I-Sapphire Square Blank Substrate – I-Optical, i-Semiconductor, kanye ne-Test Wafer
Umdwebo Oningiliziwe
Ukubuka konke kwe-Sapphire Square Blank Substrate
I-substrate engenalutho yesikwele se-sapphire, njengoba kuboniswe esithombeni, iyisakhi se-aluminium oxide (Al₂O₃) esihlanzekile kakhulu esenzelwe ukusetshenziswa kubunjiniyela bokukhanya obuthuthukisiwe, ukukhiqizwa kwamadivayisi e-semiconductor, kanye nokuhlolwa kwemishini yokunemba. Idume ngezakhiwo zayo eziyingqayizivele zomzimba nezamakhemikhali, i-sapphire isibe ngenye yezinto ezibalulekile kakhulu ezimbonini ezidinga ukuqina okukhulu, ukuzinza, kanye nokusebenza kokukhanya. Ikhiqizwa ngezindlela zokukhula kwekristalu eziyinkimbinkimbi, njengezinqubo ze-Kyropoulos (KY), i-Heat Exchange Method (HEM), noma i-Czochralski (CZ), lezi zikhala zesikwele zenziwe ngokucophelela ukuze zihlangabezane nezindinganiso zekhwalithi ephezulu.
Izici Eziyinhloko Ze-Sapphire Square Blank Substrate
I-Sapphire iyikristalu e-uniaxial, anisotropic enesakhiwo se-lattice esinama-hexagonal, enikeza inhlanganisela engenakuqhathaniswa yamandla omshini, ukuzinza kokushisa, kanye nokumelana namakhemikhali. Ngesilinganiso sokuqina kwe-Mohs esingu-9, i-sapphire ilandela idayimane kuphela ngokumelana nokuklwebheka, iqinisekisa ukuhlala isikhathi eside kakhulu ngisho nangaphansi kwezimo zezimboni ezihuquzelayo. Indawo yayo yokuncibilika idlula u-2000°C, okuvumela ukusebenza okuthembekile ezindaweni ezishisa kakhulu, kuyilapho ukulahleka kwayo okuphansi kwe-dielectric kuyenza ibe yinto ethandwayo ye-RF kanye nezinhlelo zokusebenza ze-elekthronikhi ezivame kakhulu.
Esigabeni se-optical, i-sapphire ibonisa ububanzi bokudlulisa kusukela ku-ultraviolet ejulile (~200nm) kuya kokubonakalayo kuya ku-mid-infrared (~5000nm), enobunye obuhle kakhulu be-optical kanye ne-birefringence ephansi uma iqondiswe kahle. Lezi zakhiwo zenza izikhala zesikwele ze-sapphire zibaluleke kakhulu emikhakheni edinga kakhulu i-optics njengezinhlelo ze-laser, i-photonics, i-spectroscopy, kanye ne-imaging.
Ukukhiqiza Nokucubungula
I-substrate ngayinye engenalutho yesikwele se-sapphire idlula enkambisweni yokukhiqiza eqinile, iqala ngama-powder e-alumina eluhlaza ahlanzekile kakhulu afakwa ekukhuleni kwekristalu okulawulwayo ezithandweni zokushisa okuphezulu. Ngemva kokuba ikristalu enkulu isikhulile, iqondiswa ngqo (ngokuvamile i-C-plane (0001), i-A-plane (11-20), noma i-R-plane (1-102)) ukuze ivumelane nezidingo ezithile zesicelo. Ikristalu bese isikwa ibe yizikwele ezingenalutho ngamasaha ambozwe ngedayimane, kulandelwe ukugoqa okunembile ukuze kufezwe ukufana kobukhulu. Ekusetshenzisweni kwe-optical kanye ne-semiconductor, izindawo zingapholishwa zibe bushelelezi ezingeni le-athomu, zihlangabezane nokuthamba okuqinile, ukufana, kanye nokucaciswa kobulukhuni bobuso.
Izinzuzo Eziyinhloko
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Ukucaca Okuvelele Kokubona– Ukudluliselwa kwe-wideband kusuka ku-UV kuya ku-IR kwenza kube kuhle kakhulu kumafasitela abonakalayo, imigodi ye-laser, kanye nezembozo zenzwa.
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Amandla Aphezulu Okusebenza Kwemishini– Amandla aphezulu okucindezela, ukuqina kokuphuka, kanye nokumelana nokuklwebheka kuqinisekisa ukuhlala isikhathi eside ezindaweni ezicindezelekile kakhulu.
