Izikhonkwane Zokuphakamisa zeSapphire Eziphezulu Iphini yokuphakamisa ye-Al₂O₃ yekristalu eyodwa

Izikhonkwane Zokuphakamisa zeSapphire Eziphezulu I-single crystal Al₂O₃ Iphinikhodi yokuphakamisa ye-Wafer Isithombe Esifakiwe

Incazelo emfushane:

Amaphini Okuphakamisa Ama-Sapphire amelela intuthuko ebalulekile ezingxenyeni zokucubungula ama-semiconductor, aklanywe kusukela ku-sapphire eyodwa-crystal emsulwa kakhulu (Al₂O₃) ukuze kuhlangatshezwane nezidingo eziqinile zobuchwepheshe besimanje bokwenza izinto ezincane. Lezi zingxenye zokunemba ziye zaba yinto ebalulekile ekukhiqizweni kwamadivayisi e-semiconductor, izinhlelo zokukhula kwe-epitaxial ze-LED, kanye nezinhlelo zokusebenza zokucubungula ama-wafer ezithuthukisiwe. Isakhiwo esiyingqayizivele sekristalu se-sapphire yokwenziwa sinikeza izakhiwo zezinto ezingavamile ezivumela la maphini okuphakamisa ukuthi asebenze kangcono kunezinye izindlela ezivamile ezindaweni zokusebenza eziyinselele kakhulu. Ukuqina kwawo okushisayo okumangalisayo kugcina ubuqotho bomshini kuzo zonke izimo zokushisa ezibucayi, kuyilapho ukumelana kwawo namakhemikhali kuqinisekisa ukusebenza okuqhubekayo lapho kuvezwa kumakhemikhali enqubo anolaka. Lokhu kuhlanganiswa kwezici kwenza amaphini Okuphakamisa Ama-Sapphire abe yisisombululo esithandwayo sezinhlelo zokusebenza zokuphatha ama-wafer ezibalulekile lapho ukunemba kwezinga le-nanometer, ukulawulwa kokungcola, kanye nokuthembeka kwenqubo kubaluleke kakhulu.

Sithumelele i-imeyili

Izici

Amapharamitha obuchwepheshe

Ukwakheka kwamakhemikhali	I-Al2O3
Ubulukhuni	Ama-9Moh
Imvelo ebonakalayo	I-Uniaxial
Inkomba yokubuka	1.762-1.770
Ukuqina kwe-Birefringence	0.008-0.010
Ukuhlakazeka	Okuphansi, 0.018
I-Lustre	I-Vitreous
I-Pleochroism	Okumaphakathi kuya Okuqinile
Ububanzi	0.4mm-30mm
Ukubekezelelana kobubanzi	0.004mm-0.05mm
ubude	2mm-150mm
ukubekezelela ubude	0.03mm-0.25mm
Ikhwalithi ephezulu	40/20
Ukuzungeza komphezulu	RZ0.05
Umumo ngokwezifiso	zombili iziphetho ziyisicaba, isiphetho esisodwa si-redius, zombili iziphetho zi-redius, izikhonkwane zesihlalo kanye nezimo ezikhethekile

Izici Eziyinhloko

1. Ukuqina Okumangalisayo Nokumelana Nokugqokwa: Njengoba inesilinganiso sokuqina se-Mohs esingu-9, esilandela idayimane kuphela, ama-Sapphire Lift Pins abonisa izici zokugqokwa ezidlula kakhulu ezinye izindlela ze-silicon carbide yendabuko, i-alumina ceramic, noma i-metal alloy. Lobu bunzima obukhulu busho ukuthi kuncishiswe kakhulu izidingo zokukhiqizwa kwezinhlayiya kanye nokugcinwa kwazo, kanti isikhathi sokuphila kwesevisi sivame ukuba side ngokuphindwe kathathu kuya kahlanu kunezinto ezivamile ezisetshenziswa ngokufanayo.

2. Ukumelana Nokushisa Okuphezulu Okuphezulu: Yakhelwe ukumelana nokusebenza okuqhubekayo emazingeni okushisa angaphezu kuka-1000°C ngaphandle kokuwohloka, ama-Sapphire Lift Pins agcina ukuzinza kobukhulu kanye namandla omshini ezinqubweni zokushisa ezidinga kakhulu. Lokhu kuwenza abe usizo kakhulu ezisetshenzisweni ezibalulekile ezifana nokufakwa kwe-chemical vapor (CVD), ukufakwa kwe-metal-organic chemical vapor (MOCVD), kanye nezinhlelo zokufaka i-annealing zokushisa okuphezulu lapho ukungalingani kokukhula kokushisa kungonakalisa khona isivuno senqubo.

3. Ukungangeni Kwamakhemikhali: Isakhiwo se-sapphire esinekristalu elilodwa sibonisa ukumelana okumangalisayo nokuhlaselwa yi-HF acid, amakhemikhali asekelwe ku-chlorine, kanye namanye amagesi enqubo enamandla avame ukutholakala ekwakhiweni kwe-semiconductor. Lokhu kuzinza kwamakhemikhali kuqinisekisa ukusebenza okuqhubekayo ezindaweni ze-plasma futhi kuvimbela ukwakheka kweziphambeko zobuso ezingaholela ekungcoleni kwe-wafer.

4. Ukungcola Okuphansi Kwezinhlayiya: Zenziwe ngamakristalu e-sapphire angenamaphutha, ahlanzekile kakhulu (ngokuvamile >99.99%), lezi zikhonkwane zokuphakamisa zibonisa ukuchitheka okuncane kwezinhlayiya ngisho nangemva kokusetshenziswa isikhathi eside. Isakhiwo sazo sobuso esingenazimbobo kanye nokuqedwa okupholishiwe kuhlangabezana nezidingo eziqinile kakhulu zegumbi lokuhlanza, okunegalelo ngqo ekuthuthukisweni kwemikhiqizo yenqubo ekukhiqizweni kwe-node semiconductor okuthuthukisiwe.

