I-LNOI Wafer (I-Lithium Niobate ku-Insulator) I-Telecommunications Sensing High Electro-Optic
Umdwebo onemininingwane
Uhlolojikelele
Ngaphakathi kwebhokisi le-wafer kunemifantu elinganayo, ubukhulu bayo obufana ngokuqinile ukusekela izinhlangothi ezimbili ze-wafer. Ibhokisi lekristalu ngokuvamile lenziwa ngezinto zepulasitiki ezishintshashintshayo ze-PP ezimelana nezinga lokushisa, ukuguga kanye nogesi omile. Imibala ehlukene yezithasiselo isetshenziselwa ukuhlukanisa izingxenye zenqubo yensimbi ekukhiqizeni kwe-semiconductor. Ngenxa yosayizi omncane wokhiye wama-semiconductors, amaphethini aminyene, kanye nezidingo zosayizi wezinhlayiyana eziqine kakhulu ekukhiqizeni, ibhokisi le-wafer kumele liqinisekiswe indawo ehlanzekile ukuze lixhumeke emgodini wokusabela webhokisi le-microenvironment lemishini ehlukene yokukhiqiza.
I-Fabrication Methodology
Ukwenziwa kwama-wafers e-LNOI kuqukethe izinyathelo ezimbalwa ezinembayo:
Isinyathelo 1: Ukufakwa kwe-Helium IonAma-Helium ions angeniswa kukristalu eyinqwaba ye-LN kusetshenziswa i-ion implanter. Lawa ma-ion ahlala ekujuleni okuthile, enze indiza ebuthakathaka ezogcina isiza ukuhlukaniswa kwefilimu.
Isinyathelo sesi-2: Ukwakhiwa Kwesisekelo SesisekeloI-silicon ehlukile noma i-wafer ye-LN ifakwe i-oxidized noma yendlalwe nge-SiO2 kusetshenziswa i-PECVD noma i-thermal oxidation. Indawo yayo ephezulu ihlelwe ukuze ihlangane kahle.
Isinyathelo sesi-3: Ukuhlanganiswa kwe-LN ku-SubstrateIkristalu ye-LN efakwe nge-ion iyaphetshwa futhi inamathiselwe ku-wafer yesisekelo kusetshenziswa i-wafer bonding eqondile. Ezilungiselelweni zocwaningo, i-benzocyclobutene (BCB) ingasetshenziswa njengenamathela ukuze kube lula ukubopha ngaphansi kwezimo eziqinile.
Isinyathelo sesi-4: Ukwelashwa Okushisayo kanye Nokwehlukaniswa KwefilimuI-Annealing yenza kusebenze ukwakheka kwebhamuza ekujuleni okutshaliwe, okuvumela ukuhlukaniswa kwefilimu elizacile (ungqimba oluphezulu lwe-LN) kusukela kunqwaba. Amandla omshini asetshenziselwa ukuqedela ukuxoshwa.
Isinyathelo sesi-5: Ukupholisha ubusoI-Chemical Mechanical Polishing (CMP) isetshenziswa ukuze bushelelezi indawo engaphezulu ye-LN, ukuthuthukisa ikhwalithi yokubona kanye nesivuno sedivayisi.
Imingcele Yezobuchwepheshe
| Okubalulekile | I-Optical Ibanga LiNbO3 ama-wafes (White or Mnyama) | |
| UCurie Temp | 1142±0.7℃ | |
| Ukusika I-engeli | X/Y/Z njll | |
| Ububanzi/usayizi | 2"/3"/4" ±0.03mm | |
| I-Tol(±) | <0.20 mm ±0.005mm | |
| Ubukhulu | 0.18 ~ 0.5mm noma ngaphezulu | |
| Okuyinhloko Isicaba | 16mm/22mm/32mm | |
| I-TTV | <3μm | |
| Khothama | -30 | |
| I-Wap | <40μm | |
| Ukuqondisa Isicaba | Konke kuyatholakala | |
| Ubuso Uhlobo | Uhlangothi Olulodwa Olupholishiwe(SSP)/Izinhlangothi Ezikabili Zipholishiwe(DSP) | |
| Ipholishiwe ohlangothini Ra | <0.5nm | |
| S/D | 20/10 | |
| Umphetho Imibandela | R=0.2mm C-uhlobo or I-Bullnose | |
| Ikhwalithi | Mahhala of ama-bubbles futhi okufakiwe) | |
| I-Optical i-doped | Mg/Fe/Zn/MgO njll okwe optical ibanga LN amakhekhe nge kuceliwe | |
| I-wafer Ubuso Imibandela | Inkomba ye-refractive | No=2.2878/Ne=2.2033 @632nm wavelength/prism coupler indlela. |
| Ukungcola, | Lutho | |
| Izinhlayiya c>0.3μ m | <=30 | |
| Ukuklwebha, Ukuqhafaza | Lutho | |
| Isici | Ayikho imifantu enqenqemeni, imihuzuko, amasaha, amabala | |
| Ukupakisha | Ibhokisi elingu-Qty/Wafer | 25pcs ibhokisi ngalinye |
Sebenzisa Amacala
Ngenxa yokuguquguquka nokusebenza kwayo, i-LNOI isetshenziswa kuzo zonke izimboni eziningi:
Izithombe:Ama-modulators ahlangene, ama-multiplexer, nama-photonic circuits.
I-RF/Acoustics:Amamojula we-Acousto-optic, izihlungi ze-RF.
I-Quantum Computing:Izixube zefrikhwensi ezingaqondile kanye namajeneretha e-photon-pair.
I-Defence & Aerospace:I-Loss Optical gyros, amadivayisi okushintsha imvamisa.
Amadivayisi Ezokwelapha:Ama-Optical biosensors kanye nama-high-frequency signal probes.
FAQ
Q: Kungani i-LNOI ikhethwa kune-SOI kumasistimu okukhanya?
A:I-LNOI inama-coefficients aphakeme we-electro-optic kanye nobubanzi obusobala obubanzi, obuvumela ukusebenza okuphezulu kumasekhethi e-photonic.
Q: Ingabe i-CMP iphoqelekile ngemva kokuhlukana?
A:Yebo. Indawo ye-LN eveziwe ilukhuni ngemva kokusikwa kwe-ion futhi kufanele sipholishwe ukuze ihlangabezane nezicaciso zebanga lokubona.
Q: Yimuphi usayizi we-wafer ophezulu otholakalayo?
A:Amawafa e-LNOI ezohwebo ngokuyinhloko angu-3” kanye no-4”, nakuba abanye abahlinzeki benza okuhlukile okungu-6”.
Umbuzo: Ingabe isendlalelo se-LN singaphinda sisetshenziswe ngemva kokuhlukaniswa?
A:I-base crystal ingapholishwa kabusha futhi isetshenziswe kabusha izikhathi ezimbalwa, nakuba ikhwalithi ingase yonakale ngemva kwemijikelezo eminingi.
Q: Ingabe ama-wafer e-LNOI ahambisana nokucutshungulwa kwe-CMOS?
A:Yebo, zenzelwe ukuvumelanisa nezinqubo ezijwayelekile zokwenziwa kwe-semiconductor, ikakhulukazi lapho kusetshenziswa ama-silicon substrates.
