2 intshi 4 inch 6 inch Patterned Sapphire Substrate (PSS) lapho kutshalwe khona impahla ye-GaN engasetshenziselwa ukukhanyisa kwe-LED
Izici eziyinhloko
1. Izici zesakhiwo:
Indawo ye-PSS inekhoni ehlelekile noma iphethini yekhonikhali engunxantathu umumo wayo, usayizi nokusabalalisa kungalawuleka ngokulungisa amapharamitha enqubo yokushumeka.
Lezi zakhiwo zezithombe zisiza ukushintsha indlela yokukhanya yokusabalalisa futhi zinciphise ukubonakaliswa okuphelele kokukhanya, ngaleyo ndlela kuthuthukiswe ukusebenza kahle kokukhipha ukukhanya.
2. Izici zezinto ezibonakalayo:
I-PSS isebenzisa isafire yekhwalithi ephezulu njenge-substrate material, enezici zokuqina okuphezulu, ukuqhutshwa kokushisa okuphezulu, ukuqina okuhle kwamakhemikhali kanye nokubonakala kwe-optical.
Lezi zici zivumela i-PSS ukuthi imelane nezimo ezinzima ezifana namazinga okushisa aphezulu nezingcindezi kuyilapho igcina ukusebenza okuhle kakhulu kokubona.
3. Ukusebenza kwamehlo:
Ngokushintsha ukuhlakazeka okuningi kusixhumi esibonakalayo phakathi kwe-GaN ne-sapphire substrate, i-PSS yenza ama-photon abonakala ngokuphelele ngaphakathi kwesendlalelo se-GaN abe nethuba lokuphuma ku-sapphire substrate.
Lesi sici sithuthukisa kakhulu ukusebenza kahle kokukhipha ukukhanya kwe-LED futhi sithuthukisa ukushuba okukhanyayo kwe-LED.
4. Izici zenqubo:
Inqubo yokukhiqiza ye-PSS iyinkimbinkimbi ngokuqhathaniswa, ehlanganisa izinyathelo eziningi ezifana ne-lithography kanye ne-etching, futhi idinga okokusebenza okunembayo okuphezulu nokulawulwa kwenqubo.
Nokho, ngokuthuthuka okuqhubekayo kobuchwepheshe kanye nokwehliswa kwezindleko, inqubo yokukhiqiza ye-PSS iyathuthukiswa kancane kancane futhi ithuthukiswe.
Inzuzo eyinhloko
1.Thuthukisa ukusebenza kahle kokukhipha ukukhanya: I-PSS ithuthukisa kakhulu ukusebenza kahle kokukhishwa kokukhanya kwe-LED ngokushintsha indlela yokusabalalisa ukukhanya nokunciphisa ukubonakaliswa okuphelele.
I-2.Yelula impilo ye-LED: I-PSS inganciphisa ukuminyana kokuhlukaniswa kwezinto ze-GaN epitaxial, ngaleyo ndlela inciphise ukuhlanganisa okungenayo imisebe futhi ibuyisele emuva ukuvuza kwamanje endaweni esebenzayo, yandise impilo ye-LED.
3.Thuthukisa ukukhanya kwe-LED: Ngenxa yokuthuthukiswa kokusebenza kahle kokukhipha ukukhanya kanye nokwelulwa kwempilo ye-LED, ukukhanya kwe-LED okukhanyayo ku-PSS kuthuthukiswa kakhulu.
4.Yehlisa izindleko zokukhiqiza: Nakuba inqubo yokukhiqiza ye-PSS iyinkimbinkimbi, ingathuthukisa kakhulu ukusebenza kahle okukhanyayo nokuphila kwe-LED, ngaleyo ndlela yehlise izindleko zokukhiqiza ngezinga elithile futhi ithuthukise ukuncintisana komkhiqizo.
Izindawo zokufaka izicelo eziyinhloko
1. Ukukhanyisa kwe-LED: I-PSS njenge-substrate material yama-chips e-LED, ingathuthukisa kakhulu ukusebenza kahle okukhanyayo nempilo ye-LED.
