8inch LNOI (LiNbO3 ku-Insulator) Wafer for Optical Modulators Waveguides Integrated Circuits
Umdwebo onemininingwane
Isingeniso
Ama-wafer e-Lithium Niobate ku-Insulator (LNOI) ayinto esezingeni eliphezulu esetshenziswa ezinhlelweni ezihlukahlukene ezithuthukisiwe ze-optical ne-electronic. Lawa mawafa akhiqizwa ngokudlulisela ungqimba oluncane lwe-lithium niobate (LiNbO₃) ku-substrate evikelayo, ngokuvamile i-silicon noma enye impahla efanelekile, kusetshenziswa amasu ayinkimbinkimbi afana nokufakwa kwe-ion kanye ne-wafer bonding. Ubuchwepheshe be-LNOI babelana ngokufana okuningi nobuchwepheshe be-Silicon on Insulator (SOI) kodwa busebenzisa izici ezihlukile zokubona ze-lithium niobate, into eyaziwa ngezici zayo ze-piezoelectric, pyroelectric, kanye ne-nonlinear yokubona.
Ama-wafer e-LNOI athole ukunakwa okubalulekile emikhakheni efana ne-optics ehlanganisiwe, ezokuxhumana, kanye ne-quantum computing ngenxa yokusebenza kwayo okuphezulu kuma-high-frequency kanye nezinhlelo zokusebenza ezinesivinini esikhulu. Amawafa akhiqizwa kusetshenziswa indlela ye-"Smart-cut", eyenza ukulawula okunembayo phezu kogqinsi lwefilimu elincanyana le-lithium niobate, kuqinisekiswe ukuthi amawafa ahlangabezana nemininingwane edingekayo yezinhlelo zokusebenza ezahlukahlukene.
Isimiso
Inqubo yokudala amawafa e-LNOI iqala ngekristalu ye-lithium niobate eyinqwaba. I-crystal ingena ekufakweni kwe-ion, lapho ama-ion e-helium ane-energy ephezulu ethulwa khona ebusweni bekristalu ye-lithium niobate. La ma-ion angena ekristalu ekujuleni okuthile futhi aphazamise ukwakheka kwekristalu, enze indiza entekenteke engasetshenziswa kamuva ukuhlukanisa ikristalu ibe izingqimba ezincane. Amandla athile ama-ion e-helium alawula ukujula kokufakelwa, okuthinta ngokuqondile ukujiya kongqimba lokugcina lwe-lithium niobate.
Ngemva kokufakwa kwe-ion, ikristalu ye-lithium niobate iboshelwa ku-substrate kusetshenziswa indlela ebizwa ngokuthi i-wafer bonding. Inqubo yokuhlanganisa ngokuvamile isebenzisa indlela eqondile yokuhlanganisa, lapho izindawo ezimbili (i-ion-implanted lithium niobate crystal kanye ne-substrate) zicindezelwa ndawonye ngaphansi kwezinga lokushisa eliphezulu nokucindezela ukuze kwakhiwe isibopho esiqinile. Kwezinye izimo, into enamathelayo efana ne-benzocyclobutene (BCB) ingase isetshenziselwe ukwesekwa okwengeziwe.
Ukulandela ukubopha, iwafa ingena inqubo yokuvala ukuze kulungiswe noma yimuphi umonakalo odalwe ukufakwa kwe-ion kanye nokuthuthukisa isibopho phakathi kwezingqimba. Inqubo yokudonsa iphinde isize ungqimba oluncane lwe-lithium niobate ukuthi lusuke kukristalu lwangempela, lushiye ungqimba oluncane, lwekhwalithi ephezulu lwe-lithium niobate olungasetshenziselwa ukwenziwa kwedivayisi.
Imininingwane
Amawafa e-LNOI abonakala ngokucaciswa okumbalwa okubalulekile okuqinisekisa ukufaneleka kwawo ezinhlelweni zokusebenza ezisebenza kahle. Lokhu kubandakanya:
Imininingwane Yempahla.
| .Okubalulekile. | .Imininingwane. |
| Okubalulekile | Okufanayo: LiNbO3 |
| Ikhwalithi Yento | Amabhamuza noma okufakiwe <100μm |
| Ukuqondisa | Y-sika ±0.2° |
| Ukuminyana | 4.65 g/cm³ |
| I-Curie Temperature | 1142 ±1°C |
| Ukungafihli | >95% ku-450-700 nm ububanzi (10 mm ukujiya) |
Imininingwane Yokukhiqiza.
