Umshini Wokupholisha we-Ion Beam wesafire SiC Si

Incazelo emfushane:

I-Ion Beam Figuring and polishing Machine isekelwe kumgomo wokuthii-ion sputtering. Ngaphakathi kwegumbi elinevacuum ephezulu, umthombo we-ion ukhiqiza i-plasma, esheshiswayo ibe yi-ion ye-ion enamandla kakhulu. Le nsimbi igqamisa ingaphezulu lengxenye ye-optical, isusa okokusebenza esikalini se-athomu ukuze kuzuzwe ukulungisa nokuqeda okunembe kakhulu.

Thumela i-imeyili kithi

Izici

Umdwebo onemininingwane

Ukubuka Komkhiqizo Womshini Wokupholisha we-Ion Beam

Umshini Wokubalwa Nokupholisha u-Ion Beam usekelwe kumgomo wokufafaza kwe-ion. Ngaphakathi kwegumbi elinevacuum ephezulu, umthombo we-ion ukhiqiza i-plasma, esheshiswayo ibe yi-ion ye-ion enamandla kakhulu. Le nsimbi igqamisa ingaphezulu lengxenye ye-optical, isusa okokusebenza esikalini se-athomu ukuze kuzuzwe ukulungisa nokuqeda okunembe kakhulu.

Njengenqubo engathinteki, ukupholishwa kwe-ion beam kuqeda ukucindezeleka komshini futhi kugwema umonakalo ongaphansi komhlaba, okuyenza ifaneleke ukukhiqiza ama-optics anembe kakhulu asetshenziswa ku-astronomy, i-aerospace, i-semiconductors, nezinhlelo zokusebenza zocwaningo ezithuthukisiwe.

Isimiso Esisebenzayo Somshini Wokupholisha we-Ion Beam

Isizukulwane se-Ion
Igesi engenzi lutho (isb., i-argon) yethulwa ku-vacuum chamber futhi yenziwe i-ioned ngokukhipha ugesi ukuze yakhe i-plasma.

Ukusheshisa & Ukwakheka Beam
Ama-ion asheshiswa abe ama-electron volts (eV) angamakhulu ambalwa noma ayizinkulungwane futhi alolongelwe endaweni ezinzile, egxilile.

Ukususwa Kwezinto Ezibalulekile
I-ion beam ikhipha ama-athomu ngokoqobo ngaphandle kokuqalisa ukusabela kwamakhemikhali.

Ukutholwa Kwephutha Nokuhlelwa Kwendlela
Ukuchezuka kwezibalo ezingaphezulu kukalwa nge-interferometry. Imisebenzi yokususa isetshenziselwa ukunquma izikhathi zokuhlala futhi kukhiqize izindlela zamathuluzi ezithuthukisiwe.

Ukulungiswa Kwe-Loop Evaliwe
Imijikelezo ephindaphindayo yokucubungula nokulinganisa iyaqhubeka kuze kube yilapho okuhlosiwe okunembayo kwe-RMS/PV kufinyelelwa.

Izici Ezibalulekile Zomshini Wokupholisha we-Ion Beam

I-Universal Surface Compatibility- Icubungula indawo eyisicaba, eyindilinga, eyi-aspherical, nekhululekile

Isilinganiso Sokususwa Esizinzile- Inika amandla ukulungiswa kwesibalo se-nanometer engaphansi

Ukucubungula Okungenakulimala- Awekho amaphutha angaphansi komhlaba noma izinguquko zesakhiwo

Ukusebenza Okungaguquki- Isebenza kahle ngokulinganayo ezintweni ezinobunzima obuhlukahlukene

Ukulungiswa Kwemvamisa Ephansi/Emaphakathi- Isusa amaphutha ngaphandle kokukhiqiza ama-artifacts aphakathi/ama-high-frequency

Imfuneko Yesondlo Esiphansi- Ukusebenza okude okuqhubekayo ngesikhathi sokuphumula esincane

Ukucaciswa Okuyinhloko Kwezobuchwepheshe Zomshini Wokupholisha we-Ion Beam

Into	Ukucaciswa
Indlela Yokucubungula	I-ion sputtering endaweni enevacuum ephezulu
Uhlobo Lokucubungula	Ukuthola nokupholisha indawo okungeyona yokuxhumana
Ubukhulu be-Workpiece Usayizi	Φ4000 mm
Izimbazo ezihambayo	3-eksisi / 5-eksisi
Ukususwa Ukuzinza	≥95%
Ukunemba Kobuso	I-PV <10 nm; I-RMS ≤ 0.5 nm (i-RMS evamile < 1 nm; i-PV < 15 nm)
Ikhono Lokulungisa Imvamisa	Isusa amaphutha efrikhwensi ephansi-maphakathi ngaphandle kokwethula amaphutha efrikhwensi yamaphakathi/phezulu
Ukusebenza Okuqhubekayo	Amaviki angu-3-5 ngaphandle kokugcinwa kwe-vacuum
Izindleko Zokulungisa	Phansi