Imishini Enembe Kakhulu: Kusetshenziswa amasu okugaya idayimane athuthukisiwe kanye nokucubungula nge-laser, ama-Sapphire Lift Pins angakhiqizwa ngokumelana kwe-sub-micron kanye nokuqedwa kobuso okungaphansi kuka-0.05μm Ra. Ama-geometri enziwe ngokwezifiso afaka amaphrofayili anciphile, ukucushwa kwe-tip ekhethekile, kanye nezici zokuqondanisa ezihlanganisiwe kungaklanywa ukuze kuxazululwe izinselele ezithile zokuphatha i-wafer emishinini yokukhiqiza yesizukulwane esilandelayo.

Izicelo Eziyinhloko

1. Ukukhiqizwa kwe-Semiconductor: Amaphini Okuphakamisa i-Sapphire adlala indima ebalulekile ezinhlelweni zokucubungula i-wafer ezithuthukisiwe, enikeza ukwesekwa okuthembekile kanye nokubekwa okunembile ngesikhathi se-photolithography, ukuqopha, ukubeka, kanye nezinqubo zokuhlola. Ukuqina kwawo kokushisa kanye namakhemikhali kuwenza abe usizo kakhulu kumathuluzi e-EUV lithography kanye nezinhlelo zokusebenza zokupakisha ezithuthukisiwe lapho ukuzinza kobukhulu ezikalini ze-nanometer kubalulekile khona.

2. I-LED Epitaxy (MOCVD): Ku-gallium nitride (GaN) kanye nezinhlelo zokukhula ze-epitaxial ze-compound semiconductor, ama-Sapphire Lift Pins ahlinzeka ngokusekelwa kwe-wafer okuzinzile emazingeni okushisa avame ukwedlula i-1000°C. Izici zawo zokukhula kokushisa ezihambisanayo ne-sapphire substrates zinciphisa ukugoba kwe-wafer nokwakheka kokushelela ngesikhathi senqubo yokukhula kwe-epitaxial.

3. Imboni ye-Photovoltaic: Ukukhiqizwa kwamaseli elanga okusebenza kahle kakhulu kuzuza ezimpahleni ezihlukile ze-sapphire ezinqubweni zokusabalala kwezinga lokushisa eliphezulu, ukuthungwa, kanye nokufakwa kwefilimu encane. Ukumelana nokuguguleka kwamaphini kubaluleke kakhulu ezindaweni zokukhiqiza ngobuningi lapho isikhathi eside sezingxenye sithinta ngqo izindleko zokukhiqiza.

4. Ukucubungula Okunembile Nokusebenza Kwe-elekthronikhi: Ngaphandle kwezicelo ze-semiconductor, ama-Sapphire Lift Pins asetshenziswa ekuphatheni izingxenye ezithambile ze-optical, amadivayisi e-MEMS, kanye nezindawo ezikhethekile lapho ukucubungula okungenakungcola kanye nokuvimbela ukuklwebheka kubalulekile khona. Izakhiwo zawo zokuvikela ugesi ziwenza afaneleke kakhulu ezinhlelweni ezifaka amadivayisi azwela ugesi.

Izinsizakalo ze-XKH zezikhonkwane zokuphakamisa i-sapphire

I-XKH inikeza ukwesekwa okubanzi kwezobuchwepheshe kanye nezixazululo ezenziwe ngokwezifiso ze-Sapphire Lift Pins:

1. Izinsizakalo Zokuthuthukiswa Kwezifiso
· Ukusekelwa kokulungiswa kobukhulu, i-geometric kanye nokulungiswa kwendawo
· Ukukhetha izinto kanye nezincomo zobuchwepheshe zokuthuthukisa amapharamitha
· Ukwakhiwa komkhiqizo ngokubambisana kanye nokuqinisekiswa kokulingisa
2. Amakhono Okukhiqiza Ngokunembile
· Umshini wokugaya onembile kakhulu onezimo zokubekezelelana ezilawulwa ngaphakathi kwe-±1μm
· Ukwelashwa okukhethekile okuhlanganisa ukupholisha izibuko kanye nokuhlikihla imiphetho
· Izixazululo zokushintsha ubuso ongazikhethela njengezimbozo ezilwa nokunamathela
3. Uhlelo Lokuqinisekisa Ikhwalithi
· Ukuqaliswa okuqinile kokuhlolwa kwezinto ezingenayo kanye nokulawulwa kwenqubo
· Ukuhlolwa kokukhanya okugcwele kanye nokuhlaziywa kwesimo somphezulu
· Ukuhlinzekwa kwemibiko yokuhlola ukusebenza komkhiqizo
4. Izinsizakalo Zokunikezela Ngempahla
· Ukulethwa okusheshayo kwemikhiqizo ejwayelekile
· Ukuphathwa kwempahla okuzinikele kwama-akhawunti abalulekile
5. Usekelo Lobuchwepheshe
· Ukubonisana ngezixazululo zesicelo
· Impendulo esheshayo ngemva kokuthengisa
Sizibophezele ekuhlinzekeni ngemikhiqizo ye-Sapphire Lift Pins esezingeni eliphezulu kanye nezinsizakalo zobuchwepheshe zobungcweti ukuze kuhlangatshezwane nezidingo eziqinile ze-semiconductor, LED kanye neminye imboni ethuthukile.