I-Wafer engu-8 intshi ye-LNOI (LiNbO3 ku-Insulator) yama-Optical Modulators Ama-Waveguides Amasekethe Ahlanganisiwe
Umdwebo Oningiliziwe
Isingeniso
Ama-wafer e-Lithium Niobate on Insulator (LNOI) ayizinto ezisezingeni eliphezulu ezisetshenziswa ezinhlelweni ezahlukahlukene ze-optical neze-elekthronikhi ezithuthukisiwe. Lawa ma-wafer akhiqizwa ngokudlulisela ungqimba oluncane lwe-lithium niobate (LiNbO₃) ku-substrate yokuvikela, ngokuvamile i-silicon noma enye into efanelekile, kusetshenziswa amasu ayinkimbinkimbi njengokufakelwa kwe-ion kanye nokubopha kwe-wafer. Ubuchwepheshe be-LNOI bufana kakhulu nobuchwepheshe be-wafer be-Silicon on Insulator (SOI) kodwa busebenzisa izakhiwo ezihlukile ze-optical ze-lithium niobate, into eyaziwa ngezici zayo ze-piezoelectric, pyroelectric, kanye ne-nonlinear optical.
Ama-wafer e-LNOI athole ukunakwa okukhulu emikhakheni efana ne-integrated optics, ezokuxhumana, kanye ne-quantum computing ngenxa yokusebenza kwawo okuphezulu kakhulu ekusetshenzisweni kwemvamisa ephezulu kanye nesivinini esikhulu. Ama-wafer akhiqizwa kusetshenziswa inqubo ethi "Smart-cut", evumela ukulawula okunembile phezu kobukhulu befilimu encane ye-lithium niobate, ukuqinisekisa ukuthi ama-wafer ahlangabezana nemininingwane edingekayo yezinhlelo zokusebenza ezahlukahlukene.
Isimiso
Inqubo yokudala ama-wafer e-LNOI iqala ngekristalu elikhulu le-lithium niobate. Ikristalu ifakwa kuma-ion, lapho ama-ion e-helium anamandla aphezulu efakwa khona ebusweni bekristalu le-lithium niobate. Lawa ma-ion angena kukristalu aze afike ekujuleni okuthile futhi aphazamise isakhiwo sekristalu, adale indawo ebuthakathaka engasetshenziswa kamuva ukuhlukanisa ikristalu ibe yizingqimba ezincane. Amandla athile ama-ion e-helium alawula ukujula kokufakwa, okuthinta ngqo ukujiya kwengqimba yokugcina ye-lithium niobate.
Ngemva kokufakelwa kwe-ion, i-lithium niobate crystal ihlanganiswa ne-substrate kusetshenziswa indlela ebizwa ngokuthi i-wafer bonding. Inqubo yokubopha ngokuvamile isebenzisa indlela yokubopha eqondile, lapho izindawo ezimbili (i-lithium niobate crystal efakwe kwi-ion kanye ne-substrate) zicindezelwa ndawonye ngaphansi kokushisa okuphezulu kanye nengcindezi ukudala isibopho esiqinile. Kwezinye izimo, izinto ezinamathelayo njenge-benzocyclobutene (BCB) zingasetshenziswa ukusekela okwengeziwe.
Ngemva kokubopha, i-wafer idlula enkambisweni yokubopha ukuze kulungiswe noma yimuphi umonakalo obangelwe ukufakwa kwe-ion nokuthuthukisa isibopho phakathi kwezingqimba. Inqubo yokubopha iphinde isize ungqimba oluncane lwe-lithium niobate ukuthi lusuke kukristalu wokuqala, lushiye ungqimba oluncane nolusezingeni eliphezulu lwe-lithium niobate olungasetshenziswa ekwenzeni idivayisi.
Imininingwane
Ama-wafer e-LNOI abonakala ngezincazelo eziningana ezibalulekile eziqinisekisa ukuthi afaneleka ezinhlelweni zokusebenza ezisezingeni eliphezulu. Lokhu kufaka phakathi:
Imininingwane Yezinto
| Izinto | Imininingwane |
| Izinto | Okufanayo: LiNbO3 |
| Ikhwalithi Yezinto Ezibalulekile | Amabhamuza noma okufakiwe <100μm |
| Ukuqondiswa | Ukusika okungu-Y ±0.2° |
| Ubuningi | 4.65 g/cm³ |
| Izinga lokushisa le-Curie | 1142 ±1°C |
| Ukucaca | >95% ebangeni elingu-450-700 nm (ukujiya okungu-10 mm) |
Imininingwane Yokukhiqiza
| Ipharamitha | Imininingwane |
| Ububanzi | 150 mm ±0.2 mm |
| Ubukhulu | 350 μm ±10 μm |
| Ukuthamba | <1.3 μm |
| Ukwehluka Kobukhulu Obuphelele (i-TTV) | I-Warp <70 μm @ 150 mm wafer |
| Ukwehluka Kobukhulu Bendawo (LTV) | <70 μm @ 150 mm i-wafer |
| Ubulukhuni | I-Rq ≤0.5 nm (Inani le-AFM RMS) |
| Ikhwalithi Yomphezulu | 40-20 |
| Izinhlayiya (Azisuswa) | Izinhlayiya ezingu-100-200 μm ≤3 |
| Ama-chips | <300 μm (i-wafer egcwele, ayikho indawo yokukhipha) |
| Imifantu | Akukho mifantu (i-wafer egcwele) |
| Ukungcola | Azikho izibazi ezingasuswa (i-wafer egcwele) |
| Ukufana | <30 amasekhondi e-arc |
| Indiza Yenkomba Yokuqondisa (i-X-axis) | 47 ±2 mm |
Izicelo
Ama-wafer e-LNOI asetshenziswa ezinhlobonhlobo zezicelo ngenxa yezakhiwo zawo ezihlukile, ikakhulukazi emikhakheni ye-photonics, ezokuxhumana, kanye nobuchwepheshe be-quantum. Ezinye zezicelo ezibalulekile zifaka:
Ama-Optics Ahlanganisiwe:Ama-wafer e-LNOI asetshenziswa kabanzi kumasekethe e-optical ahlanganisiwe, lapho evumela khona amadivayisi e-photonic asebenza kahle kakhulu njengama-modulators, ama-waveguides, nama-resonators. Izakhiwo eziphezulu ze-optical ezingezona eziqondile ze-lithium niobate zenza kube ukukhetha okuhle kakhulu kwezinhlelo zokusebenza ezidinga ukuphathwa kokukhanya okusebenzayo.
