Isithando sokukhulisa ikristalu se-Sapphire Czochralski single crystal furnace CZ indlela yokukhulisa i-sapphire wafer esezingeni eliphezulu

Incazelo emfushane:

Indlela yekristalu eyodwa yeCzochralski (CZ) iyindlela esetshenziswa kabanzi yokukhula kwekristalu yesapphire (Al₂O₃). Le ndlela, eyasungulwa usosayensi wasePoland uJan Czochralski ngo-1916, ikhulisa amakristalu eyodwa asezingeni eliphezulu ngokucwilisa amakristalu embewu entweni encibilikisiwe bese iwajikeleza kancane kancane bese iwaphakamisa. Ngenxa yobunzima bayo obuphezulu, ukuhanjiswa kokukhanya okuphezulu kanye nokuqina kwamakhemikhali okuhle kakhulu, ikristalu yesapphire inezinhlelo ezibalulekile emikhakheni eminingi.

Sithumelele i-imeyili

Izici

Izici eziyinhloko zendlela ye-CZ

(1) Isimiso sokukhula
Izinto zokusetshenziswa ze-alumina emsulwa kakhulu (Al₂O₃) zishiswa ngaphezu kwendawo yokuncibilika (cishe ngo-2050°C) ukuze zakhe isimo esincibilikisiwe.
Ikristalu yembewu icwiliswa ekuncibilikeni, bese ukuncibilika kukristalu yembewu bese kukhula kube yikristalu eyodwa ngokulawula ukuthambekela kwezinga lokushisa kanye nesivinini sokudonsa.

(2) Ukwakheka kwemishini
Uhlelo Lokushisa: Ukushisa okufakwayo okuvama kakhulu noma ukushisa okumelana nokumelana ukuze kuhlinzekwe indawo yokushisa ephezulu.
Uhlelo lokuphakamisa: lawula ngokunembile ukujikeleza kanye nesivinini sokuphakamisa ikristalu yembewu ukuqinisekisa ukukhula kwekristalu okufanayo.
Uhlelo lokulawula umoya: Ukuncibilika kuvikelwe ekungcolisweni nasekungcolisweni ngamagesi angasebenzi njenge-argon.
Uhlelo Lokupholisa: Lawula izinga lokupholisa lekristalu ukuze unciphise ukucindezeleka kokushisa.

(3) Izici eziyinhloko
Ikristalu esezingeni eliphezulu: ingakhula ngobukhulu obukhulu, ikristalu elilodwa lesafire elinesici esincane.
Ukulawulwa okunamandla: Ngokulungisa izinga lokushisa, isivinini sokuphakamisa kanye nesivinini sokujikeleza, usayizi wekristalu kanye nekhwalithi kulawulwa ngokunembile.
Uhla olubanzi lokusetshenziswa: lufanelekela izinto ezahlukahlukene zekristalu (njenge-silicon, i-sapphire, i-gadolinium gallium garnet, njll.).
Ukusebenza kahle kokukhiqiza okuphezulu: kufanelekile ekukhiqizweni okukhulu kwezentengiselwano.

Ukusetshenziswa okuyinhloko kwesithando sekristalu esisodwa se-CZ esithandweni sekristalu sesafire

(1) Ukukhiqizwa kwe-substrate ye-LED
Ukusetshenziswa: Isithando sekristalu esisodwa se-CZ Czochra sisetshenziselwa ukukhulisa amakristalu e-sapphire asezingeni eliphezulu njengezinto zokwakha ze-LED ezisekelwe ku-GAN.
Izinzuzo: I-substrate ye-sapphire inokukhanya okuphezulu kanye nokuhambisana okuhle kakhulu kwe-lattice, okuyizinto eziyinhloko zokukhiqiza i-LED.
Imakethe: Isetshenziswa kabanzi ezinkambeni zokukhanyisa, zokubonisa kanye nezibani zasemuva.

(2) Ukukhiqizwa kwezinto zamafasitela okukhanya
Izicelo: Amakristalu amakhulu e-sapphire akhuliswe ku-CZ Czochra single crystal furnaces angasetshenziswa ukukhiqiza amafasitela, amalensi nama-prism abonakalayo.
Izinzuzo: Ubulukhuni obukhulu be-Sapphire kanye nokuqina kwamakhemikhali kwenza ifanelekele ama-laser, ama-infrared detector kanye nezinsimbi zokukhanya.
Imakethe: Izicelo kumadivayisi okukhanya aphezulu, izindiza kanye nokuzivikela.

