I-Gallium Nitride ku-Silicon wafer 4inch 6inch Tailored Si Substrate Orientation, Resistivity, kanye nezinketho zohlobo lwe-N/P
Izici
●I-Bandgap ebanzi:I-GaN (3.4 eV) ihlinzeka ngokuthuthuka okuphawulekayo ekusebenzeni kwe-high-frequency, amandla aphezulu, kanye nezinga lokushisa eliphezulu uma kuqhathaniswa ne-silicon yakudala, iyenze ifaneleke kumadivayisi kagesi nezikhulisi ze-RF.
●Umumo we-Si Substrate ngendlela oyifisayo:Khetha emimoyeni ehlukene ye-Si substrate efana ne-<111>, <100>, nokunye ukuze ufanise nezidingo ezithile zedivayisi.
●Ukumelana Nokwezifiso:Khetha phakathi kwezinketho ezihlukene zokumelana ne-Si, kusukela ku-semi-insulating ukuya ekumelaneni okuphezulu kanye nokumelana okuphansi ukuze uthuthukise ukusebenza kwedivayisi.
● Uhlobo lwe-Doping:Itholakala ngohlobo lwe-N noma i-P-doping ukuze ifane nezimfuneko zamadivayisi kagesi, ama-RF transistors, noma ama-LED.
● I-Voltage Yokuhlukana Okuphezulu:Amawafa e-GaN-on-Si ane-voltage ephezulu yokuphuka (afika ku-1200V), ewavumela ukuthi aphathe izinhlelo zokusebenza zamandla kagesi aphezulu.
●Isivinini Sokushintsha Okusheshayo:I-GaN inokuhamba kwama-electron aphezulu kanye nokulahlekelwa kokushintsha okuphansi kune-silicon, okwenza amawafa e-GaN-on-Si alungele amasekhethi anesivinini esikhulu.
●Ukusebenza Okushisayo Okuthuthukisiwe:Naphezu kokushisa okuphansi kwe-silicon, i-GaN-on-Si isanikeza ukuzinza okushisayo okuphakeme, ngokukhipha ukushisa okungcono kunamadivayisi we-silicon yendabuko.
Imininingwane Yezobuchwepheshe
Ipharamitha | Inani |
Usayizi we-Wafer | 4-intshi, 6-intshi |
I-Substrate Orientation | <111>, <100>, ngokwezifiso |
I-Resistivity | High-resistivity, Semi-insulating, Low-ukumelana |
Uhlobo lweDoping | Uhlobo lwe-N, uhlobo lwe-P |
Ukuqina Kwengqimba ye-GaN | 100nm – 5000nm (ngezifiso) |
I-AlGaN Barrier Layer | 24% - 28% Al (okujwayelekile 10-20 nm) |
Ukuhlukaniswa kwe-Voltage | 600V - 1200V |
I-electron Mobility | 2000 cm²/V·s |
Ukushintsha Imvamisa | Kufika ku-18 GHz |
I-Wafer Surface Roughness | I-RMS ~0.25 nm (AFM) |
I-GaN Sheet Resistance | 437.9 Ω·cm² |
Isamba se-Wafer Warp | < 25 µm (ubuningi) |
I-Thermal Conductivity | 1.3 – 2.1 W/cm·K |
Izinhlelo zokusebenza
Amandla kagesi: I-GaN-on-Si ilungele ama-electronics anamandla njengama-amplifiers, ama-converter, nama-inverters asetshenziswa ezinhlelweni zamandla avuselelekayo, izimoto zikagesi (EVs), kanye nemishini yezimboni. I-voltage yayo ephezulu yokuphuka kanye nokumelana okuphansi kuqinisekisa ukuguqulwa kwamandla okusebenzayo, ngisho nasezinhlelweni zamandla aphezulu.
I-RF kanye neMicrowave Communications: Amawafa e-GaN-on-Si anikezela ngamakhono efrikhwensi ephezulu, awenza afanelekele izikhulisamandla zamandla e-RF, ezokuxhumana ngesathelayithi, amasistimu e-radar, nobuchwepheshe be-5G. Ngejubane eliphezulu lokushintsha kanye nekhono lokusebenza kumafrikhwensi aphezulu (kufika ku18 GHz), amadivayisi we-GaN anikeza ukusebenza okuphezulu kulezi zinhlelo zokusebenza.