Ezokuxhumana:Ama-wafer e-LNOI asetshenziswa kuma-modulator e-optical, okuyizinto ezibalulekile ezinhlelweni zokuxhumana ezisheshayo, kufaka phakathi amanethiwekhi e-fiber optic. Amandla okulawula ukukhanya kumaza aphezulu enza ama-wafer e-LNOI afanele izinhlelo zokuxhumana zesimanje.
Ikhompyutha ye-Quantum:Kubuchwepheshe be-quantum, ama-wafer e-LNOI asetshenziselwa ukwakha izingxenye zamakhompyutha e-quantum kanye nezinhlelo zokuxhumana ze-quantum. Izakhiwo ze-optical ezingezona eziqondile ze-LNOI zisetshenziswa ukudala ama-photon pairs ahlanganisiwe, abalulekile ekusabalalisweni kokhiye we-quantum kanye ne-cryptography ye-quantum.
Izinzwa:Ama-wafer e-LNOI asetshenziswa ezinhlelweni ezahlukene zokuzwa, okuhlanganisa nezinzwa zokukhanya neze-acoustic. Amandla azo okusebenzisana nokukhanya nomsindo azenza zisebenziseke ngezindlela ezahlukene zobuchwepheshe bokuzwa.
Imibuzo Evame Ukubuzwa
Q:Buyini ubuchwepheshe be-LNOI?
Ubuchwepheshe be-A:LNOI buhilela ukudluliselwa kwefilimu encane ye-lithium niobate ku-substrate yokuvikela, ngokuvamile i-silicon. Lobu buchwepheshe busebenzisa izakhiwo ezihlukile ze-lithium niobate, njengezici zayo eziphezulu ze-optical ezingezona eziqondile, i-piezoelectricity, kanye ne-pyroelectricity, okwenza kube kuhle kakhulu kuma-optics ahlanganisiwe kanye nokuxhumana ngocingo.
Q:Uyini umehluko phakathi kwama-wafer e-LNOI nama-SOI?
A: Womabili ama-wafer e-LNOI ne-SOI afana ngoba aqukethe ungqimba oluncane lwezinto eziboshwe ku-substrate. Kodwa-ke, ama-wafer e-LNOI asebenzisa i-lithium niobate njengezinto zefilimu encane, kuyilapho ama-wafer e-SOI esebenzisa i-silicon. Umehluko oyinhloko usezimpahleni zezinto zefilimu encane, lapho i-LNOI inikeza izakhiwo ezinhle kakhulu ze-optical kanye ne-piezoelectric.
Q:Yiziphi izinzuzo zokusebenzisa ama-wafer e-LNOI?
A: Izinzuzo eziyinhloko zama-wafer e-LNOI zifaka phakathi izakhiwo zawo ezinhle kakhulu zokukhanya, njenge-coefficients ephezulu ye-optical engeyona i-linear, kanye namandla awo okusebenza. Lezi zici zenza ama-wafer e-LNOI afanele ukusetshenziswa ezinhlelweni zesivinini esikhulu, imvamisa ephezulu, kanye ne-quantum.
Q:Ingabe ama-wafer e-LNOI angasetshenziswa ekusetshenzisweni kwe-quantum?
A: Yebo, ama-wafer e-LNOI asetshenziswa kabanzi kubuchwepheshe be-quantum ngenxa yekhono lawo lokukhiqiza ama-photon pairs ahlanganisiwe kanye nokuhambisana kwawo nama-photonics ahlanganisiwe. Lezi zakhiwo zibalulekile ekusetshenzisweni kwe-quantum computing, ukuxhumana, kanye ne-cryptography.
Q:Buyini ubukhulu obujwayelekile bamafilimu e-LNOI?
Amafilimu e-A:LNOI ngokuvamile asukela kuma-nanometer angamakhulu ambalwa kuya kuma-micrometer amaningana ngobukhulu, kuye ngokuthi kusetshenziswe kanjani. Ubukhulu bulawulwa ngesikhathi senqubo yokufaka ama-ion.