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Ukuqina Kokushisa Namakhemikhali– Imelana nokushaqeka kokushisa, amazinga okushisa aphezulu, namakhemikhali anamandla, igcina ubuqotho ngesikhathi sokucubungula kwe-semiconductor kanye nokuvezwa okunzima kwemvelo.
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Ukulawula Okuqondile Kobukhulu– Ukubekezelelana kobukhulu obufinyelelekayo ngaphakathi kuka-±5µm kanye nokuba yisicaba komphezulu kuze kufike ku-λ/10 (ku-632.8nm), okubalulekile ekusetshenzisweni kwe-photolithography kanye ne-wafer bonding.
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Ukuguquguquka– Ifanelekela izinhlelo zokusebenza ezahlukahlukene kufaka phakathi izingxenye ze-optical, i-epitaxial growth substrates, kanye nama-wafer okuhlola umshini.
Izicelo
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Izicelo Zokubona: Isetshenziswa njengamafasitela, izihlungi, izibambi ze-laser gain medium, izembozo zokuvikela zezinzwa, kanye ne-photonics substrates ngenxa yokucaca kwayo kokukhanya nokuqina kwayo.
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Izingxenyana ze-semiconductor: Isebenza njengesisekelo esiyisisekelo sama-LED asekelwe ku-GaN, ama-electronics kagesi (izakhiwo ze-SiC-on-sapphire), amadivayisi e-RF, kanye namasekethe e-microelectronic, lapho ukuhanjiswa kokushisa kanye nokumelana namakhemikhali kubaluleke kakhulu.
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Ukuhlolwa Kwemishini kanye nama-Dummy Wafers: Isetshenziswa njalo njengezinto zokuhlola emigqeni yokwenziwa kwe-semiconductor, esetshenziselwa ukulinganisa umshini, ukulingisa inqubo, kanye nokuhlolwa kokukhuthazela kwemishini yokuqopha, yokufaka, noma yokuhlola.
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Ucwaningo Lwesayensi: Kubalulekile ekusethweni kokuhlola okudinga amapulatifomu angasebenzi, asobala, futhi azinzile ngokwemishini ukuze kufundwe nge-optical, kagesi, kanye nezinto zokwakha.
Imibuzo Evame Ukubuzwa
Umbuzo 1: Iyini inzuzo yokusebenzisa i-sapphire eyisikwele engenalutho phezu kwe-wafer eyindilinga?
A: Izimbobo eziyisikwele zinikeza indawo engasetshenziswa kakhulu yokusika ngokwezifiso, ukwenziwa kwamadivayisi, noma ukuhlolwa komshini, okunciphisa imfucuza yezinto kanye nezindleko.
Umbuzo 2: Ingabe ama-substrate e-sapphire angakwazi ukumelana nezimo zokucubungula ze-semiconductor?
A: Yebo, ama-substrate e-sapphire agcina ukuqina ngaphansi kwamazinga okushisa aphezulu, ukugqwala kwe-plasma, kanye nokwelashwa ngamakhemikhali okuvamile ekwenziweni kwe-semiconductor.
Umbuzo 3: Ingabe ukuqondiswa kobuso kubalulekile ekusetshenzisweni kwami?
A: Impela. I-C-plane sapphire isetshenziswa kabanzi kwi-GaN epitaxy ekukhiqizweni kwe-LED, kuyilapho ukuqondiswa kwe-A-plane kanye ne-R-plane kukhethwa kakhulu kwizicelo ezithile ze-optical noma ze-piezoelectric.
UMBUZO 4: Ingabe lezi zikhala ziyatholakala ngezimbozo ezenziwe ngokwezifiso?
A: Yebo, izembozo ezivimbela ukukhanyisa, i-dielectric, noma i-conductive zingasetshenziswa ukuhlangabezana nezidingo ezithile ze-optical noma ze-elekthronikhi.
Mayelana NATHI
I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ekukhiqizweni, nasekuthengisweni kwengilazi ekhethekile ye-optical kanye nezinto ezintsha zekristalu. Imikhiqizo yethu ihlinzeka nge-optical electronics, i-consumer electronics, kanye nezempi. Sinikeza izingxenye ze-optical ze-Sapphire, izembozo zelensi yeselula, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kanye nama-semiconductor crystal wafers. Ngobuchwepheshe obunekhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungewona ojwayelekile, sihlose ukuba yibhizinisi elihamba phambili lezinto ze-optoelectronic tech.










