8inch Silicon wafer P/N-uhlobo (100) 1-100Ω i-dummy reclaim substrate
Ukwethulwa kwebhokisi le-wafer
I-silicon wafer engama-intshi angu-8 iyinto evame ukusetshenziswa ye-silicon substrate futhi isetshenziswa kakhulu ekwenzeni amasekethe ahlanganisiwe. Amawafa anjalo e-silicon avame ukusetshenziselwa ukwenza izinhlobo ezahlukahlukene zamasekethe ahlanganisiwe, okuhlanganisa ama-microprocessors, ama-memory chips, izinzwa nezinye izinto zikagesi. Ama-silicon wafers angama-intshi angu-8 avame ukusetshenziselwa ukwenza ama-chips amasayizi amakhulu ngokuqhathaniswa, anezinzuzo ezihlanganisa indawo enkulu engaphezulu kanye nekhono lokwenza ama-chips engeziwe ku-silicon wafer eyodwa, okuholela ekwengezeni ukusebenza kahle kokukhiqiza. I-silicon wafer engama-intshi angu-8 nayo inezakhiwo ezinhle zomshini namakhemikhali, ezifanele ukukhiqizwa kwesekethe ehlanganisiwe emikhulu.
Izici zomkhiqizo
8" uhlobo lwe-P/N, isicwecwe esicwebezelisiwe se-silicon (25 ama-pcs)
Isilinganiso: 200
Ukumelana: 0.1 - 40 ohm•cm (Kungase kwehluke kunqwaba)
Ubukhulu: 725+/-20um
Ibanga lePrime/Monitor/Test
IZIMPAHLA EZITHILE
Ipharamitha | Isici |
Uhlobo/I-Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic |
Iziqondiso | <100>, <111> susa umumo ngokwezicaciso zekhasimende ngalinye |
Okuqukethwe Oksijini | 1019ppmA Ukubekezelelwa ngokwezifiso ngokucaciswa kwekhasimende ngalinye |
Okuqukethwe kwekhabhoni | <0.6 ppmA |
IZIMPAHLA ZEMITHETHO
Ipharamitha | Prime | Gada/Isivivinyo A | Hlola |
Ububanzi | 200±0.2mm | 200 ± 0.2mm | 200 ± 0.5 mm |
Ubukhulu | 725±20µm (okujwayelekile) | 725±25µm(okujwayelekile) 450±25µm 625±25µm 1000±25µm 1300±25µm 1500±25µm | 725±50µm (okujwayelekile) |
I-TTV | <5µm | <10µm | <15µm |
Khothama | <30µm | <30µm | <50µm |
Goqa | <30µm | <30µm | <50µm |
I-Edge Rounding | I-SEMI-STD | ||
Ukumaka | I-SEMI-Flat Eyisisekelo kuphela, I-SEMI-STD Flats Jeida Flat, Notch |
Ipharamitha | Prime | Gada/Isivivinyo A | Hlola |
Imibandela Yohlangothi Olungaphambili | |||
Isimo sobuso | I-Chemical Mechanical Ipholishiwe | I-Chemical Mechanical Ipholishiwe | I-Chemical Mechanical Ipholishiwe |
Ukuqina Kobuso | < 2 A° | < 2 A° | < 2 A° |
Ukungcola Izinhlayiya@ >0.3 µm | = 20 | = 20 | = 30 |
Haze, Imigodi Ikhasi lewolintshi | Lutho | Lutho | Lutho |
Saw, Marks Striations | Lutho | Lutho | Lutho |
Imibandela Yokubheka Emuva | |||
Imifantu, izinyawo zegwababa, amasaha, amabala | Lutho | Lutho | Lutho |
Isimo sobuso | I-Caustic ifakiwe |