I-wafer ye-SiC Epitaxiy engu-6inch N/P yamukelekile ngokwezifiso

Inqubo yokulungiselela i-silicon carbide epitaxial wafer iyindlela esebenzisa ubuchwepheshe be-Chemical Vapor Deposition (CVD). Lokhu okulandelayo yizimiso zobuchwepheshe ezifanele kanye nezinyathelo zenqubo yokulungiselela:

Isimiso sobuchwepheshe:

Ukususwa Komusi Wekhemikhali: Uma kusetshenziswa igesi yezinto ezingavuthiwe esigabeni segesi, ngaphansi kwezimo ezithile zokusabela, iyabola bese ifakwa ku-substrate ukuze kwakhiwe ifilimu elincane elifunekayo.

Ukusabela kwesigaba segesi: Ngokusebenzisa i-pyrolysis noma ukusabela kokuqhekeka, amagesi ahlukahlukene ezinto eziluhlaza esigabeni segesi ashintshwa ngamakhemikhali ekamelweni lokusabela.

Izinyathelo zenqubo yokulungiselela:

Ukwelashwa kwe-substrate: I-substrate ihlanzwa futhi iphathwe ngaphambi kokusetshenziswa ukuqinisekisa ikhwalithi kanye nokucwebezela kwe-epitaxial wafer.

Ukulungisa iphutha legumbi lokusabela: lungisa izinga lokushisa, ingcindezi kanye nesivinini sokugeleza kwegumbi lokusabela kanye nezinye izinhlaka ukuqinisekisa ukuzinza nokulawula izimo zokusabela.

Ukuhlinzekwa kwezinto ezingavuthiwe: hlinzeka ngezinto ezingavuthiwe zegesi ezidingekayo ekamelweni lokusabela, ukuxuba nokulawula izinga lokugeleza njengoba kudingeka.

Inqubo yokusabela: Ngokufudumeza igumbi lokusabela, i-feedstock yegesi idlula ekusabeleni kwamakhemikhali ekamelweni ukuze ikhiqize idiphozithi oyifunayo, okungukuthi ifilimu ye-silicon carbide.

Ukupholisa nokukhipha: Ekupheleni kokusabela, izinga lokushisa liyehliswa kancane kancane ukuze liphole futhi liqinise amadiphozithi ekamelweni lokusabela.

Ukufuthwa kanye nokucutshungulwa kwe-epitaxial wafer: i-epitaxial wafer efakiwe iyafuthwa futhi icutshungulwe ukuze kuthuthukiswe izakhiwo zayo zikagesi nezokukhanya.

Izinyathelo nezimo ezithile zenqubo yokulungiselela i-silicon carbide epitaxial wafer zingahluka kuye ngemishini ethile nezidingo. Lokhu okungenhla kumane kuyindlela ejwayelekile yokugeleza kwenqubo kanye nesimiso, ukusebenza okuthile kudinga ukulungiswa nokulungiswa ngokwesimo sangempela.