6inch SiC Epitaxiy wafer N/P uhlobo lwamukeleka ngendlela oyifisayo
Inqubo yokulungiselela i-silicon carbide epitaxial wafer iyindlela esebenzisa ubuchwepheshe beChemical Vapor Deposition (CVD).Okulandelayo yizimiso zobuchwepheshe ezifanele nezinyathelo zenqubo yokulungiselela:
Isimiso sobuchwepheshe:
I-Chemical Vapor Deposition: Kusetshenziswa igesi yezinto ezingavuthiwe esigabeni segesi, ngaphansi kwezimo ezithile zokusabela, iyabola bese ifakwa ku-substrate ukuze kwakhe ifilimu elincanyana elifunekayo.
Ukusabela kwesigaba segesi: Ngokusebenzisa i-pyrolysis noma ukusabela kokuqhekeka, amagesi ahlukahlukene wezinto ezingavuthiwe esigabeni segesi ashintshwa ngamakhemikhali egumbini lokuphendula.
Izinyathelo zokulungiselela:
Ukwelashwa kwe-substrate: I-substrate ingaphansi kokuhlanzwa kwendawo kanye nokwelashwa kwangaphambili ukuze kuqinisekiswe ikhwalithi kanye nobukristalu be-wafer ye-epitaxial.
Ukulungisa iphutha legumbi lokusabela: lungisa izinga lokushisa, ingcindezi kanye nezinga lokugeleza kwegumbi lokusabela kanye neminye imingcele ukuze uqinisekise ukuzinza nokulawula izimo zokusabela.
Ukunikezwa kwempahla eluhlaza: hlinzeka ngezinto ezingavuthiwe zegesi ezidingekayo ekamelweni lokusabela, ukuxuba nokulawula izinga lokugeleza njengoba kudingeka.
Inqubo yokusabela: Ngokushisisa igumbi lokusabela, i-gaseous feedstock ibhekana nokusabela kwamakhemikhali ekamelweni ukuze kukhiqizwe idiphozi oyifunayo, okungukuthi ifilimu ye-silicon carbide.
Ukupholisa nokuthulula: Ekupheleni kokusabela, izinga lokushisa liyehliswa kancane kancane ukuze liphole futhi liqinise amadiphozithi egunjini lokusabela.
I-Epitaxial wafer annealing and post-processing: i-wafer ye-epitaxial ediphozithiwe iyabanjwa bese icutshungulwa ukuze kuthuthukiswe izici zayo zikagesi nezokubonwayo.
Izinyathelo ezithile nezimo zenqubo yokulungiselela i-silicon carbide epitaxial wafer ingahluka kuye ngemishini ethile kanye nezidingo.Lokhu okungenhla kuwukugeleza kwenqubo evamile kuphela kanye nesimiso, ukusebenza okuqondile kudinga ukulungiswa futhi kulungiselelwe ngokuvumelana nesimo sangempela.
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