I-Automotive Electronics: I-GaN-on-Si isetshenziswa ezinhlelweni zamandla ezimoto, kufaka phakathiAmashaja angaphakathi ebhodini (OBCs)futhiIziguquli ze-DC-DC. Ikhono layo lokusebenza emazingeni okushisa aphezulu kanye nokumelana namazinga aphezulu kagesi kuyenza ifaneleke kahle ezinsizeni zezimoto zikagesi ezidinga ukuguqulwa kwamandla aqinile.
I-LED kanye ne-Optoelectronics: I-GaN iyinto yokuzikhethela ama-LED aluhlaza namhlophe. Ama-wafers e-GaN-on-Si asetshenziselwa ukukhiqiza izinhlelo zokukhanyisa ze-LED ezisebenza kahle kakhulu, ezinikeza ukusebenza okuhle kakhulu ekukhanyeni, ekuboniseni ubuchwepheshe, kanye nokuxhumana okubonakalayo.
Q&A
Q1: Iyini inzuzo ye-GaN ngaphezu kwe-silicon kumadivayisi kagesi?
A1:I-GaN ine-ai-bandgap ebanzi (3.4 eV)kune-silicon (1.1 eV), eyivumela ukuthi imelane nama-voltage aphezulu namazinga okushisa. Lesi sakhiwo senza i-GaN ikwazi ukuphatha izinhlelo zokusebenza zamandla aphezulu ngendlela ephumelela kakhudlwana, inciphisa ukulahleka kwamandla nokwandisa ukusebenza kwesistimu. I-GaN iphinde inikeze ngesivinini sokushintsha esisheshayo, esibalulekile kumadivayisi anemvamisa ephezulu njengama-amplifiers e-RF neziguquli zamandla.
Q2: Ngingakwazi yini ukwenza ngokwezifiso i-Si substrate orientation yesicelo sami?
A2:Yebo, sinikezacustomizable Si substrate orientationsnjenge<111>, <100>, nokunye ukuma kuye ngezidingo zedivayisi yakho. Ukuma kwe-Si substrate kudlala indima ebalulekile ekusebenzeni kwedivayisi, okuhlanganisa izici zikagesi, ukuziphatha okushisayo, nokuzinza kwemishini.
I-Q3: Yiziphi izinzuzo zokusebenzisa ama-wafers e-GaN-on-Si kuzinhlelo zokusebenza ze-high-frequency?
A3:Ama-wafers e-GaN-on-Si anikeza okungcono kakhuluukushintsha isivinini, okuvumela ukusebenza ngokushesha kumafrikhwensi aphezulu uma kuqhathaniswa ne-silicon. Lokhu kubenza balungeleRFfuthii-microwaveizicelo, kanye high-frequencyamadivaysi amandlanjengeAma-HEMTs(High Electron Mobility Transistors) kanyeAma-amplifiers e-RF. Ukuhamba kwama-electron aphezulu we-GaN nakho kuholela ekulahlekeni okuphansi kokushintsha kanye nokusebenza okuthuthukisiwe.
Q4: Yiziphi izinketho ze-doping ezitholakalayo zama-wafers e-GaN-on-Si?
A4:Sinikeza kokubiliN-uhlobofuthiUhlobo lwe-Pokukhethwa kukho kwe-doping, okuvame ukusetshenziselwa izinhlobo ezahlukene zamadivayisi we-semiconductor.I-N-uhlobo lwe-dopingilungeleamandla transistorsfuthiAma-amplifiers e-RF, ngenkathiP-uhlobo lwe-dopingivame ukusetshenziselwa amadivaysi e-optoelectronic afana nama-LED.
Isiphetho
I-Gallium Nitride yethu Eyenziwe Ngezifiso Ku-Silicon (GaN-on-Si) Wafers ihlinzeka ngesixazululo esifanelekile sezinhlelo zokusebenza ezinemvamisa ephezulu, amandla aphezulu, kanye nezinga eliphezulu lokushisa. Ngokuqondiswa kwe-Si substrate okwenziwa ngokwezifiso, ukumelana nohlobo lwe-N/P-uhlobo lwe-doping, lawa mawafa enzelwe ukuhlangabezana nezidingo ezithile zezimboni kusukela kugesi wamandla nezinhlelo zezimoto kuya kokuxhumana kwe-RF kanye nobuchwepheshe be-LED. Ngokusebenzisa izici eziphakeme ze-GaN nokuqina kwe-silicon, lawa mawafa anikeza ukusebenza okuthuthukisiwe, ukusebenza kahle, nokuqinisekisa okuzayo kwamadivayisi esizukulwane esilandelayo.
Umdwebo onemininingwane



