I-Substrate ye-Sapphire Enephethini engu-2 intshi engu-4 intshi engu-6 intshi (i-PSS) lapho kutshalwa khona izinto ze-GaN ezingasetshenziswa ekukhanyiseni kwe-LED

Incazelo emfushane:

I-substrate ye-sapphire enephethini (i-PSS) iyimaski yokuqopha okomile ku-substrate ye-sapphire, imaski iqoshwa ngephethini ngenqubo ejwayelekile ye-lithography, bese i-sapphire iqoshwa ngobuchwepheshe be-ICP etching, bese imaski isuswa, bese ekugcineni kukhuliswa izinto ze-GaN kuyo, ukuze i-epitaxy ende yezinto ze-GaN ibe yi-epitaxy evundlile. Le nqubo ihilela izinyathelo eziningana ezifana nokugqoka kwe-photoresist, ukuvezwa kwesinyathelo, ukuthuthukisa iphethini yokuvezwa, ukukhishwa okomile kwe-ICP kanye nokuhlanza.


Izici

Izici eziyinhloko

1. Izici zesakhiwo:
Ubuso be-PSS bunekhoni ehlelekile noma iphethini eliyindilinga elingunxantathu lapho ukuma, usayizi kanye nokusatshalaliswa kungalawulwa ngokulungisa amapharamitha enqubo yokuqopha.
Lezi zakhiwo zezithombe zisiza ekushintsheni indlela yokusabalala kokukhanya futhi zinciphise ukubonakaliswa okuphelele kokukhanya, ngaleyo ndlela zithuthukise ukusebenza kahle kokukhishwa kokukhanya.

2. Izici zezinto:
I-PSS isebenzisa i-sapphire esezingeni eliphezulu njengezinto ezisetshenziswayo, ezinezici zobulukhuni obuphezulu, ukuqhuba okuphezulu kokushisa, ukuzinza okuhle kwamakhemikhali kanye nokubonakala okubonakalayo.
Lezi zici zivumela i-PSS ukuthi imelane nezimo ezinzima njengokushisa okuphezulu kanye nokucindezela ngenkathi igcina ukusebenza okuhle kakhulu kokukhanya.

3. Ukusebenza kwe-Optical:
Ngokushintsha ukuhlakazeka okuningi endaweni ehlangana ne-GaN kanye ne-sapphire substrate, i-PSS yenza ama-photon abonakala ngokuphelele ngaphakathi kwengqimba ye-GaN abe nethuba lokuphuma kwi-sapphire substrate.
Lesi sici sithuthukisa kakhulu ukusebenza kahle kokukhipha ukukhanya kwe-LED futhi sithuthukisa amandla okukhanya kwe-LED.

4. Izici zenqubo:
Inqubo yokukhiqiza ye-PSS iyinkimbinkimbi kakhulu, ihilela izinyathelo eziningi ezifana ne-lithography kanye ne-etching, futhi idinga imishini enembile kakhulu kanye nokulawulwa kwenqubo.
Kodwa-ke, ngokuthuthuka okuqhubekayo kobuchwepheshe kanye nokunciphisa izindleko, inqubo yokukhiqiza ye-PSS ithuthukiswa kancane kancane futhi ithuthukiswa.

Inzuzo eyinhloko

1. Thuthukisa ukusebenza kahle kokukhipha ukukhanya: I-PSS ithuthukisa kakhulu ukusebenza kahle kokukhipha ukukhanya kwe-LED ngokushintsha indlela yokusabalalisa ukukhanya nokunciphisa ukubonakaliswa okuphelele.

2. Ukwandisa isikhathi sokuphila kwe-LED: I-PSS inganciphisa ubuningi bokuhlukaniswa kwezinto ze-epitaxial ze-GaN, ngaleyo ndlela inciphise ukuhlanganiswa okungasebenzisi imisebe kanye nomsinga wokuvuza obuyela emuva esifundeni esisebenzayo, yandisa isikhathi sokuphila kwe-LED.

3. Thuthukisa ukukhanya kwe-LED: Ngenxa yokuthuthukiswa kokusebenza kahle kokukhipha ukukhanya kanye nokwandiswa kokuphila kwe-LED, ukuqina kokukhanya kwe-LED ku-PSS kukhuliswa kakhulu.

4. Nciphisa izindleko zokukhiqiza: Nakuba inqubo yokukhiqiza ye-PSS iyinkimbinkimbi kakhulu, ingathuthukisa kakhulu ukusebenza kahle okukhanyayo kanye nokuphila kwe-LED, ngaleyo ndlela inciphise izindleko zokukhiqiza ngezinga elithile futhi ithuthukise ukuncintisana komkhiqizo.

