Okuqukethwe
1. Uhlolojikelele kanye nemisebenzi esemqoka ye-FOUP
2.Isakhiwo kanye Nezici Zokuklama ze-FOUP
3.Iziqondiso Zokuhlukaniswa Nezicelo ze-FOUP
4.Ukusebenza kanye Nokubaluleka kwe-FOUP Emkhiqizweni weSemiconductor
5. Izinselelo Zezobuchwepheshe kanye Nezitayela Zokuthuthukiswa Kwekusasa
6.Izixazululo Zenziwe Ngokwezifiso ze-XKH kanye Nokwesekwa Kwesevisi
Enqubweni yokukhiqiza i-semiconductor, i-Front Opening Unified Pod (FOUP) iyisitsha esibalulekile esisetshenziselwa ukuvikela, ukuthutha, kanye nokugcina amawafa. Ingaphakathi layo lingakwazi ukumumatha izingcezu ezingu-25 zama-wafers angu-300mm, futhi izingxenye zalo eziyinhloko zihlanganisa isitsha esivula ngaphambili kanye nohlaka lomnyango ozinikele wokuvula nokuvala. I-FOUP iyisithwali esiyinhloko ohlelweni lwezokuthutha oluzenzakalelayo ngaphakathi kwendwangu eyi-wafer eyi-12inch. Ngokuvamile ithuthwa isesimweni esivaliwe futhi ivuleka kuphela lapho iphushelwa embobeni yokulayisha impahla, okuvumela amawafa ukuthi adluliselwe embobeni yokulayisha/yokukhipha impahla.
Idizayini ye-FOUP ijwayelane nezimfuneko zemvelo encane. Ifaka izikhala ngemuva ukuze kufakwe i-wafer, futhi isivalo sakhelwe ngokuqondile ukufanisa i-clamp yesivuli. Amarobhothi abamba ama-wafer asebenza endaweni yomoya ehlanzekile Yekilasi 1, aqinisekisa ukuthi amawafa awangcoli ngesikhathi sokudlulisela. Ngaphezu kwalokho, i-FOUP ihanjiswa phakathi kwamathuluzi okucubungula ngesistimu yokubamba impahla ezenzakalelayo (AMHS). Indwangu yesimanje yama-wafer ngokuvamile isebenzisa amasistimu kaloliwe ohamba phezulu ukuze ezokuthutha, kuyilapho izindwangu ezindala ezimbalwa zingasebenzisa izimoto eziqondiswa phansi ezisekelwe phansi (AGVs).
I-FOUP ayigcini nje ngokuvumela ukudluliswa kwe-wafer okuzenzakalelayo kodwa futhi isebenzisa umsebenzi wokugcina. Ngenxa yezinyathelo eziningi zokukhiqiza, amawafa angathatha izinyanga ukuqeda yonke inqubo. Kuhlanganiswe namavolumu aphezulu okukhiqiza anyanga zonke, lokhu kusho ukuthi amashumi ezinkulungwane zamawafa ngaphakathi kwendwangu ahlala esendleleni noma ekugcinweni kwesikhashana nganoma yisiphi isikhathi. Ngesikhathi sokulondoloza, ama-FOUP ahlanzwa ngezikhathi ezithile nge-nitrogen ukuze kuvinjelwe ukungcola ekuthinteni amawafa, kuqinisekiswe inqubo yokukhiqiza ehlanzekile nethembekile.
1. Imisebenzi kanye Nokubaluleka kwe-FOUP
Umsebenzi oyinhloko we-FOUP ukuvikela ama-wafers ekushaqekeni kwangaphandle nasekungcoleni, ikakhulukazi ukugwema imithelela ekuvuneni ngesikhathi sokudlulisa. Ivimbela ngempumelelo umswakama ngokusebenzisa izindlela ezinjengokuhlanza igesi kanye Nokulawula Umkhathi Wendawo (i-LAC), iqinisekisa ukuthi amawafa ahlala esesimweni esiphephile ngenkathi elinde isinyathelo esilandelayo sokukhiqiza. Isistimu yayo evaliwe futhi elawulwayo ivumela kuphela izinhlanganisela ezidingekayo kanye nezakhi ukuthi zingene, kunciphisa kakhulu imiphumela emibi ye-VOCs, umoya-mpilo, nomswakama kuma-wafers.
Njengoba i-FOUP elayishwe ngokugcwele ngamawafa angu-25 ingaba nesisindo esingafika kumakhilogremu angu-9, ukuthutha kwayo kufanele kuncike ku-Automated Material Handling System (AMHS). Ukwenza lokhu kube lula, i-FOUP iklanywe ngezinhlanganisela ezihlukahlukene zamapuleti ahlanganisayo, izikhonkwane, nezimbobo, futhi ifakwe omaka be-elektroniki be-RFID ukuze bakhonjwe kalula futhi bahlukaniswe. Lokhu kusingathwa okuzenzakalelayo akudingi cishe ukusebenza okwenziwa ngesandla, kunciphisa kakhulu amazinga amaphutha futhi kuthuthukisa ukuphepha nokunemba kwenqubo yokukhiqiza.
