I-N-Type SiC Composite Substrates Dia6inch Ikhwalithi ephezulu ye-monocrystaline ne-substrate yekhwalithi ephansi
Ithebula lepharamitha elivamile le-N-Type SiC Composite Substrates
项目Izinto | 指标Ukucaciswa | 项目Izinto | 指标Ukucaciswa |
直径Ububanzi | 150±0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Ngaphambili (Si-face) mahhadlahhadla | I-Ra≤0.2nm (5μm*5μm) |
晶型I-Polytype | 4H | I-Edge Chip, Scratch, Crack (ukuhlola okubonakalayo) | Lutho |
电阻率Ukungazweli | 0.015-0.025ohm ·cm | 总厚度变化I-TTV | ≤3μm |
Dlulisa Ukuqina kwesendlalelo | ≥0.4μm | 翘曲度I-Wap | ≤35μm |
空洞Ize | ≤5ea/wafer (2mm>D>0.5mm) | 总厚度Ubukhulu | 350±25μm |
Igama elithi "N-uhlobo" libhekisela ohlotsheni lwe-doping olusetshenziswa ezintweni ze-SiC. Ku-physics ye-semiconductor, i-doping ihilela ukwethulwa ngamabomu kokungcola ku-semiconductor ukuze kuguqulwe izici zayo zikagesi. I-N-type doping yethula izakhi ezihlinzeka ngokwedlulele kwama-electron amahhala, okunikeza okokusebenza ukugxilisa okungeyikho kwenkampani yenethiwekhi.
Izinzuzo ze-N-type SiC composite substrates zihlanganisa:
1. Ukusebenza okuphezulu kokushisa: I-SiC inokuhamba okuphezulu kwe-thermal futhi ingasebenza emazingeni okushisa aphezulu, okwenza ifaneleke kuzinhlelo zokusebenza ze-elekthronikhi ezinamandla amakhulu kanye ne-high-frequency.
2. I-voltage ephezulu yokuphuka: Izinto ze-SiC zine-voltage ephezulu yokuphuka, ezizenza zikwazi ukumelana nezinkundla zikagesi eziphakeme ngaphandle kokuphuka kukagesi.
3. Ukumelana namakhemikhali nemvelo: I-SiC ayizwani namakhemikhali futhi ingamelana nezimo zemvelo ezinzima, okuyenza ifanelekele ukusetshenziswa ezinhlelweni eziyinselele.
4. Ukuncipha kokulahlekelwa kwamandla: Uma kuqhathaniswa nezinto zendabuko ezisekelwe ku-silicon, ama-substrates e-SiC anika amandla ukuguqulwa kwamandla okuphumelelayo futhi anciphise ukulahlekelwa kwamandla kumadivayisi kagesi.
5. I-Wide bandgap: I-SiC ine-bandgap ebanzi, evumela ukuthuthukiswa kwezinto zikagesi ezingasebenza emazingeni okushisa aphezulu kanye nokuminyana kwamandla aphezulu.
Sekukonke, ama-substrates ayinhlanganisela ye-SiC yohlobo lwe-N anikeza izinzuzo ezibalulekile zokuthuthukiswa kwemishini kagesi esebenza kahle kakhulu, ikakhulukazi ezinhlelweni zokusebenza lapho ukusebenza kwezinga lokushisa eliphezulu, ukuminyana kwamandla aphezulu, nokuguqulwa kwamandla okusebenzayo kubalulekile.