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Indlela ye-sapphire boule ingot crystal ky ekhulile

Indlela ye-sapphire boule ingot crystal ky ekhulile Isithombe Esifakiwe
  • Indlela ye-sapphire boule ingot crystal ky ekhulile
  • Indlela ye-sapphire boule ingot crystal ky ekhulile
  • Indlela ye-sapphire boule ingot crystal ky ekhulile
  • Indlela ye-sapphire boule ingot crystal ky ekhulile

Incazelo emfushane:

An i-sapphire boule ekhulileiyi-single-crystal sapphire ingot ekhiqizwa ngqo kusuka esithandweni sokukhulisa futhi inikezwa ngaphambi kokucutshungulwa kwesibili njengokuqondisa, ukusika, noma ukupholisha. Inikeza ubulukhuni obungavamile, ukungangeni kwamakhemikhali, ukuzinza okuphezulu kokushisa, kanye nokucaca okubanzi kokukhanya kusuka ku-UV kuya ku-IR. Lezi zakhiwo zenza kube yinto efanelekile yokuqala yokwenziwa phansi kwamafasitela, ama-wafer/ama-substrate, amalensi, kanye nezembozo zokuvikela. Ukusetshenziswa okuvamile kokugcina kufaka phakathi izingxenye ze-LED neze-laser, amafasitela e-infrared/abonakalayo, ubuso bewashi kanye nezinsimbi ezingagugi, kanye nezingxenye ze-RF, inzwa, namanye amadivayisi kagesi. Ama-Boules avame ukuhlukaniswa ngokuqondiswa kwekristalu, ububanzi/ubude, ukuhlukaniswa noma ubuningi besici, ukufana kombala, kanye nokufakwa, ngezinsizakalo zokuzikhethela ezitholakalayo zokuqondiswa nokusika ngokwezidingo zamakhasimende.


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    • Izici

    Ikhwalithi ye-Ingot

    usayizi we-ingot

    Isithombe se-Ingot

    Umdwebo Oningiliziwe

    i-sapphire ingot11
    i-sapphire ingot08
    njengoba i-sapphire ingot01 ikhulile

    Ukubuka konke

    A i-sapphire bouleiyikristalu eyodwa enkulu, ekhuliswe njenge-aluminium oxide (Al₂O₃) esebenza njenge-feedstock ephezulu yama-wafers e-sapphire, amafasitela akhanyayo, izingxenye ezingagugi, kanye nokusika amagugu.Ukuqina kwe-Mohs 9, ukuzinza okuhle kakhulu kokushisa(iphuzu lokuncibilika ~ 2050 °C), kanyeukucaca kwe-broadbandkusukela ku-UV kuya ku-mid-IR, i-sapphire iyinto esezingeni elifanele lapho ukuqina, ukuhlanzeka, kanye nekhwalithi yokukhanya kufanele kuhlale khona.

    Sihlinzeka ngama-sapphire boule angenambala futhi afakwe i-doped akhiqizwa ngezindlela zokukhula eziqinisekiswe yimboni, ezilungiselelwe kahleI-GaN/AlGaN epitaxy, i-optics enembile, futhiizingxenye zezimboni ezinokwethenjelwa okuphezulu.

    Kungani iSapphire Boule isuka kithi

    • Ikhwalithi yekristalu kuqala:ukucindezeleka kwangaphakathi okuphansi, okuqukethwe okuphansi kwebhamuza/i-striae, ukulawula okuqinile kokusikwa kwe-downstream kanye ne-epitaxy.

    • Ukuguquguquka kwenqubo:Izinketho zokukhula ze-KY/HEM/CZ/Verneuil zokulinganisela usayizi, ukucindezeleka, kanye nezindleko zesicelo sakho.

    • I-geometry ekwazi ukukhuliswa:Amabhola ayindilinga, anesimo sekharothi, noma amabhlogo anezicaba ezenziwe ngokwezifiso, ukwelashwa kwembewu/ukuphela, kanye nezindawo zokubhekisela.

    • Kulandeleka futhi kuyaphindaphindeka:amarekhodi e-batch, imibiko ye-metrology, kanye nezindlela zokwamukelwa ezihambisana ne-spec yakho.

