Umshini Wokupholisha we-Ion Beam we-sapphire SiC Si
Umdwebo Oningiliziwe
Ukubuka Konke Komkhiqizo Womshini Wokupholisha We-Ion Beam
Umshini Wokulinganisa Nokupholisha I-Ion Beam usekelwe esimisweni sokuphalaza i-ion. Ngaphakathi kwegumbi eline-vacuum ephezulu, umthombo we-ion ukhiqiza i-plasma, esheshiswa ibe yi-ion beam enamandla aphezulu. Lo msebe uhlasela ubuso bengxenye ye-optical, ususa izinto esikalini se-athomu ukuze kufezwe ukulungiswa nokuqedwa kobuso okunembile kakhulu.
Njengenqubo engathintani, ukupholisha imisebe ye-ion kususa ukucindezeleka komshini futhi kugwema umonakalo ongaphansi komhlaba, okwenza kube kuhle kakhulu ekukhiqizeni ama-optics anembe kakhulu asetshenziswa ku-astronomy, i-aerospace, ama-semiconductor, kanye nezinhlelo zokusebenza zocwaningo ezithuthukisiwe.
Isimiso Sokusebenza Somshini Wokupholisha We-Ion Beam
Isizukulwane se-Ion
Igesi engasebenzi (isb., i-argon) ingeniswa ekamelweni le-vacuum bese ifakwa i-ion ngokusebenzisa ugesi ukuze yakhe i-plasma.
Ukusheshisa Nokwakhiwa Kwemisebe
Ama-ion asheshiswa abe amakhulu amaningana noma izinkulungwane zama-electron volts (eV) futhi akhiwe abe yindawo eqinile, egxilile.
Ukususwa Kwezinto
Umsebe we-ion ukhipha ama-athomu ebusweni ngaphandle kokuqala ukusabela kwamakhemikhali.
Ukutholwa Kwephutha Nokuhlela Indlela
Ukuphambuka kwesibalo somphezulu kulinganiswa nge-interferometry. Imisebenzi yokususa isetshenziswa ukunquma izikhathi zokuhlala nokukhiqiza izindlela zamathuluzi ezilungiselelwe.
Ukulungiswa Kwe-Loop Evaliwe
Imijikelezo ephindaphindayo yokucubungula nokulinganisa iyaqhubeka kuze kube yilapho imigomo yokunemba ye-RMS/PV ifinyelelwa.
Izici Eziyinhloko Zomshini Wokupholisha We-Ion Beam
Ukuhambisana Komphezulu Ojwayelekile– Icubungula izindawo eziyisicaba, eziyindilinga, ezizungezile, nezikhululekile
Izinga Lokususa Elizinzile Kakhulu- Ivumela ukulungiswa kwesibalo se-sub-nanometer
Ukucubungula Okungenamonakalo- Akukho ziphambeko ezingaphansi komhlaba noma izinguquko zesakhiwo
Ukusebenza Okuqhubekayo- Isebenza kahle ngokulinganayo ezintweni ezinobunzima obuhlukahlukene
Ukulungiswa Kwemvamisa Ephansi/Ephakathi- Isusa amaphutha ngaphandle kokukhiqiza izinto ezisetshenziswayo ezivame ukuba phakathi/eziphezulu
Isidingo Sokulungisa Esiphansi- Ukusebenza okuqhubekayo isikhathi eside kanye nesikhathi esincane sokuphumula
Imininingwane Eyinhloko Yobuchwepheshe Yomshini Wokupholisha We-Ion Beam
| Into | Imininingwane |
| Indlela Yokucubungula | I-ion igxuma endaweni ene-vacuum ephezulu |
| Uhlobo Lokucubungula | Ukuhlunga nokupholisha ubuso okungathintani |
| Usayizi Omkhulu Womsebenzi | Φ4000 mm |
| Ama-Axes Okunyakaza | Ama-axis amathathu / ama-axis amahlanu |
| Ukuqina Kokususwa | ≥95% |
| Ukunemba Komphezulu | I-PV < 10 nm; I-RMS ≤ 0.5 nm (i-RMS ejwayelekile < 1 nm; I-PV < 15 nm) |
| Amandla Okulungisa Imvamisa | Isusa amaphutha emvamisa ephansi-ephakathi ngaphandle kokufaka amaphutha emvamisa ephakathi/ephezulu |
| Ukusebenza Okuqhubekayo | Amaviki angu-3-5 ngaphandle kokulungiswa kwe-vacuum |
| Izindleko Zokulungisa | Phansi |
Amakhono Okucubungula Omshini Wokupholisha We-Ion Beam
Izinhlobo Zomphezulu Osekelwayo
Okulula: Isicaba, esiyindilinga, i-prism
Inkimbinkimbi: I-asphere elinganayo/engalingani, i-asphere engaphandle kwe-axis, i-cylindrical
Okukhethekile: Ama-optics amancane kakhulu, ama-slat optics, ama-hemispherical optics, ama-conformal optics, ama-phase plate, izindawo ezikhululekile
Izinto Ezisekelwayo
Ingilazi ebonakalayo: i-Quartz, i-microcrystalline, i-K9, njll.
