Inqubo ye-TVG ku-quartz sapphire BF33 wafer Iwafa yengilazi ipunching
Izinzuzo ze-TGV(Nge-Glass Via) zibonakala kakhulu ku:
I-1) Izici ezinhle kakhulu zikagesi wemvamisa ephezulu. I-Glass impahla iyi-insulator material, i-dielectric constant imayelana ne-1/3 yezinto ze-silicon, isici sokulahlekelwa singama-oda angu-2-3 obukhulu obuphansi kunempahla ye-silicon, okwenza ukulahlekelwa kwe-substrate kanye nemiphumela ye-parasitic yehliswe kakhulu ukuqinisekisa ukuthi ubuqotho besignali edlulisiwe;
(2) Usayizi omkhulu kanye ne-ultra-thin glass substrate kulula ukuyithola. Singanikela ngeSapphire, Quartz, Corning, kanye ne-SCHOTT kanye nabanye abakhiqizi bezingilazi bangahlinzeka ngosayizi omkhulu kakhulu (>2m × 2m) kanye nengilazi yephaneli emincane kakhulu (<50µm) nezinto zengilazi eziguquguquka kakhulu.
3) Izindleko eziphansi. Zuza ekufinyeleleni okulula kwengilazi yephaneli yobukhulu obukhulu obuncane, futhi ayidingi ukubekwa kwezingqimba zokuvikela, izindleko zokukhiqiza ipuleti ye-adaptha yengilazi cishe yi-1/8 kuphela yepuleti ye-adaptha esekwe ku-silicon;
4) Inqubo elula. Asikho isidingo sokufaka isendlalelo se-insulating endaweni engaphansi kanye nodonga lwangaphakathi lwe-TGV(Nge-Glass Via), futhi akukho ukucwenga okudingekayo epuletini le-adaptha elizacile kakhulu;
(5) Ukuzinza okuqinile kwemishini. Noma ubukhulu bepuleti le-adaptha bungaphansi kuka-100µm, ikhasi le-warpage liselincane;
6) Uhlu olubanzi lwezinhlelo zokusebenza. Ngaphezu kwamathemba amahle okufaka isicelo emkhakheni we-high-frequency, njengento ebonakalayo, ingasetshenziswa futhi emkhakheni wokuhlanganiswa kwesistimu ye-optoelectronic, i-airtightness kanye nezinzuzo zokumelana nokugqwala kwenza i-glass substrate emkhakheni we-MEMS encapsulation inamandla amakhulu.
Njengamanje, inkampani yethu inikeza ingilazi ye-TGV(Nge-Glass Via) ngobuchwepheshe bembobo, ingahlela ukucutshungulwa kwezinto ezingenayo futhi inikeze umkhiqizo ngokuqondile. Singanikela ngeSapphire, Quartz, Corning, kanye ne-SCHOTT, BF33 nezinye izibuko. Uma unesidingo, ungaxhumana nathi ngqo nganoma yisiphi isikhathi! Siyakwamukela uphenyo!