    Ubuchwepheshe Bokukhula

    • I-KY (Kyropoulos):Amabhola amakhulu, angenawo umfutho ophansi; athandwa kakhulu kuma-wafers e-epi-grade kanye nama-optics lapho ukufana kwe-birefringence kubalulekile khona.

    • I-HEM (Indlela Yokushintshanisa Ukushisa):Ama-gradients okushisa amahle kakhulu kanye nokulawula ukucindezeleka; kukhanga ama-optics amakhulu kanye ne-feedstock ye-epi ye-premium.

    • I-CZ (Czochralski):Ukulawula okunamandla kokuqondiswa kanye nokuphindaphinda; ukukhetha okuhle kokusika njalo, okukhiqiza kakhulu.

    • I-Verneuil (Ukuhlanganiswa Kwelangabi):Isebenza kahle kakhulu, inamandla amakhulu; ifanelekela ama-optics ajwayelekile, izingxenye zemishini, kanye nama-preform ayigugu.

    Ukuqondiswa Kwekristalu, Ijiyometri kanye Nosayizi

    • Izindlela ezijwayelekile zokuqondisa: indiza ye-c (0001), indiza (11-20), indiza engu-r (1-102), indiza ye-m (10-10); izindiza ezenziwe ngokwezifiso ziyatholakala.

    • Ukunemba kokuqondiswa:≤ ±0.1° nguLaue/XRD (kuqiniswe kakhulu uma kuceliwe).

    • Izimo:Amabhola ayisilinda noma anjengekaroti, amabhlogo ayisikwele/angunxande, kanye nezinduku.

    • Imvilophu yosayizi ojwayelekile: Ø30–220 mm, ubude 50–400 mm(okukhulu/okuncane kwenziwe ngokwe-oda).

    • Izici Zokuphela/Ireferensi:ukucutshungulwa kobuso bembewu/bokugcina, amafulethi/ama-notches okubhekisela kuwo, kanye ne-fiducials yokuqondanisa phansi komfula.

    Izakhiwo zezinto ezibonakalayo nezokubona

    • Ukwakheka:I-Al₂O₃ yekristalu elilodwa, ubumsulwa bezinto zokusetshenziswa ≥ 99.99%.

    • Ubuningi:~3.98 g/cm³

    • Ubulukhuni:Ama-Mohs angu-9

    • Inkomba yokubukeza (589 nm): nₒ≈ 1.768,nₑ≈ 1.760 (i-uniaxial engemihle; Δn ≈ 0.008)

    • Iwindi lokudlulisa: I-UV kuya ku-~5 µm(kuncike ekujiyeni nasekungcoleni)

    • Ukushisa (300 K):~25 W·m⁻¹·K⁻¹

    • I-CTE (20–300 °C):~5–8 × 10⁻⁶ /K (kuncike ekuqondeni)

    • I-modulus kaYoung:~345 GPa

    • Ugesi:Ivikela kakhulu (ukumelana nomthamo ngokuvamile ≥ 10¹⁴ Ω·cm)

    Amabanga kanye nezinketho

    • Ibanga le-Epitaxy:Amabhamuza/ama-striae aphansi kakhulu kanye ne-birefringence yokucindezeleka encishisiwe yama-wafer e-GaN/AlGaN MOCVD ane-high-vout (amasentimitha angu-2–8 nangaphezulu ngezansi).

    • Ibanga Lokukhanya:Ukudluliselwa kwangaphakathi okuphezulu kanye nokulingana kwamafasitela, amalensi, kanye nezimbobo zokubukwa ze-IR.

    • Ibanga Elijwayelekile/Lomshini:Isitoreji esiqinile, esingabizi kakhulu samakristalu ewashi, izinkinobho, izingxenye ezigugile, kanye nezindawo zokugcina.

    • Ukuxuba/Umbala:

      • Akukho mbala(okujwayelekile)
        Cr:Al₂O₃(irubhi),I-Ti:Al₂O₃(Ti:sapphire) preforms
        Amanye ama-chromophore (Fe/Ti) uma eceliwe

    Izicelo

    I-semiconductor: Ama-substrate ama-LED e-GaN, ama-micro-LED, ama-HEMT anamandla, amadivayisi e-RF (i-feedstock ye-sapphire wafer).

