuqapha
I-CCD Diameter Monitoring: Impendulo yesikhathi sangempela (ukunemba ±0.01 mm).
I-Infrared Thermography: Iqapha i-solid-liquid interface morphology.
CZ vs. KY Indlela Ukuqhathanisa
Ipharamitha | Indlela ye-CZ | Indlela ye-KY |
Max. Usayizi we-Crystal | 12 amayintshi (300 mm) | 400 mm (ingot emise okwepheya) |
I-Defect Density | <100/cm² | <50/cm² |
Izinga Lokukhula | 0.5–5 mm/h | 0.1–2 mm/h |
Ukusetshenziswa kwamandla | 50–80 kWh/kg | 80–120 kWh/kg |
Izinhlelo zokusebenza | Ama-substrates e-LED, i-GaN epitaxy | Amawindi akhanyayo, ama-ingots amakhulu |
Izindleko | Okumaphakathi (utshalomali lwemishini ephezulu) | Phezulu (inqubo eyinkimbinkimbi) |
Izinhlelo zokusebenza ezibalulekile
1. Imboni ye-Semiconductor
I-GaN Epitaxial Substrates: 2–8-inch wafers (TTV <10 μm) yama-Micro-LED nama-laser diode.
Ama-Wafers e-SOI: Ubulukhuni bobuso <0.2 nm kuma-chips ahlanganiswe ne-3D.
2. I-Optoelectronics
I-UV Laser Windows: Imelana nokuminyana kwamandla okungu-200 W/cm² kuma-lithography optics.
Izingxenye ze-infrared: I-coefficient yokumuncwa <10⁻³ cm⁻¹ yomfanekiso oshisayo.
3. I-Consumer Electronics
Amakhava ekhamera ye-Smartphone: Ubulukhuni be-Mohs 9, 10× ukuthuthukiswa kokumelana nokuklwebheka.
Izibonisi ze-Smartwatch: Ubukhulu 0.3-0.5 mm, ukudlulisa > 92%.
4. I-Defence kanye ne-Aerospace
I-Nuclear Reactor Windows: Ukubekezelela imisebe kufika ku-10¹⁶ n/cm².
I-High-Power Laser Mirrors: Ukuguqulwa kwe-Thermal <λ/20@1064 nm.
Izinkonzo ze-XKH
1. Ukwenziwa Kwezisetshenziswa ngokwezifiso
I-Scalable Chamber Design: Φ200–400 mm ukucushwa kokukhiqizwa kwe-wafer engu-2–12-intshi.
I-Doping Flexibility: Isekela i-rare-earth (Er/Yb) kanye ne-transition-metal (Ti/Cr) doping yezakhiwo ze-optoelectronic eziklanyelwe.
2. Usekelo Lokusuka Ekupheleni
Ukuthuthukisa Inqubo: Izindlela zokupheka eziqinisekiswe ngaphambilini (50+) ze-LED, amadivayisi e-RF, nezinto eziqiniswe ngemisebe.
I-Global Service Network: Ukuxilongwa okukude okungu-24/7 nokugcinwa kwendawo enewaranti yezinyanga ezingama-24.
3. I-Downstream Processing
I-Wafer Fabrication: Ukusika, ukugaya, nokupholisha ama-wafers angu-2–12-intshi (C/A-plane).
Imikhiqizo Eyengezwe Ivalue:
Izingxenye Zokubona: Amawindi e-UV/IR (ubukhulu obungu-0.5–50 mm).
Izinto Zobucwebe-Grade: Cr³⁺ ruby (GIA-certified), Ti³⁺ star sapphire.
4. Ubuholi Bezobuchwepheshe
Izitifiketi: Ama-wafers athobela i-EMI.
Amalungelo obunikazi: Amalungelo obunikazi ayinhloko ekusungulweni kwendlela ye-CZ.
Isiphetho
Imishini yendlela ye-CZ iletha ukuhambisana kobukhulu obukhulu, amanani angalungile aphansi kakhulu, kanye nokuzinza kwenqubo ephezulu, okuyenza ibe uphawu lomkhakha we-LED, i-semiconductor, nezicelo zokuvikela. I-XKH inikeza ukwesekwa okuphelele kusukela ekusetshenzisweni kwemishini kuya ekucutshungulweni kwangemva kokukhula, okuvumela amaklayenti ukuthi afinyelele ukukhiqizwa kwekristalu yesafire engabizi kakhulu, esebenza kahle kakhulu.