Izinto ze-infrared: i-silicon, i-germanium, njll.
Izinsimbi: I-aluminium, insimbi engagqwali, i-titanium alloy, njll.
Amakristalu: i-YAG, i-single-crystal silicon carbide, njll.
Izinto eziqinile/ezithambile: i-Silicon carbide, njll.
Ikhwalithi Yomphezulu / Ukunemba
I-PV < 10 nm
I-RMS ≤ 0.5 nm
Ukucubungula Izifundo Zecala Lomshini Wokupholisha We-Ion Beam
Icala 1 - Isibuko Esiyisicaba Esijwayelekile
Umsebenzi: I-quartz flat D630 mm
Umphumela: i-PV 46.4 nm; i-RMS 4.63 nm
Icala 2 - Isibuko Esibonakalisayo se-X-ray
Umsebenzi: 150 × 30 mm i-silicon flat
Umphumela: I-PV 8.3 nm; I-RMS 0.379 nm; Ukuthambeka 0.13 µrad
Icala 3 - Isibuko Esingekho Ku-Axis
Umsebenzi: Isibuko somhlaba esingaphandle kwe-axis esingu-D326 mm
Umphumela: i-PV 35.9 nm; i-RMS 3.9 nm
Imibuzo Evame Ukubuzwa Ngezingilazi Ze-Quartz
Imibuzo Evame Ukubuzwa - Umshini Wokupholisha We-Ion Beam
Q1: Kuyini ukupholisha imisebe ye-ion?
A1:Ukupholisha imisebe ye-ion kuyinqubo engaxhumani esebenzisa umsebe ogxilile wama-ion (njenge-argon ion) ukususa izinto endaweni yokusebenza. Ama-ion ayasheshiswa futhi aqondiswe endaweni, okubangela ukususwa kwezinto ezingeni le-athomu, okuholela ekuqedeni okubushelelezi kakhulu. Le nqubo iqeda ukucindezeleka komshini kanye nomonakalo ongaphansi komhlaba, okwenza kube kuhle kakhulu ezingxenyeni ze-optical ezinembile.
Q2: Yiziphi izinhlobo zezindawo ezingacutshungulwa yi-Ion Beam Polishing Machine?
A2:IUmshini Wokupholisha we-Ion Beamingacubungula izindawo ezahlukahlukene, kufaka phakathi izingxenye ezilula ze-optical ezifanaamafulethi, ama-sphere, nama-prism, kanye nezibalo zejiyometri eziyinkimbinkimbi ezifanaama-asphere, ama-asphere angekho ku-axis, futhiizindawo ezikhululekileIsebenza kahle kakhulu ezintweni ezifana nengilazi yokukhanya, i-infrared optics, izinsimbi, kanye nezinto eziqinile/ezithambile.
Q3: Yiziphi izinto ezingasebenza ngazo i-Ion Beam Polishing Machine?
A3:IUmshini Wokupholisha we-Ion Beamingapholisha izinto eziningi ezahlukene, okuhlanganisa:
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Ingilazi ebonakalayo: I-Quartz, i-microcrystalline, i-K9, njll.
-
Izinto ze-infrared: I-Silicon, i-germanium, njll.
-
Izinsimbi: I-aluminium, insimbi engagqwali, i-titanium alloy, njll.
-
Izinto zekristalu: I-YAG, i-single-crystal silicon carbide, njll.
-
Ezinye izinto eziqinile/ezibuthakathaka: I-silicon carbide, njll.
Mayelana NATHI
I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ekukhiqizweni, nasekuthengisweni kwengilazi ekhethekile ye-optical kanye nezinto ezintsha zekristalu. Imikhiqizo yethu ihlinzeka nge-optical electronics, i-consumer electronics, kanye nezempi. Sinikeza izingxenye ze-optical ze-Sapphire, izembozo zelensi yeselula, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kanye nama-semiconductor crystal wafers. Ngobuchwepheshe obunekhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungewona ojwayelekile, sihlose ukuba yibhizinisi elihamba phambili lezinto ze-optoelectronic tech.