Emkhakheni wokukhanyisa kwe-LED, i-PSS isetshenziswa kabanzi emikhiqizweni ehlukahlukene yokukhanyisa, njengezibani zomgwaqo, izibani zetafula, izibani zemoto nokunye.
I-2.Amadivayisi we-Semiconductor: Ngaphandle kokukhanyisa kwe-LED, i-PSS ingasetshenziswa futhi ekwenzeni amanye amadivaysi e-semiconductor, njengama-light detectors, ama-lasers, njll. Lawa madivayisi anezinhlelo eziningi zokusebenza kwezokuxhumana, ezokwelapha, ezempi kanye nezinye izinkambu.
Ukuhlanganiswa kwe-3.Optoelectronic: Izakhiwo ze-optical kanye nokuzinza kwe-PSS kwenza kube enye yezinto ezifanelekile emkhakheni wokuhlanganiswa kwe-optoelectronic.Ekuhlanganiseni kwe-optoelectronic, i-PSS ingasetshenziswa ukwenza ama-waveguides optical, ama-optical switches nezinye izingxenye ukuze kubonakale ukudluliswa nokucubungula amasignali optical.
Imingcele yezobuchwepheshe
| Into | I-Sapphire Substrate enephethini(2~6inch) | ||
| Ububanzi | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Ubukhulu | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| I-Surface Orientation | Indiza ye-C (0001) i-off-engeli ibheke ku-M-eksisi (10-10) 0.2 ± 0.1° | ||
| Indiza ye-C (0001) i-off-engeli ibheke ku-A-eksisi (11-20) 0 ± 0.1° | |||
| Isisekelo se-Flat Orientation | I-A-Plane (11-20) ± 1.0° | ||
| Ubude Befulethi obuyisisekelo | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| I-R-Plane | 9-o'clock | ||
| I-Front Surface Qeda | Iphethini | ||
| I-Back Surface Qeda | I-SSP:I-Fine-ground,Ra=0.8-1.2um; I-DSP: I-Epi-iphucuziwe, i-Ra<0.3nm | ||
| I-Laser Mark | Uhlangothi lwangemuva | ||
| I-TTV | ≤8μm | ≤10μm | ≤20μm |
| KHOTHAMA | ≤10μm | ≤15μm | ≤25μm |
| I-WARP | ≤12μm | ≤20μm | ≤30μm |
| Ukukhishwa komkhawulo | ≤2 mm | ||
| Ukucaciswa Kwephethini | Ukwakheka Komumo | I-Dome, Isigaxa, Iphiramidi | |
| Ukuphakama Kwephethini | 1.6~1.8μm | ||
| Iphethini Ububanzi | 2.75~2.85μm | ||
| Isikhala Sephethini | 0.1~0.3μm | ||
I-XKH igxile ekuthuthukisweni, ekukhiqizweni nasekuthengisweni kwe-sapphire substrate enephethini (PSS), futhi izibophezele ekuhlinzekeni imikhiqizo ye-PSS yekhwalithi ephezulu, esebenza kakhulu kumakhasimende emhlabeni jikelele. I-XKH inobuchwepheshe bokukhiqiza obuthuthukisiwe kanye nethimba lezobuchwepheshe elichwepheshile, elingenza ngokwezifiso imikhiqizo ye-PSS ngezicaciso ezihlukene kanye nezakhiwo zephethini ezihlukene ngokwezidingo zamakhasimende. Ngesikhathi esifanayo, i-XKH inaka ikhwalithi yomkhiqizo kanye nekhwalithi yesevisi, futhi izibophezele ekunikezeni amakhasimende uhla olugcwele lokusekelwa kwezobuchwepheshe nezisombululo. Emkhakheni we-PSS, i-XKH iqongelele ulwazi olucebile kanye nezinzuzo, futhi ibheke ngabomvu ukusebenzisana nozakwethu bomhlaba wonke ukukhuthaza ngokuhlanganyela ukuthuthukiswa kokukhanyisa kwe-LED, amadivaysi e-semiconductor nezinye izimboni.
Umdwebo onemininingwane
