Imishini eyenziwe ngokwezifiso yesikebhe sekristalu se-Quartz yokushisa okuphezulu nokumelana nokuguguleka

Izikebhe zekristalu ze-quartz zenzelwe ukubamba nokuthutha ama-wafer e-silicon ezindaweni ezishisa kakhulu, njengasezithandweni ezisetshenziselwa izinqubo ezifana ne-oxidation, diffusion kanye ne-annealing. Ukusetshenziswa kwe-quartz kuqinisekisa ukuthi umkhumbi ungamelana namazinga okushisa aphezulu kanye nezindawo zamakhemikhali ezinzima ezihlangana nazo kulezi zinqubo zokukhiqiza ze-semiconductor.

Ukwakheka kwesikebhe se-quartz kuvumela ukulayishwa nokuthululwa kwama-wafer amaningi ngendlela ephumelelayo, okuvumela ukukhiqizwa okuphezulu kwemikhiqizo ezindaweni zokukhiqiza ze-semiconductor. Ukusetshenziswa kwezikebhe ze-quartz kusiza ukuqinisekisa ubuqotho kanye nekhwalithi yama-wafer e-silicon ngesikhathi sokwelashwa okuhlukahlukene kokushisa namakhemikhali, okusiza ekuthuthukiseni ukunemba kanye nokuthembeka kwamadivayisi e-semiconductor akhiqizwayo.

Isikebhe se-quartz wafer siyithuluzi elikhethekile elisetshenziswa embonini ye-semiconductor ukuphatha ama-silicon wafer. Ngokuvamile senziwe nge-quartz ehlanzekile kakhulu, ekhethwa ngenxa yezakhiwo zayo ezinhle kakhulu zokushisa namakhemikhali.

Isikebhe se-wafer senzelwe ukuthwala nokucubungula ama-wafer e-silicon ezindaweni ezinokushisa okuphezulu, njengasezithandweni ezisetshenziselwa izinqubo ezifana ne-oxidation, diffusion, kanye ne-annealing. Ukusetshenziswa kwe-quartz kuqinisekisa ukuthi izikebhe zingakwazi ukumelana namazinga okushisa aphezulu kanye nezimo zamakhemikhali ezinzima ezihlangana nazo kulezi zinqubo zokukhiqiza ze-semiconductor.

Ukwakheka kwezikebhe kuvumela ukulayishwa nokuthululwa kwama-wafer amaningi ngendlela ephumelelayo, okuholela ekukhiqizweni okuphezulu kwemikhiqizo ezindaweni zokukhiqiza ama-semiconductor. Ukusetshenziswa kwama-wafer e-quartz kusiza ukuqinisekisa ubuqotho kanye nekhwalithi yama-wafer e-silicon ngesikhathi sokwelashwa okuhlukahlukene kokushisa namakhemikhali, ngaleyo ndlela kwandisa ukunemba nokuthembeka kwamadivayisi e-semiconductor akhiqizwayo.