Izixazululo Zokugoba Ezimanzi Nezomile Ze-Sapphire Wafer

Izixazululo Zokugoba Ezimanzi Nezomile Ze-Sapphire Isithombe Esifakiwe

Incazelo emfushane:

Ama-wafer aqoshiwe e-sapphire akhiqizwa kusetshenziswa ama-substrate e-sapphire e-single-crystal (Al₂O₃) ahlanzekile kakhulu, acutshungulwa nge-photolithography ethuthukisiwe ehlanganiswe nobuchwepheshe bokuchoma okumanzi kanye nobuchwepheshe bokuchoma okomile. Imikhiqizo inamaphethini ahlelwe kahle kakhulu, ukunemba okuhle kakhulu kobukhulu, kanye nokuqina okumangalisayo ngokomzimba namakhemikhali, okwenza afaneleke ukusetshenziswa okuthembekile kakhulu kuma-microelectronics, ama-optoelectronics, amaphakheji e-semiconductor, kanye nezinkambu zocwaningo ezithuthukisiwe.

Sithumelele i-imeyili

Izici

Umdwebo Oningiliziwe

Izixazululo Zokugoba Ezimanzi Nezomile Ze-Sapphire Wafer

Isingeniso Somkhiqizo

Ama-wafer aqoshiwe e-sapphire akhiqizwa kusetshenziswa izisekelo ze-sapphire eyodwa-crystal (Al₂O₃) ezihlanzekile kakhulu, ezicutshungulwa nge-photolithography ethuthukisiwe ehlanganiswe ne-ubuchwepheshe bokuchoma okumanzi kanye nobokuchoma okomileImikhiqizo inamaphethini akhiwe ngendlela encane afanayo kakhulu, ukunemba okuhle kakhulu kobukhulu, kanye nokuzinza okumangalisayo ngokomzimba namakhemikhali, okwenza ifaneleke ukusetshenziswa okuthembekile kakhulu kuma-microelectronics, ama-optoelectronics, ukupakishwa kwe-semiconductor, kanye nezinkambu zocwaningo ezithuthukisiwe.

I-Sapphire yaziwa kakhulu ngobulukhuni bayo obungavamile kanye nokuqina kwesakhiwo, enobulukhuni be-Mohs obungu-9, obulandela idayimane kuphela. Ngokulawula ngokunembile amapharamitha okuqopha, izakhiwo ezincane ezichazwe kahle neziphindaphindwayo zingakhiwa ebusweni be-sapphire, kuqinisekiswe imiphetho yephethini ebukhali, i-geometry ezinzile, kanye nokuvumelana okuhle kakhulu kuzo zonke izinhlobo.

Ubuchwepheshe Bokuqopha

Ukuqopha Okumanzi

I-Wet etching isebenzisa izixazululo zamakhemikhali ezikhethekile ukususa ngokukhetha izinto ze-sapphire bese yakha izakhiwo ezincane ezifiselekayo. Le nqubo inikeza ukusebenza okuphezulu, ukufana okuhle, kanye nezindleko zokucubungula eziphansi, okwenza ifanelekele ukwenziwa kwamaphethini endaweni enkulu kanye nokusetshenziswa okunezidingo zephrofayili eseceleni ezimaphakathi.

Ngokulawula ngokunembile ukwakheka kwesisombululo, izinga lokushisa, kanye nesikhathi sokusika, kungafinyelelwa ekulawulweni okuzinzile kokujula kokusika kanye nesimo sobuso. Ama-wafer e-sapphire aqoshiwe asetshenziswa kabanzi ezindaweni zokupakisha ze-LED, izendlalelo zokusekela isakhiwo, kanye nezinhlelo zokusebenza ezikhethiwe ze-MEMS.

Ukuqopha Okwomile

Ukugoba okomile, njengokugoba kwe-plasma noma ukugoba kwe-reactive ion (RIE), kusebenzisa ama-ion anamandla aphezulu noma izinhlobo ezisabelayo ukuze kugobe i-sapphire ngokusebenzisa izindlela zomzimba nezamakhemikhali. Le ndlela inikeza i-anisotropy ephezulu, ukunemba okuphezulu, kanye nekhono elihle kakhulu lokudlulisa amaphethini, okuvumela ukwenziwa kwezici ezinhle kanye nezakhiwo ezincane zesilinganiso esiphakeme.

Ukuqopha okomile kufaneleka kakhulu ezinhlelweni zokusebenza ezidinga izindonga eziqondile, incazelo yezici ezibukhali, kanye nokulawula okuqinile, njengamadivayisi e-Micro-LED, ukupakishwa kwe-semiconductor okuthuthukisiwe, kanye nezakhiwo ze-MEMS ezisebenza kahle kakhulu.