    Ama-Optics nama-Photonics: Amafasitela anokushisa okuphezulu/acindezelayo, izindawo zokubukwa ze-IR, amafasitela ambozwe nge-laser, izimbozo zokuthola.

    Izinto Ezigqokwayo Nezisetshenziswayo: Amakristalu ewashi, izembozo zelensi yekhamera, izembozo zezinzwa zeminwe, izingxenye zangaphandle zekhwalithi ephezulu.

    Izimboni kanye Nezindiza: Ama-nozzle, izihlalo zama-valve, amasongo okuvala, amafasitela avikelayo, kanye nama-port okubuka.

    Ukukhula kweLaser/Crystal: I-Ti:saphire kanye ne-ruby hosts ezivela kuma-boules afakwe i-doped.

    Idatha Esheshayo (Ejwayelekile, ukuze ibhekiselwe kuyo)

    Ipharamitha Inani (Elijwayelekile)
    Ukwakheka I-Al₂O₃ enekristalu elilodwa (ubumsulwa obungu-≥ 99.99%)
    Ukuqondiswa c / a / r / m (ngokwezifiso uma ucela)
    Inkomba @ 589 nm nₒ≈ 1.768,nₑ≈ 1.760
    Ibanga Lokudlulisa ~0.2–5 µm (kuncike ekujiyeni)
    Ukuqhuba Okushisayo ~25 W·m⁻¹·K⁻¹ (300 K)
    I-CTE (20–300 °C) ~5–8 × 10⁻⁶/K
    I-Modulus kaYoung ~345 GPa
    Ubuningi ~3.98 g/cm³
    Ubulukhuni Ama-Mohs angu-9
    Ugesi Ukuvikela; ukumelana nomthamo ≥ 10¹⁴ Ω·cm

     

    Inqubo Yokukhiqiza I-Sapphire Wafer

    1. Ukukhula Kwekristalu
      I-alumina ehlanzekile kakhulu (i-Al₂O₃) iyancibilikiswa bese ikhuliswa ibe yi-ingot eyodwa yekristalu le-sapphire kusetshenziswa i-I-Kyropoulos (KY) or IsiCzochralski (CZ)indlela.

    2. Ukucutshungulwa kwe-Ingot
      I-ingot iklanywa ngomshini ibe nesimo esijwayelekile — ukusika, ukubumba ububanzi, kanye nokucutshungulwa kobuso obuphelele.

    3. Ukusika
      I-sapphire ingot isikwa ibe yizicucu ezincane kusetshenziswa i-isaha lensimbi yedayimane.

    4. Ukugoqa Okunezinhlangothi Ezimbili
      Izinhlangothi zombili ze-wafer zihambisana ukuze kususwe amamaki esaha futhi kufinyelelwe ukujiya okufanayo.

    5. Ukufakwa kwe-Annealing
      Ama-wafer alungiswa ngokushisa ukuzekhipha ukucindezeleka kwangaphakathifuthi kuthuthukiswe ikhwalithi yekristalu kanye nokucaca kwayo.

    6. Ukugaya Umphetho
      Amaphethelo e-wafer ayagobileka ukuze kuvinjelwe ukuqhekeka nokuqhekeka ngesikhathi sokucutshungulwa okuqhubekayo.

    7. Ukufaka
      Ama-wafer afakwa ezithwalweni noma ezibambi ukuze kupholishwe futhi kuhlolwe ngokunembile.

    8. I-DMP (Ukupholisha Okwenziwa Ngezinhlangothi Ezimbili)
      Izindawo ezicwebezelayo zipholishwa ngomshini ukuze kuthuthukiswe ukushelela komphezulu.

    9. I-CMP (Ukupholisha Kwemishini Yamakhemikhali)
      Isinyathelo sokupholisha esihle esihlanganisa izenzo zamakhemikhali nezemishini ukudalaubuso obufana nesibuko.

    10. Ukuhlolwa Okubonakalayo
      Abasebenzi noma izinhlelo ezizenzakalelayo zihlola amaphutha abonakalayo ebusweni.

    11. Ukuhlolwa Kokuthamba
      Ukufana kokusicaba nokujiya kulinganiswa ukuqinisekisa ukunemba kobukhulu.

    12. Ukuhlanzwa kwe-RCA
      Ukuhlanza okujwayelekile kwamakhemikhali kususa ukungcola okungokwemvelo, okwensimbi, kanye nezinhlayiya.

