I-Wafer ye-Sapphire engu-156mm engu-159mm engu-6 intshi yenkampani ye-C-Plane DSP TTV
Imininingwane
| Into | Ama-wafer e-Sapphire angu-6-intshi (0001) | |
| Izinto Zekristalu | 99,999%, Ukuhlanzeka Okuphezulu, i-Monocrystalline Al2O3 | |
| Ibanga | I-Prime, i-Epi-Ready | |
| Ukuqondiswa Komphezulu | Indiza ye-C(0001) | |
| Indiza engu-C engaphandle kwe-engeli ebheke ku-M-axis 0.2 +/- 0.1° | ||
| Ububanzi | 100.0 mm +/- 0.1 mm | |
| Ubukhulu | 650 μm +/- 25 μm | |
| Ukuqondiswa Okuyisisekelo Okuyisicaba | Indiza ye-C(00-01) +/- 0.2° | |
| I-Side Single Polished | Ubuso Bangaphambili | I-Epi-polished, i-Ra < 0.2 nm (nge-AFM) |
| (SSP) | Indawo Yangemuva | Inhlabathi enhle, i-Ra = 0.8 μm kuya ku-1.2 μm |
| Ipholishwe Kabili Ehlangothini | Ubuso Bangaphambili | I-Epi-polished, i-Ra < 0.2 nm (nge-AFM) |
| (i-DSP) | Indawo Yangemuva | I-Epi-polished, i-Ra < 0.2 nm (nge-AFM) |
| I-TTV | < 20 μm | |
| UKUGOBHOZA | < 20 μm | |
| I-WARP | < 20 μm | |
| Ukuhlanza / Ukupakisha | Ukuhlanza nokupakisha i-vacuum cleanroom yekilasi le-100, | |
| Izingcezu ezingu-25 ephaketheni lekhasethi elilodwa noma ephaketheni elilodwa. | ||
Indlela yeKylopoulos (indlela ye-KY) okwamanje isetshenziswa izinkampani eziningi eShayina ukukhiqiza amakristalu e-sapphire ukuze asetshenziswe embonini ye-elekthronikhi kanye ne-optics.
Kule nqubo, i-aluminium oxide emsulwa kakhulu iyancibilika ebhodweni lokushisa elingaphezu kwama-degree Celsius angu-2100. Ngokuvamile ibhodwe elincibilikayo lenziwa nge-tungsten noma i-molybdenum. Ikristalu yembewu eqondiswe kahle ifakwa ku-alumina encibilikisiwe. Ikristalu yembewu idonswa kancane kancane phezulu futhi ingajikeleziswa ngasikhathi sinye. Ngokulawula ngokunembile i-gradient yokushisa, izinga lokudonsa kanye nezinga lokupholisa, i-ingot enkulu, enekristalu elilodwa, ecishe ibe yi-cylindrical ingakhiqizwa kusukela ekuncibilikeni.
Ngemva kokuba ama-single crystal sapphire ingots esekhulile, abhobozwa ezindongeni eziyisilinda, ezibe sezisikwa zibe ugqinsi lwefasitela olufunwayo bese ekugcineni zipholishwa zize zifike ekugcineni kobuso obufunwayo.
Umdwebo Oningiliziwe





