I-Quartz Glass Wafer JGS1 JGS2 BF33 Wafer 8inch 12inch 725 ± 25 um Noma Yenziwe Ngokwezifiso
Imininingwane
| Okukhethekile | 4" | 6" | 8" | 10" | 12” |
| Ububanzi | 100mm | 150mm | 200mm | 250mm | 300mm |
| Ubukhulu | 0.10mm | 0.30mm | 0.40mm | 0.50mm | 0.50mm |
| Ifulethi Eliyinhloko | 32.5mm | 47.5mm / 57.5mm / I-Notch | I-Notch | I-Notch | I-Notch |
| I-LTV (5mmx5mm) | < 0.5um | < 0.5um | < 0.5um | < 0.5um | < 0.5um |
| I-TTV | < 2um | < 3um | <3um | <10um | <10um |
| Umnsalo | ±20um | ±30um | ±40um | ±40um | ±40um |
| I-Warp | ≤ 30um | ≤ 40um | ≤ 70um | ≤ 80um | ≤ 80um |
| Ukuzungeza Umphetho | Ihambisana ne-SEMI M1.2 Standard/bheka i-IEC62276 | ||||
| Uhlobo Lomphezulu | Izinhlangothi Ezimbili Ezipholishiwe/Eziphindwe Kabili Ezipholishiwe | ||||
| Uhlangothi olupholishiwe uRa | I-Ra≤1nm | ||||
| Izindlela Zokunquma Emuva | I-Ra 0.2-0.7um noma eyenziwe ngokwezifiso | ||||
Ithebula lamapharamitha e-Quartz Glass Wafer JGS1 JGS2 BF33 Wafer
Isicelo
Ama-wafer engilazi ye-Quartz enziwe nge-JGS1, JGS2, kanye ne-BF33 asetshenziswa kabanzi ezimbonini ezahlukahlukene ezinembayo ephezulu. Lawa ma-wafer alungele ukukhiqizwa kwe-semiconductor, kufaka phakathi ama-substrate e-photomask kanye nama-optics asezingeni le-wafer. Afaneleka futhi ezingxenyeni ze-optical, ama-laser, kanye nezinzwa ezimbonini ezifana nezokuxhumana, izindiza, kanye namadivayisi ezokwelapha. Ukuqina kwawo okuphezulu kokushisa kanye nokumelana nokushaqeka kokushisa kuwenza afaneleke kakhulu ezindaweni zokushisa okukhulu, kuyilapho ukudlulisa kwawo okumangalisayo kubalulekile kuma-optics e-ultraviolet (UV) kanye ne-infrared (IR).
Izakhiwo
Izinhlobo zezinto:
I-JGS1: Ukudluliselwa kwe-UV okuphezulu, kuhle kakhulu ekusetshenzisweni kokukhanya kwe-ultraviolet.
I-JGS2: Ukudlulisa okulinganiselayo kuzo zonke izigaba ze-UV, ezibonakalayo, kanye ne-infrared, ezifanele ukusetshenziswa okuvamile kokukhanya.
BF33: Ingilazi ye-borosilicate enokumelana okuphezulu kwamakhemikhali kanye nokuqina kokushisa. Izinketho Zosayizi:
Itholakala ngosayizi ojwayelekile wama-wafer angu-8 intshi kanye no-12 intshi.
Osayizi abangokwezifiso bangenziwa ngokusekelwe ezidingweni ezithile. Ubukhulu:
Ubukhulu obujwayelekile bungu-725 ± 25 μm.
Ubukhulu obungenziwa ngezifiso buyatholakala ukuze kuhlangatshezwane nezidingo ezahlukene zezimboni.
Izakhiwo Zokushisa:
Ukuqina kokushisa okuhle kakhulu, okufanele ukusetshenziswa ezindaweni ezishisa kakhulu.
Ukumelana okuphezulu nokushaqeka kokushisa.
Ukumelana namakhemikhali:
Ukumelana okunamandla nokugqwala okuvela kuma-asidi, ama-alkali, kanye namakhemikhali amaningi, ikakhulukazi ku-BF33.
Izakhiwo Zokubona:
Ama-wafer e-JGS1 kanye ne-JGS2 anikeza ukudluliselwa okuphezulu kokukhanya kububanzi be-ultraviolet (UV), obubonakalayo, kanye nobe-infrared (IR).
Ilungele izingxenye ze-optical ezinembile, i-photonics, kanye nezinhlelo zokusebenza ze-laser.
Ikhwalithi Yomphezulu:
Ubuso obuphezulu obuthambile nobubushelelezi, okuqinisekisa ukunemba ekukhiqizweni kwamadivayisi e-semiconductor kanye ne-optical.
Lezi zakhiwo zenza ama-wafer e-JGS1, JGS2, kanye ne-BF33 abe asebenziseka kalula futhi athembeke ezinhlelweni zokusebenza eziphezulu kuzo zonke izimboni ezifana ne-optics, i-electronics, kanye ne-semiconductors.
Sekukonke
Ama-wafer engilazi ye-Quartz enziwe nge-JGS1, JGS2, kanye ne-BF33 anikeza ukusebenza okuhle kakhulu kuzo zonke izinhlelo zokusebenza ezidinga kakhulu. Atholakala ngobukhulu obujwayelekile obungu-8-intshi no-12-intshi obukhulu obungu-725 ± 25 μm, lawa ma-wafer nawo angenziwa ngokwezifiso ukuze ahlangabezane nezidingo ezithile. I-JGS1 kanye ne-JGS2 zinikeza ukudluliselwa okuphezulu kokukhanya kububanzi be-UV, obubonakalayo, kanye ne-IR, kuyilapho i-BF33 inikeza ukumelana okuhle kwamakhemikhali kanye nokuqina kokushisa. Njengoba indawo ibushelelezi futhi ibushelelezi, lawa ma-wafer afanelekela izimboni ezinembile njenge-semiconductors, i-optics, kanye ne-photonics, okuqinisekisa ukuthembeka nokuqina ezindaweni ezibucayi kanye nezinhlelo zokusebenza ezibucayi.
Umdwebo Oningiliziwe





