Imishini Yokuphakamisa I-Laser Ye-Semiconductor
Umdwebo Oningiliziwe
Ukubuka Konke Komkhiqizo Wemishini Yokuphakamisa I-Laser
I-Semiconductor Laser Lift-Off Equipment imele ikhambi lesizukulwane esilandelayo lokunciphisa i-ingot okuthuthukisiwe ekucutshungulweni kwezinto ze-semiconductor. Ngokungafani nezindlela zendabuko zokuwafer ezincike ekugayweni kwemishini, ukusaha ucingo lwedayimane, noma ukuhleleka kwamakhemikhali, le pulatifomu esekelwe ku-laser inikeza enye indlela engenakuthintana, engonakalisi yokususa izendlalelo ezincane kakhulu kuma-ingots e-semiconductor amaningi.
Ilungiselelwe izinto ezibuthakathaka nezinenani eliphezulu njenge-gallium nitride (GaN), i-silicon carbide (SiC), i-sapphire, ne-gallium arsenide (GaAs), i-Semiconductor Laser Lift-Off Equipment ivumela ukunqunywa okunembile kwamafilimu esikali se-wafer ngqo kusuka ku-ingot yekristalu. Lobu buchwepheshe obuphambili bunciphisa kakhulu imfucuza yezinto ezibonakalayo, buthuthukisa ukuphuma, futhi buthuthukisa ubuqotho be-substrate - konke okubalulekile kumadivayisi esizukulwane esilandelayo kuma-electronics anamandla, izinhlelo ze-RF, ama-photonics, kanye nama-micro-display.
Ngokugcizelela ukulawula okuzenzakalelayo, ukwakheka kwe-beam, kanye nokuhlaziywa kokusebenzisana kwezinto ze-laser, i-Semiconductor Laser Lift-Off Equipment yakhelwe ukuhlanganiswa kalula emisebenzini yokukhiqiza ye-semiconductor ngenkathi isekela ukuguquguquka kwe-R&D kanye nokukhula kokukhiqiza ngobuningi.
Ubuchwepheshe kanye nesimiso sokusebenza semishini yokuphakamisa i-laser
Inqubo eyenziwa yi-Semiconductor Laser Lift-Off Equipment iqala ngokukhanyisa i-ingot yomnikelo kusukela kolunye uhlangothi kusetshenziswa i-ultraviolet laser beam enamandla aphezulu. Lo msebe ugxile kakhulu ekujuleni kwangaphakathi okuthile, ngokuvamile ku-interface eklanywe ngobunjiniyela, lapho ukumuncwa kwamandla kwandiswa khona ngenxa yokungafani kokukhanya, ukushisa, noma amakhemikhali.
Kulesi sigaba sokumunca amandla, ukushisa kwendawo kuholela ekuqhumeni okusheshayo kwe-micro-explosion, ukwanda kwegesi, noma ukubola kwesigaba esiphakathi (isb., ifilimu yokucindezela noma i-sacrificial oxide). Lokhu kuphazamiseka okulawulwa kahle kubangela ukuthi ungqimba oluphezulu lwekristalu - olunobukhulu obungama-micrometer angamashumi - lusuke endaweni eyisisekelo kahle.
I-Semiconductor Laser Lift-Off Equipment isebenzisa amakhanda okuskena avumelaniswe nokunyakaza, ukulawula i-z-axis okuhleliwe, kanye ne-reflectometry yesikhathi sangempela ukuqinisekisa ukuthi ukushaya kwenhliziyo ngakunye kuletha amandla ngqo endaweni eqondiwe. Imishini ingalungiswa futhi ngamakhono e-burst-mode noma ama-multi-pulse ukuze kuthuthukiswe ukushelela kwe-detachment nokunciphisa ukucindezeleka okusele. Okubalulekile, ngoba umsebe we-laser awukaze uthinte izinto ngokoqobo, ingozi yokuqhekeka, ukugoba, noma ukuqhekeka kwendawo incishiswa kakhulu.
Lokhu kwenza indlela yokunciphisa i-laser lift-off ibe yinto eshintsha kakhulu, ikakhulukazi ezisetshenziswayo lapho kudingeka khona ama-wafer acwebezelayo kakhulu, acwebezelayo kakhulu ane-sub-micron TTV (Total Thickness Variation).
Ipharamitha Yemishini Yokuphakamisa I-Laser Ye-Semiconductor
| Ubude begagasi | I-IR/SHG/THG/FHG |
|---|---|
| Ububanzi be-Pulse | I-Nanosecond, i-Picosecond, i-Femtosecond |
| Uhlelo Lokubona | Uhlelo oluqondile lwe-optical noma uhlelo lwe-Galvano-optical |
| Isigaba se-XY | 500 mm × 500 mm |
| Ibanga Lokucubungula | 160 mm |
| Isivinini Sokunyakaza | Ubuningi obungu-1,000 mm/sec |
| Ukuphindaphinda | ±1 μm noma ngaphansi |
| Ukunemba Kwesikhundla Esiphelele: | ±5 μm noma ngaphansi |
| Usayizi we-Wafer | Amasentimitha angu-2–6 noma enziwe ngezifiso |
| Ukulawula | I-Windows 10, 11 kanye ne-PLC |
| I-Voltage Yokunikezwa Kwamandla | I-AC 200 V ±20 V, Isigaba esisodwa, 50/60 kHz |
| Ubukhulu Bangaphandle | 2400 mm (W) × 1700 mm (D) × 2000 mm (H) |
| Isisindo | 1,000 kg |
Ukusetshenziswa Kwezimboni Kwemishini Yokuphakamisa I-Laser
Imishini Yokuphakamisa I-Laser Semiconductor ishintsha ngokushesha indlela izinto ezilungiselelwa ngayo ezizindeni eziningi ze-semiconductor:
- Amadivayisi Amandla e-GaN aqondile emishini yokuphakamisa i-Laser
Ukususwa kwamafilimu e-GaN-on-GaN amancane kakhulu avela kuma-ingot amakhulu kwenza ukwakheka kokuqhuba okuqondile kanye nokusetshenziswa kabusha kwezingxenye ezibizayo.