Amandla Okucubungula Womshini Wokupholisha we-Ion Beam

Izinhlobo Zobuso Ezisekelwe

Okulula: I-Flat, i-spherical, i-prism

Inkimbinkimbi: I-Symmetric/asymmetric asphere, off-axis asphere, cylindrical

Okukhethekile: I-Ultra-thin optics, i-slat optics, i-hemispherical optics, i-conformal optics, amapuleti esigaba, izindawo ezikhululekile

Izinto Ezisekelwe

Ingilazi ye-Optical: I-quartz, i-microcrystalline, i-K9, njll.

Izinto ze-infrared: I-silicon, i-germanium, njll.

Izinsimbi: I-aluminium, insimbi engagqwali, i-titanium alloy, njll.

Amakristalu: YAG, i-single-crystal silicon carbide, njll.

Izinto eziqinile/ezibhibhile: I-silicon carbide, njll.

Ikhwalithi Yobuso / Ukunemba

I-PV <10 nm

I-RMS ≤ 0.5 nm

Icubungula Izifundo Zomshini Wokupholisha we-Ion Beam

Ikesi 1 - Isibuko Esijwayelekile Esiyisicaba

Umsebenzi: D630 mm quartz flat

Umphumela: PV 46.4 nm; I-RMS 4.63 nm

Ikesi 2 - Isibuko Esibukisayo se-X-ray

Umsebenzi: 150 × 30 mm we-silicon flat

Umphumela: PV 8.3 nm; I-RMS 0.379 nm; I-Slope 0.13 µrad

Icala lesi-3 - Isibuko esingekho ku-Axis

Umsebenzi: D326 mm off-axis ground mirror

Umphumela: PV 35.9 nm; I-RMS 3.9 nm

I-FAQ Yezingilazi Zequartz

I-FAQ - Umshini Wokupholisha we-Ion Beam

Q1: Kuyini ukupholisha kwe-ion beam?
A1:Ukupholishwa kwe-ion beam kuyinqubo engathinteki esebenzisa i-ion egxilile (njenge-argon ion) ukuze kukhishwe izinto ezibonakalayo endaweni yokusebenza. Ama-ion asheshiswa futhi aqondiswe phezulu, okubangela ukususwa kwezinto ezisezingeni le-athomu, okuholela ekuqedweni okubushelelezi. Le nqubo iqeda ukucindezeleka komshini kanye nomonakalo ongaphansi komhlaba, iyenze ibe ilungele izingxenye ze-optical ezinembayo.

Q2: Yiziphi izinhlobo zezindawo ezingenziwa inqubo ye-Ion Beam Polishing Machine?
A2:IUmshini Wokupholisha we-Ion Beamingacubungula izinhlobonhlobo zezindawo ezingaphezulu, kufaka phakathi izingxenye ezilula ze-optical ezifanaamaflethi, ama-sphere, nama-prism, kanye namajiyometri ayinkimbinkimbi afanaama-aspheres, ama-off-axis aspheres, futhiizindawo ezikhululekile. Isebenza kakhulu ezintweni ezifana nengilazi ebonakalayo, i-infrared optics, izinsimbi, nezinto eziqinile/eziphukayo.

Q3: Yiziphi izinto umshini wokupholisha we-Ion Beam ongasebenza ngazo?
A3:IUmshini Wokupholisha we-Ion Beamingapholisha inhlobonhlobo yezinto zokwakha, okuhlanganisa:

Ingilazi ye-Optical: I-Quartz, i-microcrystalline, i-K9, njll.
Izinto ze-infrared: I-silicon, i-germanium, njll.
Izinsimbi: Aluminium, insimbi engagqwali, titanium ingxubevange, njll.
Izinto zekristalu: YAG, single-crystal silicon carbide, njll.
Okunye okuqinile/ama-brittle materials: I-silicon carbide, njll.

Mayelana NATHI

I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ukukhiqiza, nokudayiswa kwengilazi ekhethekile yokubona nezinto ezintsha zekristalu. Imikhiqizo yethu isebenza ngogesi obonakalayo, ugesi wabathengi, kanye nezempi. Sinikezela ngezinto ezibonakalayo ze-Sapphire, izembozo zamalensi omakhalekhukhwini, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, namawafa ekristalu e-semiconductor. Ngobungcweti abanamakhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungajwayelekile, sihlose ukuba yibhizinisi elihamba phambili le-optoelectronic materials high-tech.