I-wafer yebanga le-8inch SiC Production 4H-N SiC substrate

Incazelo emfushane:

Ama-substrates e-SiC angu-8 inch asetshenziswa kumishini kagesi enamandla amakhulu, njengama-MOSFET amandla (Metal Oxide Semiconductor Field Effect Transistors), ama-Schottky diode namanye ama-semiconductor amandla.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Ithebula elilandelayo libonisa ukucaciswa kwama-wafers wethu we-8inch SiC:

8inch N-uhlobo lweSiC DSP Specs
Inombolo	Into	Iyunithi	Ukukhiqiza	Ucwaningo	Dummy
1:amapharamitha
1.1	i-polytype	--	4H	4H	4H
1.2	ukuma komhlaba	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Ipharamitha kagesi
2.1	i-dopant	--	n-uhlobo lweNitrojeni	n-uhlobo lweNitrojeni	n-uhlobo lweNitrojeni
2.2	ukumelana	ohm ·cm	0.015~0.025	0.01~0.03	NA
3:Ipharamitha yemishini
3.1	ububanzi	mm	200±0.2	200±0.2	200±0.2
3.2	ukujiya	μm	500±25	500±25	500±25
3.3	I-Notch orientation	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Ukujula Kwenotshi	mm	1~1.5	1~1.5	1~1.5
3.5	I-LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	I-TTV	μm	≤10	≤10	≤15
3.7	Khothama	μm	-25 ~ 25	- 45-45	- 65-65
3.8	I-Wap	μm	≤30	≤50	≤70
3.9	I-AFM	nm	I-Ra≤0.2	I-Ra≤0.2	I-Ra≤0.2
4:Isakhiwo
4.1	ukuminyana kwe-micropipe	eya cm2	≤2	≤10	≤50
4.2	okuqukethwe kwensimbi	ama-athomu/cm2	≤1E11	≤1E11	NA
4.3	I-TSD	eya cm2	≤500	≤1000	NA
4.4	I-BPD	eya cm2	≤2000	≤5000	NA
4.5	I-TED	eya cm2	≤7000	≤10000	NA
5.Ikhwalithi yangaphambili
5.1	ngaphambili	--	Si	Si	Si
5.2	ukuphela kwendawo	--	I-Si-face CMP	I-Si-face CMP	I-Si-face CMP
5.3	izinhlayiyana	i/isinkwa	≤100(usayizi≥0.3μm)	NA	NA
5.4	ukunwaya	i/isinkwa	≤5, Ubude Obuphelele≤200mm	NA	NA
5.5	Umphetho ama-chips/ama-indenti/imifantu/amabala/ukungcola	--	Lutho	Lutho	NA
5.6	Izindawo ze-Polytype	--	Lutho	Indawo ≤10%	Indawo ≤30%
5.7	ukumaka ngaphambili	--	Lutho	Lutho	Lutho
6:Ikhwalithi yangemuva
6.1	buyela emuva	--	I-C-face MP	I-C-face MP	I-C-face MP
6.2	ukunwaya	mm	NA	NA	NA
6.3	Ingemuva elinamaphutha onqenqemeni ama-chips/ama-indenti	--	Lutho	Lutho	NA
6.4	Ukuqina kweqolo	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Ukumaka emuva	--	Inothi	Inothi	Inothi
7 :uqe
7.1	umphetho	--	I-Chamfer	I-Chamfer	I-Chamfer
8:Iphakheji
8.1	ukupakisha	--	I-Epi ilungile nge-vacuum ukupakisha	I-Epi ilungile nge-vacuum ukupakisha	I-Epi ilungile nge-vacuum ukupakisha
8.2	ukupakisha	--	I-Multi-wafer ukupakishwa kwekhasethi	I-Multi-wafer ukupakishwa kwekhasethi	I-Multi-wafer ukupakishwa kwekhasethi