Nakuba kokubili ama-silicon nama-wafers engilazi ahlanganyela umgomo ofanayo "wokuhlanzwa," izinselele nezindlela zokwehluleka ababhekana nazo ngesikhathi sokuhlanza zihluke kakhulu. Lokhu kungafani kuvela ezintweni ezibonakalayo ezingokwemvelo kanye nezidingo zokucaciswa kwe-silicon nengilazi, kanye "nefilosofi" ehlukile yokuhlanza eqhutshwa izinhlelo zabo zokugcina.
Okokuqala, ake sicacise: Yini ngempela esiyihlanzayo? Yikuphi ukungcola okuhilelekile?
Ukungcola kungahlukaniswa ngezigaba ezine:
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Izinhlayiya Ezingcolisayo
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Uthuli, izinhlayiya zensimbi, izinhlayiya eziphilayo, izinhlayiya ezilumayo (kusuka kunqubo ye-CMP), njll.
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Lokhu kungcola kungabangela ukukhubazeka kwephethini, njengezikhindi noma amasekhethi avuliwe.
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Ukungcola Okuphilayo
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Kufaka phakathi izinsalela ze-photoresist, izithasiselo ze-resin, amafutha esikhumba somuntu, izinsalela ze-solvent, njll.
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Ukungcola kwezinto eziphilayo kungakha izifihla-buso ezivimbela ukufakwa noma ukufakwa kwe-ion futhi zinciphise ukunamathela kwamanye amafilimu azacile.
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I-Metal ion Contaminants
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I-ayoni, ithusi, i-sodium, i-potassium, i-calcium, njll., etholakala ngokuyinhloko ezintweni zokusebenza, amakhemikhali, kanye nokuxhumana kwabantu.
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Kuma-semiconductors, ama-ion ensimbi ayizingcolisi "ezibulalayo", ezethula amazinga wamandla ebhendini enqatshelwe, okwandisa ukuvuza kwamanje, afinyeze impilo yenkampani yenethiwekhi, futhi alimaze kakhulu izakhiwo zikagesi. Engilazini, zingathinta ikhwalithi nokunamathela kwamafilimu amancane alandelayo.
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Isendlalelo se-Native oxide
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Kumawafa e-silicon: Ungqimba oluncane lwe-silicon dioxide (i-Native Oxide) ngokwemvelo lwakha phezulu emoyeni. Ukuqina nokufana kwalolu ngqimba lwe-oxide kunzima ukulawula, futhi kufanele kususwe ngokuphelele ngesikhathi sokwenziwa kwezakhiwo ezibalulekile njengama-oxide esango.
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Kumawafa engilazi: Ingilazi ngokwayo iyisakhiwo senethiwekhi ye-silica, ngakho-ke ayikho inkinga "yokususa ungqimba lwe-oxide lwendabuko." Nokho, kungenzeka ukuthi ingaphezulu lishintshiwe ngenxa yokungcoliswa, futhi lesi sendlalelo sidinga ukususwa.
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I. Imigomo Eyinhloko: Umehluko Phakathi Kokusebenza Kagesi Nokuphelela Komzimba
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Ama-Silicon Wafers
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Umgomo oyinhloko wokuhlanza uwukuqinisekisa ukusebenza kukagesi. Ukucaciswa ngokuvamile kuhlanganisa ukubalwa kwezinhlayiyana eziqinile nosayizi (isb., izinhlayiya ≥0.1μm kufanele zisuswe ngempumelelo), ukugxiliswa kwe-ion yensimbi (isb, i-Fe, i-Cu kumele ilawulwe ibe ngu-≤10¹⁰ ama-athomu/cm² noma ngaphansi), kanye namazinga ensalela yemvelo. Ngisho nokungcoliswa kwe-microscopic kungaholela kuma-shorts wesifunda, ukuvuza kwemisinga, noma ukwehluleka kobuqotho be-oxide yesango.