(3) Izinto zokuvikela zabathengi nge-elekthronikhi
Ukusetshenziswa: Amakristalu e-sapphire akhiqizwa yi-CZ Czochra single crystal furnace asetshenziselwa ukukhiqiza izikrini zefoni ezihlakaniphile, izibuko zokubuka nezinye izinto zokuzivikela.
Izinzuzo: Ukuqina okuphezulu kwe-Sapphire kanye nokumelana nokuklwebheka kwenza kube kuhle kakhulu emkhakheni we-elekthronikhi wabathengi.
Imakethe: Ngokuyinhloko yamafoni ahlakaniphile asezingeni eliphezulu, amawashi ahlakaniphile kanye neminye imikhiqizo kagesi esetshenziswa ngabathengi.

(4) Izingxenye zokugqoka zezimboni
Izicelo: Amakristalu esafire akhuliswe ezithandweni zekristalu eyodwa ze-CZ angasetshenziswa ukukhiqiza izingxenye zezimboni ezingagugi kakhulu njengama-bearings namathuluzi okusika.
Izinzuzo: Ukuqina okuphezulu kwe-Sapphire kanye nokumelana nokugqwala kwenza kube kuhle kakhulu ezindaweni zezimboni ezinzima.
Imakethe: Isetshenziswa ekukhiqizeni imishini, amasimu amakhemikhali kanye namandla.

(5) Ukukhiqizwa kwezinzwa zokushisa okuphezulu
Ukusetshenziswa: Amakristalu e-sapphire akhiqizwa yi-CZ Czochra single crystal furnace asetshenziselwa ukukhiqiza izinzwa ezindaweni ezinokushisa okuphezulu kanye nezindawo ezibolile.
Izinzuzo: Ukuqina kwamakhemikhali e-Sapphire kanye nokumelana nokushisa okuphezulu kwenza ifanelekele izindawo ezibucayi kakhulu.
Imakethe: Isetshenziswa ekuqapheni izindiza, izimoto kanye nezimboni.

Imishini yesithando somlilo sesafire kanye nezinsizakalo ezinikezwa yi-XKH

I-XKH igxile ekuthuthukisweni nasekukhiqizweni kwemishini yesithando se-sapphire, inikeza izinsizakalo ezilandelayo:

Imishini eyenziwe ngokwezifiso: Ngokwezidingo zamakhasimende, i-XKH inikeza imininingwane ehlukene kanye nokucushwa kwesithando sekristalu esisodwa se-CZ Czochra ukusekela ukukhula kwekhwalithi ephezulu kwamakristalu e-sapphire.

Usekelo lobuchwepheshe: I-XKH inikeza amakhasimende ukwesekwa okugcwele kwenqubo kusukela ekufakweni kwemishini kanye nokwenza ngcono izinqubo kuya esiqondisweni sobuchwepheshe sokukhulisa ikristalu.

Izinsizakalo Zokuqeqesha: I-XKH inikeza ukuqeqeshwa kokusebenza kanye nokuqeqeshwa kobuchwepheshe kumakhasimende ukuqinisekisa ukusebenza kahle kwemishini.

Isevisi yangemva kokuthengisa: I-XKH inikeza isevisi yokuphendula ngokushesha ngemva kokuthengisa kanye nokugcinwa kwemishini ukuqinisekisa ukuqhubeka kokukhiqizwa kwamakhasimende.

Izinsizakalo zokuthuthukisa: I-XKH inikeza izinsizakalo zokuthuthukisa imishini kanye nokuguqula ngokwezidingo zamakhasimende ukuze kuthuthukiswe ukusebenza kahle kokukhiqiza kanye nekhwalithi yekristalu.

Indlela ye-Czochralski (CZ) crystal eyodwa ubuchwepheshe obuyinhloko bokukhula kwekristalu ye-sapphire, obunezici zekhwalithi ephezulu, ukusebenza kahle okuphezulu kanye nokulawulwa okuphezulu. I-CZ CZ crystal eyodwa esithandweni sekristalu ye-sapphire inezinhlelo zokusebenza eziningi kuma-substrates e-LED, amafasitela okukhanya, ama-electronics abathengi, izingxenye zokuguguleka kwezimboni kanye nezinzwa zokushisa okuphezulu. I-XKH inikeza imishini ye-sapphire ethuthukisiwe kanye nohlu oluphelele lwezinsizakalo ukusekela amakhasimende ukufeza ukukhiqizwa okukhulu kwamakristalu e-sapphire ekhwalithi ephezulu nokusiza ukuthuthukiswa kwezimboni ezihlobene.