2. Isakhiwo kanye nokuhlukaniswa kwe-FOUP
Izilinganiso ezijwayelekile ze-FOUP cishe zingu-420 mm ububanzi, 335 mm ukujula, kanye no-335 mm ukuphakama. Izingxenye zayo eziyinhloko zesakhiwo zihlanganisa: i-OHT ephezulu (ikhanda lekhowe) lokuthuthwa kwe-overhead hoist; isicabha sangaphambili sokufinyelela isicwecwe; Izibambo eziseceleni, ezivame ukufakwa umbala ukuze zihlukanise izindawo zenqubo ezinamazinga ahlukene okungcola; indawo yeKhadi yokubeka amakhadi emiyalezo; kanye nomaka we-RFID ongezansi osebenza njengesihlonzi esiyingqayizivele se-FOUP, ovumela amathuluzi nama-overhead hoists ukuthi akubone. Isisekelo siphinde sifakwe izimbobo ezine zokuhlonza nokubeka ukuze zihambisane namathuluzi kanye nezindawo zenqubo yokuhlukanisa.
Ngokusekelwe ekusetshenzisweni, ama-FOUP ahlukaniswa abe izinhlobo ezintathu: i-PRD (yokukhiqiza), i-ENG (yamawafa onjiniyela), kanye ne-MON (yamawafa okuqapha). Ama-PRD FOUP angasetshenziselwa ukukhiqiza umkhiqizo, izinhlobo ze-ENG zifanele i-R&D noma izivivinyo, futhi izinhlobo ze-MON zinikezelwe ukucubungula ukuqapha izinyathelo ezifana ne-CMP ne-DIFF. Kubalulekile ukuqaphela ukuthi ama-PRD FOUP angasetshenziselwa kokubili izinjongo ze-ENG ne-MON, futhi izinhlobo ze-ENG zingasetshenziselwa i-MON, kodwa ukusebenza okuhlehliswayo kubangela izingozi zekhwalithi.
Ehlukaniswa ngokwezinga lokungcoliswa, ama-FOUP angahlukaniswa abe yi-FE FOUP (inqubo ebheke phambili, engenansimbi), BE FOUP (inqubo engemuva, iqukethe insimbi), kanye nalawo akhethekile ngezinqubo ezithile zensimbi njenge-NI FOUP, CU FOUP, ne-CO FOUP. Ama-FOUP ezinqubo ezihlukene ngokuvamile ahlukaniswa ngombala wezibambo eziseceleni noma amaphaneli eminyango. Ama-FOUP avela ezinqubweni ezibheke phambili angasetshenziswa ezinqubweni ezingemuva, kodwa ama-FOUP asemuva akumele neze asetshenziswe ezinqubweni ezibheke phambili, njengoba lokhu kungadala izingozi zokungcola.
Njengesithwali esibalulekile ekukhiqizeni ama-semiconductor, i-FOUP, ngokusebenzisa i-automation ephezulu kanye nokulawula ukungcoliswa okuqinile, iqinisekisa ukuphepha nokuhlanzeka kwama-wafers ngesikhathi senqubo yokukhiqiza, okuyenza ingqalasizinda ebaluleke kakhulu ezindwangu eziwucwecwe zesimanje.
Isiphetho
I-XKH izibophezele ekuhlinzekeni amakhasimende ngezixazululo ezenziwe ngokwezifiso kakhulu ze-Front-Opening Unified Pod (FOUP), ethobela ngokuphelele izidingo zakho zenqubo ethile kanye nokucaciswa kwesixhumi esibonakalayo. Ngokusebenzisa ubuchwepheshe bezinto ezithuthukisiwe kanye nezinqubo zokukhiqiza ezinembayo, siqinisekisa ukuthi wonke umkhiqizo we-FOUP uletha umoya ongavamile, ukuhlanzeka, nokuzinza kwemishini. Ithimba lethu lezobuchwepheshe linobuchwepheshe obujulile bemboni, linikeza ukwesekwa okuphelele komjikelezo wempilo—kusukela ekubonisaneni okukhethiwe nokuthuthukiswa kwesakhiwo kuya ekuhlanzeni nasekunakekeleni—ukuqinisekisa ukuhlanganiswa okungenazihibe nokusebenzisana okuphumelelayo phakathi kwe-FOUP kanye Nohlelo lwakho Lokuphatha Okuzenzakalelayo Lokusebenza (AMHS) kanye nezisetshenziswa zokucubungula. Sihlala sikubeka eqhulwini ukuphepha kwamawafa kanye nokuthuthukiswa kwesivuno sokukhiqiza—njengezinjongo zethu eziyinhloko. Ngemikhiqizo emisha kanye nezinsizakalo zobuchwepheshe ezihlanganisa konke, sikunikeza isiqinisekiso esiqinile sezinqubo zakho zokukhiqiza i-semiconductor, ekugcineni sikhulise ukusebenza kahle kokukhiqiza kanye nesivuno somkhiqizo.
Isikhathi sokuthumela: Sep-08-2025