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Ama-wafers engilazi
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Njengama-substrates, izidingo eziyinhloko ukuphelela ngokomzimba kanye nokuzinza kwamakhemikhali. Ukucaciswa kugxile ezicini zeleveli enkulu njengokungabibikho kwemihuzuko, amabala angakhipheki, nokugcinwa koqweqwe lwangempela lwendawo kanye nejometri. Umgomo wokuhlanza ngokuyinhloko ukuqinisekisa ukuhlanzeka okubonakalayo nokunamathela okuhle kwezinqubo ezilandelayo ezifana nokugqoka.
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II. Imvelo Ebalulekile: Umehluko Oyisisekelo Phakathi KweCrystalline ne-Amorphous
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I-silicon
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I-silicon iyi-crystalline material, futhi ubuso bayo bukhula ngokwemvelo ungqimba lwe-silicon dioxide (SiO₂) olungalingani. Lesi singqimba se-oxide sibeka engcupheni ekusebenzeni kukagesi futhi kufanele sisuswe ngokuphelele futhi ngokulinganayo.
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Ingilazi
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Ingilazi iyinethiwekhi ye-silica e-amorphous. Impahla yayo eyinqwaba iyafana ngokwakheka nongqimba lwe-silicon oxide ye-silicon, okusho ukuthi ingafakwa ngokushesha nge-hydrofluoric acid (HF) futhi isengozini yokuguguleka kwe-alkali okuqinile, okuholela ekwenyukeni kokuqina noma ukuwohloka. Lo mehluko oyisisekelo ubeka ukuthi ukuhlanzwa kwe-silicon wafer kungabekezelela ukukhanya, ukufakwa okulawulwayo ukuze kukhishwe ukungcola, kuyilapho ukuhlanzwa kwe-wafer yengilazi kufanele kwenziwe ngokucophelela okukhulu ukugwema ukulimaza isisekelo.
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| Ukuhlanza Into | I-Silicon Wafer Cleaning | Ukuhlanza i-Glass Wafer |
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| Ukuhlanza Umgomo | Kubandakanya isendlalelo saso somdabu se-oxide | Khetha indlela yokuhlanza: Susa ukungcola ngenkathi uvikela izinto eziyisisekelo |
| Ukuhlanza Okujwayelekile kwe-RCA | - SPM(H₂SO₄/H₂O₂): Isusa izinsalela ze-organic/photoresist | Ukugeleza Okuyinhloko Kokuhlanza: |
| - I-SC1(NH₄OH/H₂O₂/H₂O): Isusa izinhlayiya ezingaphezulu | I-ejenti Yokuhlanza I-Alkaline Ebuthakathaka: Iqukethe ama-agent asebenzayo ukuze asuse ukungcola kwe-organic nezinhlayiya | |
| - I-DHF(I-Hydrofluoric acid): Isusa ungqimba lwe-oxide yemvelo nokunye ukungcola | I-alkaline enamandla noma i-Ejenti Yokuhlanza I-Alkaline Ephakathi: Isetshenziselwa ukususa ukungcola okusansimbi noma okungaguquki | |
| - SC2(HCl/H₂O₂/H₂O): Isusa ukungcola kwensimbi | Gwema i-HF kulo lonke | |
| Amakhemikhali Abalulekile | Ama-asidi aqinile, ama-alkali aqinile, ama-solvent oxidizing | I-ejenti yokuhlanza i-alkaline ebuthaka, eyakhelwe ngokukhethekile ukususwa kokungcola okuncane |
| Izinsiza Zomzimba | Amanzi akhishwe nge-deionized (okuhlanza okuhlanzekile) | Ukugeza kwe-Ultrasonic, i-megasonic |