- Ukunciphisa i-SiC Wafer kwamadivayisi e-Schottky kanye ne-MOSFET
Kunciphisa ukujiya kwesendlalelo sedivayisi ngenkathi kulondolozwa ukuhleleka kwe-substrate — kulungele ama-electronics anamandla ashintsha ngokushesha.
- Izinto ze-LED ezisekelwe ku-Sapphire kanye nezibonisi zemishini yokuphakamisa i-laser
Ivumela ukuhlukaniswa okuphumelelayo kwezingqimba zamadivayisi kusuka kuma-sapphire boules ukusekela ukukhiqizwa kwe-micro-LED encane, elungiselelwe ukushisa.
- Ubunjiniyela Bezinto Ze-III-V Bemishini Yokuphakamisa I-Laser
Isiza ukuhlukanisa izendlalelo ze-GaAs, InP, kanye ne-AlGaN ukuze kuhlanganiswe i-optoelectronic ethuthukisiwe.
- Ukwenziwa kwe-Thin-Wafer IC kanye ne-Sensor
Ikhiqiza izendlalelo ezincane ezisebenzayo zezinzwa zokucindezela, ama-accelerometer, noma ama-photodiode, lapho ubukhulu buyisithiyo sokusebenza.
- I-Electronics Eguquguqukayo Nebonakalayo
Ilungiselela ama-substrate amancane kakhulu afanelekela izibonisi eziguquguqukayo, amasekethe agqokwayo, namafasitela ahlakaniphile abonakalayo.
Kuzo zonke lezi zindawo, i-Semiconductor Laser Lift-Off Equipment idlala indima ebalulekile ekwenzeni kube lula ukwenza izinto zibe zincane, ukusetshenziswa kabusha kwezinto, kanye nokwenza lula inqubo.
Imibuzo Evame Ukubuzwa (FAQ) Yemishini Yokuphakamisa I-Laser
Q1: Bungakanani ubukhulu obuncane engingakwazi ukubufinyelela ngisebenzisa i-Semiconductor Laser Lift-Off Equipment?
A1:Ngokuvamile iphakathi kwama-micron ayi-10–30 kuye ngokuthi isetshenziswa kanjani. Inqubo iyakwazi ukukhiqiza imiphumela emincane ngokusetha okushintshiwe.
Umbuzo 2: Ingabe lokhu kungasetshenziswa ukusika ama-wafer amaningi kusuka ku-ingot efanayo?
A2:Yebo. Amakhasimende amaningi asebenzisa indlela yokuphakamisa nge-laser ukuze akhiphe ngokulandelelana izendlalelo eziningi ezincane kusuka ku-ingot eyodwa enkulu.
Q3: Yiziphi izici zokuphepha ezifakiwe ekusebenzeni kwe-laser enamandla amakhulu?
A3:Izivalo ze-Class 1, izinhlelo zokukhiya, ukuvikela imisebe, kanye nokuvala okuzenzakalelayo konke kujwayelekile.
Umbuzo 4: Lolu hlelo luqhathaniswa kanjani nosaha bensimbi yedayimane ngokwezindleko?
A4:Nakuba i-capex yokuqala ingaba phezulu, ukukhushulwa nge-laser kunciphisa kakhulu izindleko ezisetshenziswayo, umonakalo we-substrate, kanye nezinyathelo zangemva kokucutshungulwa - kunciphisa izindleko eziphelele zobunikazi (TCO) zesikhathi eside.
U-Q5: Ingabe inqubo ingandiswa ibe yizingcezu ezingama-intshi angu-6 noma angu-8?
A5:Impela. Ipulatifomu isekela ama-substrate angafika ku-12-intshi anokusatshalaliswa kwemisebe efanayo kanye nezigaba zokunyakaza zefomethi enkulu.
Mayelana NATHI
I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ekukhiqizweni, nasekuthengisweni kwengilazi ekhethekile ye-optical kanye nezinto ezintsha zekristalu. Imikhiqizo yethu ihlinzeka nge-optical electronics, i-consumer electronics, kanye nezempi. Sinikeza izingxenye ze-optical ze-Sapphire, izembozo zelensi yeselula, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kanye nama-semiconductor crystal wafers. Ngobuchwepheshe obunekhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungewona ojwayelekile, sihlose ukuba yibhizinisi elihamba phambili lezinto ze-optoelectronic tech.










