I-Sic Ceramic Chuck Tray Curant Cups PRICHINISITING IMIBILIDIWE
Izici ezibonakalayo:
I-1.High Hardness: Ubulukhuni be-mohts we-silicon Carbide ngu-9.2-9.5, Okwesibili kuphela edayimane, ngokumelana nokuqina okuqinile.
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I-3. I-coefficion ephansi ephansi
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I-5
Izici:
1. Imboni ye-semiconductor, ama-wafers athambile kakhulu adinga ukufakwa kwi-vacuum suction Cup, i-vacuum suction isetshenziselwa ukulungisa ama-wafing, kanye nenqubo yokuqalisa, ukuncipha, ukugoqa, ukuhlanza nokusika kwenziwa kuma-wafers.
I-2.Silicon Carbide Sucker inokuphamba okuhle okushisayo, kunganciphisa ngempumelelo isikhathi se-waxing kanye ne-waxing, kuthuthukisa ukusebenza kahle kokukhiqiza.
I-3.Silicon Carbide Vacuum Sucker nayo ine-acid kanye ne-alkali yokuphikiswa kwe-ALKALI.
I-4.com nomane efakwe ngeplanethi ye-Corundum Carrier, ifinyeze ukulayisha nokulayisha ukufudumeza nesikhathi sokupholisa, thuthukisa ukusebenza kahle komsebenzi; Ngasikhathi sinye, kunganciphisa ukugqokwa phakathi kwamapuleti aphezulu nangaphansi, gcina ukunemba okuhle kwendiza, futhi kunwebe impilo yensiza cishe ngama-40%.
5.Izinto ezibonakalayo zincane, isisindo esikhanyayo. Kulula ukuthi opharetha ukuthwala ama-pallets, behlisa ubungozi bomonakalo wokushayisana obangelwa ubunzima bezokuthutha cishe ngama-20%.
6.Size: Ububanzi obuphezulu ngo-640mm; Flatness: 3um noma ngaphansi
Inkambu Yesicelo:
1. Ukukhiqiza i-semiconductor
● Ukucutshungulwa kwe-wafer:
Ukulungiswa okufiphele ku-photolithography, etching, ukufakwa kwamafilimu okuncanyana nezinye izinqubo, ukuqinisekisa ukunemba okuphezulu nokusebenza kwenqubo. Ukumelana kwayo okuphezulu nokugqwala kulungele izindawo zokukhiqiza ze-semiconductor.
● Ukukhula kwe-EpiTaxial:
Ekukhuleni kwe-sic noma kwe-epitaxial, njengesiphathi sokushisa nokulungisa ama-wafers, ukuqinisekisa ukufana kokushisa kanye nekhwalithi yekristalu emazingeni okushisa aphezulu, ngcono ukusebenza kwensiza.
2. I-PhotoElectric Equipment
● Ukukhiqiza i-LED:
Isetshenziselwa ukulungisa iSapphire noma i-Sic substerstrate, futhi njengesithwali sokushisa kwinqubo ye-mocvd, ukuqinisekisa ukufana kokukhula kwe-epitaxial, ngcono ukusebenza kahle okukhanyayo kanye nekhwalithi.
● I-Laser Diode:
Njengokulungiswa okunengqondo okuphezulu, ukulungiswa nokushisa i-substrate ukuqinisekisa ukuqina kokushisa kwenqubo, thuthukisa amandla okukhipha nokwethenjwa kwe-laser diode.
3. Ukucaciswa kwemishini
● Ukucutshungulwa kwezakhi ze-Optical:
Isetshenziselwa ukulungisa izingxenye zokunemba ezifana namalensi abonakalayo nezihlungi zokuqinisekisa ukunemba okuphezulu nokungcoliswa okuphansi ngesikhathi sokulungiswa, futhi kufanelekile ngemishini ephezulu kakhulu.
● Ukucutshungulwa kwe-ceramic:
Njengokulungiswa koqina okuphezulu, kufanelekile ukulungiswa kwemishini kwezinto zokwakha ubuciko ukuqinisekisa ukunemba kwemishini nokungaguquguquki ngaphansi kwendawo ephezulu yokushisa kanye nemvelo evuthayo.
4. Ukuhlolwa kwesayensi
● Ukuhlolwa okushisa okuphezulu:
Njengedivaysi yokulungiswa kwesampula ezindaweni eziphakeme zokushisa, isekela izivivinyo zokushisa ezedlulele ngaphezulu kwe-1600 ° C ukuqinisekisa ukufana kokushisa kanye nokuqina kwesampula.
● Ukuhlolwa kwe-vacuum:
Njengomphathi wesampula wesampula kanye ne-carting carrier endaweni ye-vacuum, ukuqinisekisa ukunemba nokuphindaphindwa kokuhlolwa, kufanelekile ukunamathela kwe-vacuum kanye nokwelashwa kokushisa.
Ukucaciswa kobuchwepheshe:
(Impahla Yezinto Ezibonakalayo) | (Iyunithi) | (SSIC) | |
(Okuqukethwe yi-SIC) |
| (Wt)% | > 99 |
(Isilinganiso sobukhulu obusanhlamvu) |
| microsanabimbimbilh | 4-10 |
(Inceku) |
| kg / dm3 | > 3.14 |
(I-porolity ebonakalayo) |
| VO1% | <0.5 |
(Ubulukhuni bama-Vicklers) | Hv 0.5 | Uhlobo | 28 |
* (Amandla aguqukayo) | 20ºC | I-MPA | I-450 |
(Amandla acindezelayo) | 20ºC | I-MPA | 3900 |
(Elastic modulus) | 20ºC | Uhlobo | 420 |
(Ukuqhekeka kobunzima) |
| MPA / m '% | I-3.5 |
(Ukuvuselelwa okushisayo) | 20 ° ºC | W / (m * k) | I-160 |
(Ukumelana) | 20 ° ºC | Ohm.cm | 106-108 |
| A (Rt ** ... 80ºC) | K-1 * 10-6 | 4.3 |
|
| OºC | I-1700 |
Ngeminyaka yokuqongelela ubuchwepheshe kanye nesipiliyoni semboni, i-XKH iyakwazi ukuvumelanisa amapharamitha asemqoka afana nosayizi, indlela yokushisa kanye nokuklanywa kwe-adsuck ye-chuck ngokwezidingo ezithile zekhasimende, ukuqinisekisa ukuthi umkhiqizo uvumelaniswa kahle nenqubo yekhasimende. I-Sic Silicon Carbide Courbic Cueckic Crucks isibe yizingxenye ezisemqoka ekucutshungweni okukhona, ukukhula kwe-EpiTaxial nezinye izinqubo ezibalulekile ngenxa yokuvuselelwa okungcono kakhulu okushisayo, ukuqina okushisa okuphezulu nokuqina kwamazinga okushisa kanye nokuqina kwamakhemikhali. Ikakhulu ekwenziweni kwezinto zokwenziwa zesithupha sezizukulwane zesithathu njenge-SIC ne-GAN, isidingo se-Silicon Carbide Ceramic Crucks siyaqhubeka nokukhula. Ngokuzayo, ukuthuthukiswa okusheshayo kwezimoto ezi-5G, zikagesi, ubuhlakani bokufakelwa nobunye ubuchwepheshe, amathemba wesicelo se-silicon Carbide Ceramic Crucks embonini ye-semiconductor azobanzi.




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