Ama-Quartz Wafers Ahlanganisiwe Ahlanzekile Kakhulu e-Semiconductor, Izinhlelo Zokusebenza ze-Photonics Optical 2″4″6″8″12″

Incazelo emfushane:

I-Fused Quartz-obeye aziwe njengoI-Silica Ehlanganisiwe—iyindlela ye-silicon dioxide (SiO₂) engeyona i-crystalline (amorphous). Ngokungafani ne-borosilicate noma ezinye izibuko zezimboni, i-quartz ehlanganisiwe ayinazo izinto ezingeziwe noma izithasiselo, enikeza ukwakheka okumsulwa kwamakhemikhali kwe-SiO₂. Iyaziwa ngokudluliswa kwayo okubonakalayo okuhlukile kuzo zombili i-ultraviolet (UV) kanye ne-infrared (IR), idlula izinto zeglasi zendabuko.

Sithumelele i-imeyili

Izici

Umdwebo Oningiliziwe

Ama-Wafers engilazi e-Fused Silica kanye ne-Optical Quartz-2

i-fused_quartz_wafer_4_inch_fused_silica_wafer_

Ukubuka konke kwe-Quartz Glass

Ama-wafer e-Quartz akha umgogodla wamadivayisi amaningi esimanje aqhuba umhlaba wedijithali wanamuhla. Kusukela ekuzulazuleni ku-smartphone yakho kuya kumgogodla weziteshi zesisekelo ze-5G, i-quartz iletha ngokuthula ukuzinza, ubumsulwa, kanye nokunemba okudingekayo kuma-elekthronikhi asebenza kahle kakhulu kanye nama-photonics. Kungakhathaliseki ukuthi isekela izifunda eziguquguqukayo, ivumela izinzwa ze-MEMS, noma yakha isisekelo se-quantum computing, izici ezihlukile ze-quartz ziyenza ibe yinto ebaluleke kakhulu kuzo zonke izimboni.

I-“Fused Silica” noma i-“Fused Quartz” okuyisigaba se-quartz esingaguquki (i-SiO2). Uma iqhathaniswa nengilazi ye-borosilicate, i-fused silica ayinazo izithasiselo; ngakho-ke ikhona ngesimo sayo esimsulwa, i-SiO2. I-fused silica inokudluliselwa okuphezulu ku-infrared kanye ne-ultraviolet spectrum uma iqhathaniswa nengilazi evamile. I-fused silica ikhiqizwa ngokuncibilikisa nokuqinisa kabusha i-ultrapure SiO2. I-synthetic silica fused silica ngakolunye uhlangothi yenziwe ngezinto zamakhemikhali ezicebile nge-silicon njenge-SiCl4 ezifakwa igesi bese zixutshwa emoyeni we-H2 + O2. Uthuli lwe-SiO2 olwakhiwe kulokhu luxutshwa ne-silica endaweni engaphansi. Amabhulokhi e-fused silica anqunywa abe ama-wafers bese ekugcineni ama-wafers apholishwa.

Ama-Wafer engilazi e-Silica ahlanganisiwe kanye ne-Optical Quartz

Izici Eziyinhloko Nezinzuzo Ze-Quartz Glass Wafer

Ukuhlanzeka Okuphezulu Kakhulu (≥99.99% SiO2)
Kuhle kakhulu ezinqubweni ze-semiconductor kanye ne-photonics ezihlanzekile kakhulu lapho ukungcola kwezinto kufanele kuncishiswe khona.
Ibanga Lokusebenza Elibanzi Lokushisa
Igcina ubuqotho besakhiwo kusukela emazingeni okushisa acwebezelayo kuze kube ngaphezu kuka-1100°C ngaphandle kokugoba noma ukubola.
Ukudluliselwa Okuvelele Kwe-UV Ne-IR
Ihlinzeka ngokucaca okuhle kakhulu kokukhanya okuvela ku-ultraviolet ejulile (DUV) nge-near-infrared (NIR), isekela izinhlelo zokusebenza zokukhanya ezinembile.
Isilinganiso Sokwanda Okuphansi Kokushisa
Kuthuthukisa ukuzinza kobukhulu ngaphansi kokushintshashintsha kwezinga lokushisa, kunciphisa ukucindezeleka futhi kuthuthukise ukuthembeka kwenqubo.
Ukumelana Okuphezulu Kwamakhemikhali
Ayisebenzi kuma-asidi amaningi, ama-alkali, kanye nezinyibilikisi—okwenza ifaneleke kahle ezindaweni ezinolaka lwamakhemikhali.
Ukuguquguquka Kokuqedwa Komphezulu
Itholakala ngokuqedwa okubushelelezi kakhulu, okunohlangothi olulodwa noma okunohlangothi olubili okupholishiwe, okuhambisana ne-photonics kanye nezidingo ze-MEMS.

Inqubo Yokukhiqiza I-Quartz Glass Wafer

Ama-wafer e-quartz ahlanganisiwe akhiqizwa ngochungechunge lwezinyathelo ezilawulwayo neziqondile:

Ukukhethwa Kwezinto Ezingavuthiwe
Ukukhethwa kwemithombo yemvelo ye-quartz emsulwa kakhulu noma ye-SiO₂ yokwenziwa.
Ukuncibilika Nokuhlanganiswa
I-Quartz iyancibilika ku-~2000°C ezithandweni zikagesi ngaphansi komkhathi olawulwayo ukuze kususwe izinto ezifakiwe kanye nama-bubble.
Ukwakha Amabhulokhi
I-silica encibilikisiwe ipholiswa ibe amabhlogo noma ama-ingot aqinile.
Ukusikwa kwe-Wafer
Amasaha edayimane noma ensimbi asetshenziswa ukusika ama-ingot abe yizimbobo ze-wafer.
Ukugoqa Nokupholisha
Zombili izindawo ziyisicaba futhi zicwebezelisiwe ukuze zihlangabezane nemininingwane eqondile yokukhanya, ukujiya, kanye nobulukhuni.
Ukuhlanza Nokuhlola
Ama-wafer ahlanzwa emakamelweni ahlanzekile e-ISO Class 100/1000 futhi ahlolwe ngokucophelela ukuze kutholakale amaphutha kanye nokulingana kobukhulu bawo.