Izindawo eziyinhloko zokusetshenziswa

1. Ukukhanya kwe-LED: I-PSS njengezinto ezisetshenziswayo zama-chip e-LED, ingathuthukisa kakhulu ukusebenza kahle okukhanyayo kanye nokuphila kwe-LED.
Emkhakheni wokukhanyisa nge-LED, i-PSS isetshenziswa kabanzi emikhiqizweni ehlukahlukene yokukhanyisa, njengezibani zasemgwaqweni, izibani zetafula, izibani zezimoto njalo njalo.

2. Amadivayisi e-semiconductor: Ngaphezu kokukhanyisa kwe-LED, i-PSS ingasetshenziswa futhi ukukhiqiza amanye amadivayisi e-semiconductor, njengezitholi zokukhanya, ama-laser, njll. Lawa madivayisi anezinhlelo zokusebenza eziningi kwezokuxhumana, kwezokwelapha, kwezempi nakweminye imikhakha.

3. Ukuhlanganiswa kwe-Optoelectronic: Izakhiwo zokukhanya kanye nokuqina kwe-PSS kuyenza ibe ngenye yezinto ezifanelekile emkhakheni wokuhlanganiswa kwe-optoelectronic. Ekuhlanganisweni kwe-optoelectronic, i-PSS ingasetshenziswa ukwenza ama-waveguides optical, ama-optical switch kanye nezinye izingxenye ukuze kufezwe ukudluliswa kanye nokucutshungulwa kwezimpawu zokukhanya.

Amapharamitha obuchwepheshe

Into I-Substrate ye-Sapphire Enephethini (2 ~ 6inch)
Ububanzi 50.8 ± 0.1 mm 100.0 ± 0.2 mm 150.0 ± 0.3 mm
Ubukhulu 430 ± 25μm 650 ± 25μm 1000 ± 25μm
Ukuqondiswa Komphezulu Indiza engu-C (0001) ekhoneni elingaphandle kwe-M-axis (10-10) 0.2 ± 0.1°
Indiza engu-C (0001) engaphandle kwe-engela ebheke ku-A-axis (11-20) 0 ± 0.1°
Ukuqondiswa Okuyisisekelo Okuyisicaba Indiza i-A (11-20) ± 1.0°
Ubude Obuphansi Obuyinhloko 16.0 ± 1.0 mm 30.0 ± 1.0 mm 47.5 ± 2.0 mm
Indiza engu-R 9:00
Ukuqeda Okungaphambili Kufakwe amaphethini
Ukuqeda Okungaphezulu Kwangemuva I-SSP: Ecwebezelisiwe kahle, i-Ra=0.8-1.2um; i-DSP: Epi-polished, i-Ra<0.3nm
Uphawu lwe-Laser Uhlangothi olungemuva
I-TTV ≤8μm ≤10μm ≤20μm
UKUGOBHOZA ≤10μm ≤15μm ≤25μm
I-WARP ≤12μm ≤20μm ≤30μm
Ukukhishwa Komphetho ≤2 mm
Ukucaciswa Kwephethini Isakhiwo Somumo I-Dome, Ikhoni, Iphiramidi
Ukuphakama Kwephethini 1.6~1.8μm
Ububanzi bephethini 2.75~2.85μm
Isikhala Sephethini 0.1 ~ 0.3μm

I-XKH igxile ekuthuthukisweni, ekukhiqizweni nasekuthengisweni kwe-patterned sapphire substrate (PSS), futhi izibophezele ekuhlinzekeni imikhiqizo ye-PSS esezingeni eliphezulu, esebenza kahle kakhulu kumakhasimende emhlabeni jikelele. I-XKH inobuchwepheshe bokukhiqiza obuthuthukisiwe kanye nethimba lobuchwepheshe lochwepheshe, elingenza ngezifiso imikhiqizo ye-PSS ngezincazelo ezahlukene kanye nezakhiwo zamaphethini ezahlukene ngokwezidingo zamakhasimende. Ngesikhathi esifanayo, i-XKH inaka ikhwalithi yomkhiqizo kanye nekhwalithi yesevisi, futhi izibophezele ekuhlinzekeni amakhasimende ngohlu oluphelele lokusekelwa kwezobuchwepheshe kanye nezixazululo. Emkhakheni we-PSS, i-XKH iqoqe ulwazi olucebile kanye nezinzuzo, futhi ibheke phambili ekusebenzeni ndawonye nabalingani bomhlaba wonke ukukhuthaza ngokubambisana intuthuko entsha yokukhanyisa kwe-LED, amadivayisi e-semiconductor kanye neminye imboni.

Umdwebo Oningiliziwe

I-Substrate ye-Sapphire Enephethini (PSS) 6
I-Substrate ye-Sapphire Enephethini (i-PSS) 5
I-Substrate ye-Sapphire Enephethini (i-PSS) 4

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