| I-Drying Technology | I-Megasonic, i-IPA vapor drying | Ukomisa okuthambile: Ukuphakamisa kancane, ukomisa umhwamuko we-IPA |
III. Ukuqhathaniswa Kwezixazululo Zokuhlanza
Ngokusekelwe ezinhlosweni ezishiwo ngenhla nezici ezibonakalayo, izixazululo zokuhlanza ze-silicon nama-wafers engilazi ziyehluka:
| I-Silicon Wafer Cleaning | Ukuhlanza i-Glass Wafer | |
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| Inhloso yokuhlanza | Ukususwa okuphelele, okuhlanganisa isendlalelo se-oxide somdabu se-wafer. | Ukususwa okukhethiwe: susa ukungcola ngenkathi uvikela i-substrate. |
| Inqubo ejwayelekile | Ukuhlanza okujwayelekile kwe-RCA:•SPM(H₂SO₄/H₂O₂): isusa izinto eziphilayo ezisindayo/i-photoresist •I-SC1(NH₄OH/H₂O₂/H₂O): ukususwa kwezinhlayiya ze-alkaline •I-DHF(dilute HF): isusa ungqimba lwe-oxide yemvelo nezinsimbi •SC2(HCl/H₂O₂/H₂O): ikhipha ama-ion ensimbi | Ukugeleza kokuhlanza kwesici:•Isihlanzi se-alkaline esimaphakathinama-surfactants ukususa izinto eziphilayo nezinhlayiya •I-Acidic noma i-neutral cleanerukususa ama-ion ensimbi nokunye ukungcola okuthile •Gwema i-HF kuyo yonke inqubo |
| Amakhemikhali abalulekile | Ama-acids aqinile, ama-oxidizers aqinile, izixazululo ze-alkaline | Izihlanzi ze-alkaline ezithambile; izihlanzi ezikhethekile ezingathathi hlangothi noma ezine-acidic kancane |
| Usizo olungokwenyama | I-Megasonic (isebenza kahle kakhulu, ukususwa kwezinhlayiyana ezithambile) | I-Ultrasonic, i-megasonic |
| Ukomisa | Ukomiswa kweMarangoni; Ukomisa umhwamuko we-IPA | Ukomisa kancane kancane; Ukomisa umhwamuko we-IPA |
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Inqubo Yokuhlanza Icwecwe Lengilazi
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Njengamanje, izitshalo eziningi zokucubungula ingilazi zisebenzisa izinqubo zokuhlanza ngokusekelwe ezicini ezibonakalayo zengilazi, zithembele ngokuyinhloko kuma-agent okuhlanza ama-alkali abuthakathaka.
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Izici zomenzeli wokuhlanza:Lawa ma-ejenti okuhlanza akhethekile ngokuvamile ane-alkaline ebuthakathaka, ene-pH ephakathi kuka-8-9. Ivamise ukuqukatha ama-surfactants (isb., i-alkyl polyoxyethylene ether), i-metal chelating agents (isb, i-HEDP), nezinsiza zokuhlanza eziphilayo, eziklanyelwe ukuhlanganisa nokubola ukungcola okuphilayo okufana namafutha nezigxivizo zeminwe, kuyilapho kugqwala kancane ku-matrix yengilazi.
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Ukugeleza Kwenqubo:Inqubo yokuhlanza evamile ihilela ukusebenzisa ukuhlushwa okukhethekile kwama-agent okuhlanza ama-alkaline abuthakathaka emazingeni okushisa avela ekamelweni lokushisa kuya ku-60 ° C, kuhlanganiswe nokuhlanza kwe-ultrasonic. Ngemva kokuhlanza, amawafa athatha izinyathelo eziningi zokuwasha ngamanzi ahlanzekile futhi omiswe kahle (isb., ukuphakamisa kancane noma ukomiswa komhwamuko we-IPA). Le nqubo ihlangabezana ngempumelelo nezidingo ze-wafer yengilazi yokuhlanzeka okubonakalayo kanye nokuhlanzeka okuvamile.