| .Ipharamitha. | .Ukucaciswa. |
| Ububanzi | 150 mm ±0.2 mm |
| Ubukhulu | 350 μm ±10 μm |
| Ukucaba | <1.3 μm |
| Ukuhlukahluka Kokuqina Okuphelele (TTV) | Warp <70 μm @ 150 mm wafer |
| I-Local Thickness Variation (LTV) | <70 μm @ 150 mm isicwecwana |
| Ubulukhuni | I-Rq ≤0.5 nm (inani le-AFM RMS) |
| Ikhwalithi Yobuso | 40-20 |
| Izinhlayiya (Azikhipheki) | 100-200 μm ≤3 izinhlayiya |
| Ama-chips | <300 μm (i-wafer egcwele, ayikho indawo yokukhishwa) |
| Imifantu | Ayikho imifantu (i-wafer egcwele) |
| Ukungcola | Awekho amabala angasuki (wafer egcwele) |
| Ukufana | <30 amasekhondi |
| Indiza Yereferensi Yokuqondiswa (X-axis) | 47 ±2 mm |
Izinhlelo zokusebenza
Ama-wafer e-LNOI asetshenziswa ezinhlobonhlobo zezinhlelo zokusebenza ngenxa yezakhiwo zawo ezihlukile, ikakhulukazi emikhakheni yezithombe, ezokuxhumana, kanye nobuchwepheshe be-quantum. Ezinye zezinhlelo zokusebenza ezibalulekile zifaka:
I-Optics ehlanganisiwe:Amawafa e-LNOI asetshenziswa kabanzi kumasekethe ahlanganisiwe okubona, lapho anika amandla amadivayisi wezithombe asebenza kahle kakhulu njengamamojula, ama-waveguides, nama-resonators. Izakhiwo eziphezulu ezingaqondile ze-lithium niobate ziyenza ibe ukukhetha okuhle kakhulu kwezinhlelo zokusebenza ezidinga ukuphathwa kahle kokukhanya.
Ezokuxhumana:Ama-wafer e-LNOI asetshenziswa kuma-modulators optical, okuyizingxenye ezibalulekile ezinhlelweni zokuxhumana ezinesivinini esikhulu, okuhlanganisa amanethiwekhi e-fiber optic. Amandla okushintsha ukukhanya kumafrikhwensi aphezulu enza amawafa e-LNOI alungele izinhlelo zesimanje zokuxhumana.
I-Quantum Computing:Kubuchwepheshe be-quantum, ama-wafer e-LNOI asetshenziselwa ukwenza izingxenye zamakhompiyutha e-quantum kanye nezinhlelo zokuxhumana ze-quantum. Izici ze-Optical ezingaqondile ze-LNOI zisetshenziselwa ukudala amapheya e-photon abambene, abalulekile ekusabalaliseni kokhiye we-quantum kanye ne-quantum cryptography.
Izinzwa:Amawafa e-LNOI asetshenziswa ezinhlelweni zokuzwa ezahlukahlukene, kufaka phakathi izinzwa ze-optical ne-acoustic. Ikhono lazo lokusebenzelana nakho kokubili ukukhanya nomsindo lizenza zisebenziseke ngezindlela ezihlukahlukene ezinhlotsheni ezihlukene zobuchwepheshe bezinzwa.
FAQ
Q:Buyini ubuchwepheshe be-LNOI?
A:Ubuchwepheshe be-LNOI bubandakanya ukudluliswa kwefilimu elincanyana le-lithium niobate ku-substrate evikelayo, ngokuvamile eyi-silicon. Lobu buchwepheshe busebenzisa izici eziyingqayizivele ze-lithium niobate, njengezici zayo eziphakeme zokungaboni ngaso linye, i-piezoelectricity, kanye ne-pyroelectricity, okuyenza ilungele ukubonwa okuhlanganisiwe nokuxhumana ngocingo.
Q:Uyini umehluko phakathi kwama-wafers e-LNOI nama-SOI?
A:Kokubili amawafa e-LNOI kanye ne-SOI afana ngokuthi aqukethe ungqimba oluncane lwempahla ehlanganiswe ne-substrate. Kodwa-ke, ama-wafer e-LNOI asebenzisa i-lithium niobate njengefilimu encane, kuyilapho ama-SOI wafers asebenzisa i-silicon. Umehluko oyinhloko usezicini zefilimu ezacile, ene-LNOI enikeza izici eziphakeme zokubona kanye ne-piezoelectric.
Q:Yiziphi izinzuzo zokusebenzisa ama-wafer e-LNOI?
A:Izinzuzo eziyinhloko zama-wafer e-LNOI zifaka izici zazo ezinhle kakhulu zokubona, njengama-coefficients aphezulu angaqondile, namandla awo okusebenza. Lezi zici zenza ama-wafer e-LNOI alungele ukusetshenziswa kuzinhlelo zokusebenza ezinesivinini esikhulu, imvamisa ephezulu, kanye ne-quantum.
Q:Ingabe ama-wafers e-LNOI angasetshenziselwa izinhlelo zokusebenza ze-quantum?
A:Yebo, ama-wafer e-LNOI asetshenziswa kakhulu kubuchwepheshe be-quantum ngenxa yekhono lawo lokukhiqiza amapheya e-photon aboshwe kanye nokuhambisana kwawo nama-photonics ahlanganisiwe. Lezi zakhiwo zibalulekile ekusetshenzisweni kwe-quantum computing, ukuxhumana, kanye ne-cryptography.
Q:Buyini ubukhulu obujwayelekile bamafilimu e-LNOI?
A:Amafilimu e-LNOI ngokuvamile asukela kumakhulu ambalwa ama-nanometers kuye kuma-micrometer ambalwa ngogqinsi, kuye ngohlelo oluthile. Ukuqina kulawulwa ngesikhathi sokufakwa kwe-ion.