    13. Ukuhlanza i-Scrubber
      Ukuhlikihla ngomshini kususa izinhlayiya ezincane ezisele.

    14. Ukuhlolwa Okuphelele Kwesici Somphezulu
      Ukuhlolwa okuzenzakalelayo kokukhanya kuthola amaphutha amancane njengokuklwebheka, imigodi, noma ukungcola.

     

    1. Ukukhula Kwekristalu
      I-alumina ehlanzekile kakhulu (i-Al₂O₃) iyancibilikiswa bese ikhuliswa ibe yi-ingot eyodwa yekristalu le-sapphire kusetshenziswa i-I-Kyropoulos (KY) or IsiCzochralski (CZ)indlela.

    2. Ukucutshungulwa kwe-Ingot
      I-ingot iklanywa ngomshini ibe nesimo esijwayelekile — ukusika, ukubumba ububanzi, kanye nokucutshungulwa kobuso obuphelele.

    3. Ukusika
      I-sapphire ingot isikwa ibe yizicucu ezincane kusetshenziswa i-isaha lensimbi yedayimane.

    4. Ukugoqa Okunezinhlangothi Ezimbili
      Izinhlangothi zombili ze-wafer zihambisana ukuze kususwe amamaki esaha futhi kufinyelelwe ukujiya okufanayo.

    5. Ukufakwa kwe-Annealing
      Ama-wafer alungiswa ngokushisa ukuzekhipha ukucindezeleka kwangaphakathifuthi kuthuthukiswe ikhwalithi yekristalu kanye nokucaca kwayo.

    6. Ukugaya Umphetho
      Amaphethelo e-wafer ayagobileka ukuze kuvinjelwe ukuqhekeka nokuqhekeka ngesikhathi sokucutshungulwa okuqhubekayo.

    7. Ukufaka
      Ama-wafer afakwa ezithwalweni noma ezibambi ukuze kupholishwe futhi kuhlolwe ngokunembile.

    8. I-DMP (Ukupholisha Okwenziwa Ngezinhlangothi Ezimbili)
      Izindawo ezicwebezelayo zipholishwa ngomshini ukuze kuthuthukiswe ukushelela komphezulu.

    9. I-CMP (Ukupholisha Kwemishini Yamakhemikhali)
      Isinyathelo sokupholisha esihle esihlanganisa izenzo zamakhemikhali nezemishini ukudalaubuso obufana nesibuko.

    10. Ukuhlolwa Okubonakalayo
      Abasebenzi noma izinhlelo ezizenzakalelayo zihlola amaphutha abonakalayo ebusweni.

    11. Ukuhlolwa Kokuthamba
      Ukufana kokusicaba nokujiya kulinganiswa ukuqinisekisa ukunemba kobukhulu.

    12. Ukuhlanzwa kwe-RCA
      Ukuhlanza okujwayelekile kwamakhemikhali kususa ukungcola okungokwemvelo, okwensimbi, kanye nezinhlayiya.

    13. Ukuhlanza i-Scrubber
      Ukuhlikihla ngomshini kususa izinhlayiya ezincane ezisele.

    14. Ukuhlolwa Okuphelele Kwesici Somphezulu
      Ukuhlolwa okuzenzakalelayo kokukhanya kuthola amaphutha amancane njengokuklwebheka, imigodi, noma ukungcola.

    I-Sapphire Boule (i-Single-Crystal Al₂O₃) — Imibuzo Evame Ukubuzwa

    Umbuzo 1: Iyini i-sapphire boule?
    A: Ikristalu elilodwa le-aluminium oxide (Al₂O₃) elikhuliswe njengoba likhula. Liyi-“ingot” esetshenziswa phezulu ukwenza ama-wafer e-sapphire, amafasitela akhanyayo, kanye nezingxenye eziguga kakhulu.

    Umbuzo 2: Ibhola lihlobana kanjani nama-wafer noma amafasitela?
    A: Ibhola liqondiswe → lisikiwe → ligobile → lipholishiwe ukuze kukhiqizwe ama-wafer e-epi-grade noma izingxenye ze-optical/mechanical. Ukufana kwebhola elivela kulo kuthinta kakhulu isivuno esingezansi.