Izici Eziyinhloko Nezinzuzo

I-substrate ye-sapphire yekristalu eyodwa emsulwa kakhulu enamandla amahle kakhulu okusebenza ngomshini
Izinketho zenqubo eguquguqukayo: ukugoba okumanzi noma ukugoba okomile ngokusekelwe ezidingweni zohlelo lokusebenza
Ubulukhuni obuphezulu kanye nokumelana nokuguguleka ukuze kuthembeke isikhathi eside
Ukuqina okuhle kakhulu kokushisa namakhemikhali, okufanelekela izindawo ezinzima
Ukubonakala okuphezulu kokukhanya kanye nezakhiwo ze-dielectric ezizinzile
Ukufana okuphezulu kwephethini kanye nokuvumelana kweqembu ngalinye

Izicelo

Izakhiwo zokupakisha nokuhlola ze-LED kanye ne-Micro-LED
Izithwali ze-semiconductor chip kanye nokupakishwa okuthuthukisiwe
Izinzwa ze-MEMS kanye nezinhlelo ze-micro-electromechanical
Izingxenye ezibonakalayo kanye nezakhiwo zokuqondanisa ngokunemba
Izikhungo zocwaningo kanye nokuthuthukiswa kwesakhiwo esincane esenziwe ngokwezifiso

Ukwenza Ngokwezifiso kanye Nezinsizakalo

Sinikeza izinsizakalo eziphelele zokwenza ngokwezifiso, okuhlanganisa ukwakheka kwephethini, ukukhethwa kwendlela yokuqopha (emanzi noma eyomile), ukulawula ukujula kokuqopha, izinketho zokujiya kwe-substrate kanye nosayizi, ukuqopha ohlangothini olulodwa noma ohlangothini oluphindwe kabili, kanye namazinga okupholisha ubuso. Ukulawulwa kwekhwalithi okuqinile kanye nezinqubo zokuhlola kuqinisekisa ukuthi yonke i-wafer eqophayo ye-sapphire ihlangabezana nokuthembeka okuphezulu kanye nezindinganiso zokusebenza ngaphambi kokulethwa.

Imibuzo Evame Ukubuzwa - Imibuzo Evame Ukubuzwa

Q1: Uyini umehluko phakathi kokuchoma okumanzi nokuchoma okomile kwesafire?

A:Ukucheba okumanzi kusekelwe ekuphenduleni kwamakhemikhali futhi kufaneleka ekucutshungulweni kwendawo enkulu futhi okungabizi kakhulu, kuyilapho ukucheba okomile kusebenzisa amasu asekelwe ku-plasma noma ku-ion ukuze kufezwe ukunemba okuphezulu, i-anisotropy engcono, kanye nokulawula izici ezinhle kakhulu. Ukukhetha kuncike ebunzimeni besakhiwo, izidingo zokunemba, kanye nokucatshangelwa kwezindleko.

Umbuzo 2: Iyiphi inqubo yokuqopha okufanele ngiyikhethele isicelo sami?

A:Ukucheba okumanzi kunconywa ezinhlelweni zokusebenza ezidinga amaphethini afanayo ngokunemba okumaphakathi, njengezingxenye ze-LED ezijwayelekile. Ukucheba okomile kufaneleka kakhulu ezinhlelweni zokusebenza ezinesisombululo esiphezulu, isilinganiso esiphezulu, noma izinhlelo zokusebenza ze-Micro-LED kanye ne-MEMS lapho i-geometry enembile ibalulekile khona.

Q3: Ungakwazi yini ukusekela amaphethini kanye nemininingwane eyenziwe ngokwezifiso?

A:Yebo. Sisekela imiklamo eyenziwe ngokwezifiso ngokugcwele, okuhlanganisa ukwakheka kwephethini, usayizi wesici, ukujula kwe-etch, ukujiya kwe-wafer, kanye nobukhulu be-substrate.

Mayelana NATHI

I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ekukhiqizweni, nasekuthengisweni kwengilazi ekhethekile ye-optical kanye nezinto ezintsha zekristalu. Imikhiqizo yethu ihlinzeka nge-optical electronics, i-consumer electronics, kanye nezempi. Sinikeza izingxenye ze-optical ze-Sapphire, izembozo zelensi yeselula, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kanye nama-semiconductor crystal wafers. Ngobuchwepheshe obunekhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungewona ojwayelekile, sihlose ukuba yibhizinisi elihamba phambili lezinto ze-optoelectronic tech.