Izakhiwo ze-Quartz Glass wafer

i-spec	iyunithi	4"	6"	8"	10"	12"
Ububanzi / usayizi (noma isikwele)	mm	100	150	200	250	300
Ukubekezelelana (±)	mm	0.2	0.2	0.2	0.2	0.2
Ubukhulu	mm	0.10 noma ngaphezulu	0.30 noma ngaphezulu	0.40 noma ngaphezulu	0.50 noma ngaphezulu	0.50 noma ngaphezulu
Ifulethi eliyinhloko eliyinkomba	mm	32.5	57.5	I-semi-notch	I-semi-notch	I-semi-notch
I-LTV (5mm×5mm)	μm	< 0.5	< 0.5	< 0.5	< 0.5	< 0.5
I-TTV	μm	< 2	< 3	< 3	< 5	< 5
Umnsalo	μm	±20	±30	±40	±40	±40
I-Warp	μm	≤ 30	≤ 40	≤ 50	≤ 50	≤ 50
I-PLTV (5mm×5mm) < 0.4μm	%	≥95%	≥95%	≥95%	≥95%	≥95%
Ukuzungeza Umphetho	mm	Ihambisana ne-SEMI M1.2 Standard / bheka i-IEC62276
Uhlobo Lomphezulu		Izinhlangothi Ezimbili Ezipholishiwe/Eziphindwe Kabili Ezipholishiwe
Uhlangothi olupholishiwe uRa	nm	≤1	≤1	≤1	≤1	≤1
Izindlela Zokunquma Emuva	μm	jikelele 0.2-0.7 noma ngokwezifiso

I-Quartz vs. Ezinye Izinto Ezibonakalayo

Impahla	Ingilazi ye-Quartz	Ingilazi ye-Borosilicate	I-Sapphire	Ingilazi Ejwayelekile
Izinga Lokushisa Eliphezulu Lokusebenza	~1100°C	~500°C	~2000°C	~200°C
Ukudluliswa kwe-UV	Kuhle kakhulu (JGS1)	Kubi	Kuhle	Kubi kakhulu
Ukumelana namakhemikhali	Kuhle kakhulu	Okumaphakathi	Kuhle kakhulu	Kubi
Ubumsulwa	Kuphezulu kakhulu	Okuphansi kuya kokuphakathi	Phezulu	Phansi
Ukwanda Kokushisa	Kuphansi kakhulu	Okumaphakathi	Phansi	Phezulu
Izindleko	Okumaphakathi kuya kokuphezulu	Phansi	Phezulu	Kuphansi kakhulu

Imibuzo Evame Ukubuzwa mayelana ne-Quartz Glass Wafer

Q1: Uyini umehluko phakathi kwe-fused quartz ne-fused silica?
Nakuba zombili ziyizinhlobo ze-SiO₂ ezingaguquki, i-quartz ehlanganisiwe ivame ukuvela emithonjeni ye-quartz yemvelo, kuyilapho i-silica ehlanganisiwe ikhiqizwa ngokwenziwa. Ngokusebenza, inikeza ukusebenza okufanayo, kodwa i-silica ehlanganisiwe ingaba nobumsulwa obuphezulu kanye nokulingana.

Umbuzo 2: Ingabe ama-wafer e-quartz ahlanganisiwe angasetshenziswa ezindaweni ezine-vacuum ephezulu?
Yebo. Ngenxa yezakhiwo zazo eziphansi zokukhipha igesi kanye nokumelana okuphezulu kokushisa, ama-wafer e-quartz ahlanganisiwe alungele izinhlelo ze-vacuum kanye nezinhlelo zokusebenza zezindiza.

Umbuzo 3: Ingabe lawa ma-wafer afanele ukusetshenziswa kwe-laser ye-deep-UV?
Impela. I-Fused quartz inokudlulisa okuphezulu okufika ku-~185 nm, okwenza ifaneleke kakhulu kuma-DUV optics, kuma-lithography masks, kanye nezinhlelo ze-laser ze-excimer.

Q4: Ingabe uyakusekela ukwenziwa kwe-wafer ngokwezifiso?
Yebo. Sinikeza ukwenza ngokwezifiso okugcwele okuhlanganisa ububanzi, ukujiya, ikhwalithi yendawo, amafulethi/ama-notches, kanye nokudweba nge-laser, ngokusekelwe ezidingweni zakho ezithile zohlelo lokusebenza.

Mayelana NATHI

I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ekukhiqizweni, nasekuthengisweni kwengilazi ekhethekile ye-optical kanye nezinto ezintsha zekristalu. Imikhiqizo yethu ihlinzeka nge-optical electronics, i-consumer electronics, kanye nezempi. Sinikeza izingxenye ze-optical ze-Sapphire, izembozo zelensi yeselula, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kanye nama-semiconductor crystal wafers. Ngobuchwepheshe obunekhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungewona ojwayelekile, sihlose ukuba yibhizinisi elihamba phambili lezinto ze-optoelectronic tech.

I-Sapphire Wafer Engenalutho Ehlanzekile Kakhulu I-Raw Sapphire Substrate Yokucubungula 5