    UMBUZO 3: Yiziphi izindlela zokukhulisa ezitholakalayo futhi zihluke kanjani?
    A: I-KY (i-Kyropoulos)futhiI-HEMisivuno esikhulu,ukucindezeleka okuphansiamabhola—akhethwa kakhulu kuma-epitaxy kanye nama-optics aphezulu.I-CZ (Czochralski)inikeza okuhle kakhuluukulawula ukuqondiswakanye nokuvumelana kwenani elikhulu.I-Verneuil (ukuhlanganiswa komlilo) is engabizi kakhulukwe-optics ejwayelekile kanye nama-preform ayigugu.

    Umbuzo 4: Yiziphi izindlela ozinikezayo? Yikuphi ukunemba okuvamile?
    A: indiza i-c (0001), indiza i-a (11-20), indiza i-r (1-102), indiza i-m (10-10), kanye namasiko. Ukunemba kokuqondiswa ngokuvamile≤ ±0.1°kuqinisekiswe yi-Laue/XRD (kuqiniswa kakhulu uma kuceliwe).

  • Okwedlule:
  • Olandelayo:

    • Amakristalu Ebanga Lokukhanya Anokuphathwa Kwezicucu Ezingaphakathi Kwendlu Okunomthwalo Wemfanelo

    Zonke izikebhe zethu ze-sapphire zenzelweibanga lokukhanya, ukuqinisekisa ukudluliselwa okuphezulu, ukulingana okuqinile, kanye nobuningi obuphansi bokufakwa/amabhamuza kanye nokuhlukaniswa kwe-optics kanye ne-electronics ezidingayo. Silawula ukuqondiswa kwekristalu kanye nokugoba kusuka embewini kuya ebholeni, ngokulandelela okugcwele kwenqwaba kanye nokuvumelana phakathi kokugijima. Ubukhulu, ukuqondiswa (c-, a-, r-plane), kanye nokubekezelelana kungenziwa ngezifiso ngokwezidingo zakho zokusika/ukupholisha ezingezansi.
    Okubalulekile, noma yikuphi ukwaziswa okungahlangabezani nencazelokucutshungulwe ngokuphelele ngaphakathingokusebenzisa indlela yokusebenza evaliwe—ehlungiwe, ephinde isetshenziswe, futhi ilahlwe ngendlela efanele—ukuze uthole ikhwalithi ethembekile ngaphandle kokuphatha noma ukuthobela imithetho. Le ndlela inciphisa ubungozi, ifinyeza izikhathi zokuhola, futhi isekele imigomo yakho yokuzinza.

    Ibhendi Yesisindo Se-Ingot (kg) 2″ 4″ 6″ 8″ 12″ Amanothi
    10–30 Kuyafaneleka Kuyafaneleka Kunqunyelwe/kungenzeka Akujwayelekile Akusetshenzisiwe Ukusikwa okunefomethi encane; 6″ kuncike kububanzi/ubude obusebenzisekayo.
    30–80 Kuyafaneleka Kuyafaneleka Kuyafaneleka Kunqunyelwe/kungenzeka Akujwayelekile Usizo olubanzi; izindawo zokuhlola ezingama-intshi angu-8 ngezikhathi ezithile.
    80–150 Kuyafaneleka Kuyafaneleka Kuyafaneleka Kuyafaneleka Akujwayelekile Ibhalansi enhle yokukhiqiza okungu-6–8″.
    150–250 Kuyafaneleka Kuyafaneleka Kuyafaneleka Kuyafaneleka Okulinganiselwe/Ucwaningo nokuthuthukiswa Isekela izivivinyo zokuqala ezingu-12″ ngemininingwane eqinile.
    250–300 Kuyafaneleka Kuyafaneleka Kuyafaneleka Kuyafaneleka Kunqunyelwe/kucacisiwe ngokuqinile Ivolumu ephezulu engu-8″; ukugijima okukhethiwe okungu-12″.
    >300 Kuyafaneleka Kuyafaneleka Kuyafaneleka Kuyafaneleka Kuyafaneleka Isikali se-Frontier; 12″ kungenzeka ngokulingana okuqinile/ukulawula ukukhiqizwa.

     

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