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Inqubo yokuhlanza i-Silicon Wafer
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Ngokucutshungulwa kwe-semiconductor, amawafa e-silicon ngokuvamile ahlanzwa okujwayelekile kwe-RCA, okuyindlela yokuhlanza esebenza kahle kakhulu ekwazi ukubhekana ngokuhlelekile nazo zonke izinhlobo zokungcola, iqinisekise ukuthi izidingo zokusebenza kukagesi kumadivayisi we-semiconductor ziyahlangatshezwa.
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IV. Lapho I-Glass Ihlangabezana Namazinga Aphakeme "Enhlanzeko".
Uma amawafa engilazi esetshenziswa ezinhlelweni ezidinga ukubala kwezinhlayiyana eziqinile kanye namazinga e-ion yensimbi (isb, njengama-substrates ezinqubweni ze-semiconductor noma izindawo ezinhle kakhulu zokubeka ifilimu emincane), inqubo yokuhlanza ngaphakathi ingase ingasaneli. Kulokhu, izimiso zokuhlanza i-semiconductor zingasetshenziswa, ukwethula isu eliguquliwe lokuhlanza i-RCA.
Umnyombo waleli su ukuhlambulula kanye nokwenza kahle amapharamitha wenqubo ye-RCA ejwayelekile ukuze amukele imvelo ebucayi yengilazi:
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Ukususwa Kwezinto Ezingcolile:Izixazululo ze-SPM noma amanzi e-ozone athambile angasetshenziswa ukubola ukungcola kwemvelo ngokusebenzisa i-oxidation enamandla.
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Ukususwa Kwezinhlayiyana:Isixazululo se-SC1 esihlanjululwe kakhulu sisetshenziswa emazingeni okushisa aphansi kanye nezikhathi zokwelashwa ezimfishane ukuze kusetshenziswe i-electrostatic repulsion kanye ne-micro-etching imiphumela ukuze kukhishwe izinhlayiya, kuyilapho kunciphisa ukugqwala engilazini.
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Ukususwa kwe-Metal ion:Isixazululo se-SC2 esihlanjululwe noma izixazululo ezilula ze-hydrochloric acid/dilute nitric acid zisetshenziselwa ukususa ukungcola kwensimbi nge-chelation.
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Imithetho Eqinile:I-DHF (di-ammonium fluoride) kumelwe igwenywe ngokuphelele ukuze kuvinjelwe ukugqwala kwengxenye yengilazi.
Kuyo yonke inqubo eguquliwe, ukuhlanganisa ubuchwepheshe be-megasonic kukhulisa kakhulu ukusebenza kahle kokususwa kwezinhlayiya ezinosayizi we-nano futhi kuthambile ngaphezulu.
Isiphetho
Izinqubo zokuhlanza ama-silicon nama-wafers engilazi ziwumphumela ongenakugwenywa wobunjiniyela obuhlehlayo ngokusekelwe ezidingweni zabo zokugcina zohlelo lokusebenza, izakhiwo zezinto ezibonakalayo, nezici zomzimba nezamakhemikhali. Ukuhlanzwa kwe-Silicon wafer kufuna "ukuhlanzeka kwezinga le-athomu" ekusebenzeni kukagesi, kuyilapho ukuhlanzwa kwe-wafer yengilazi kugxile ekuzuzeni izindawo ezibonakalayo "eziphelele, ezingenakulimala". Njengoba amawafa engilazi aya ngokuya esetshenziswa ekusetshenzisweni kwe-semiconductor, izinqubo zawo zokuhlanza nakanjani zizovela ngaphezu kokuhlanza okungokwesiko okubuthakathaka kwe-alkaline, kuthuthukiswe izixazululo ezicwengisisiwe, ezenziwe ngokwezifiso njengenqubo ye-RCA eguquliwe ukuze ihlangabezane nezindinganiso zokuhlanzeka eziphakeme.
Isikhathi sokuthumela: Oct-29-2025