Umshini wesikwele wesiteshi esiphindwe kabili wokucubungula induku ye-silicon e-monocrystalline engu-6/8/12 intshi ububanzi be-Ra≤0.5μm
Izici zemishini:
(1) Ukucubungula okuhambisanayo kwesiteshi esiphindwe kabili
· Ukusebenza kahle kabili: Ukucubungula ngasikhathi sinye kwezinduku ezimbili ze-silicon (Ø6"-12") kwandisa umkhiqizo ngo-40%-60% uma kuqhathaniswa nemishini ye-Simplex.
· Ukulawula okuzimele: Isiteshi ngasinye singalungisa ngokuzimela amapharamitha okusika (ukucindezeleka, isivinini sokudla) ukuze sivumelane nezincazelo ezahlukene zenduku ye-silicon.
(2) Ukusika okunembe kakhulu
· Ukunemba kobukhulu: ukubekezelela ibanga eliseceleni lebha yesikwele ± 0.15mm, ububanzi ≤0.20mm.
· Ikhwalithi yomphezulu: ukuphuka konqenqema olusezingeni eliphezulu <0.5mm, kunciphisa inani lokugaya okulandelayo.
(3) Ukulawula okuhlakaniphile
· Ukusika okuzivumelanisa nezimo: ukuqapha ngesikhathi sangempela isimo senduku ye-silicon, ukulungiswa okunamandla kwendlela yokusika (njengokucubungula induku ye-silicon egobile).
· Ukulandelelwa kwedatha: qopha amapharamitha okucubungula enduku ngayinye ye-silicon ukuze usekele ukufakwa kwesistimu ye-MES.
(4) Izindleko eziphansi ezisebenzisekayo
· Ukusetshenziswa kwentambo yedayimane: ≤0.06m/mm (ubude benduku ye-silicon), ububanzi bentambo ≤0.30mm.
· Ukujikeleziswa kwe-coolant: Uhlelo lokuhlunga lwandisa isikhathi senkonzo futhi lunciphisa ukulahlwa koketshezi olungcolile.
Izinzuzo zobuchwepheshe kanye nentuthuko:
(1) Ukusika ukuthuthukiswa kobuchwepheshe
- Ukusika ngemigqa eminingi: Imigqa yedayimane engu-100-200 isetshenziswa ngokuhambisana, futhi isivinini sokusika singu-≥40mm/min.
- Ukulawula ukucindezeleka: Uhlelo lokulungisa iluphu evaliwe (±1N) ukunciphisa ingozi yokuphuka kwentambo.
(2) Isandiso sokuhambisana
- Ukuzivumelanisa nezinto: Sekela i-silicon ye-monocrystalline yohlobo lwe-P/N, ehambisana ne-TOPCon, i-HJT nezinye izinduku ze-silicon zebhethri ezisebenza kahle kakhulu.
- Usayizi oguquguqukayo: ubude benduku ye-silicon 100-950mm, ibanga eliyisikwele eceleni kwenduku liyi-166-233mm elilungisekayo.
(3) Ukuthuthukiswa kokuzenzakalela
- Ukulayisha nokukhipha i-robot: ukulayisha/ukukhipha i-silicon rods ngokuzenzakalelayo, shaya imizuzu engu-≤3.
- Ukuxilongwa okuhlakaniphile: Ukulungiswa okubikezelayo ukuze kuncishiswe isikhathi sokungasebenzi esingahleliwe.
(4) Ubuholi bemboni
- Ukusekelwa kwe-Wafer: ingacubungula i-silicon engu-≥100μm enomzimba omncane kakhulu ngezinduku zesikwele, izinga lokuqhekeka <0.5%.
- Ukuthuthukiswa kokusetshenziswa kwamandla: Ukusetshenziswa kwamandla ngeyunithi ngayinye yenduku ye-silicon kuncishiswe ngo-30% (uma kuqhathaniswa nemishini yendabuko).
Amapharamitha obuchwepheshe:
| Igama lepharamitha | Inani lenkomba |
| Inani lamabha acutshunguliwe | Izingcezu ezi-2/isethi |
| Ububanzi bobude bebha yokucubungula | 100~950mm |
| Ububanzi bemajini | 166 ~ 233mm |
| Isivinini sokusika | ≥40mm/min |
| Isivinini sentambo yedayimane | 0~35m/s |
| Ububanzi bedayimane | 0.30 mm noma ngaphansi |
| Ukusetshenziswa komugqa | 0.06 m/mm noma ngaphansi |
| Ububanzi benduku eyindilinga obuhambisanayo | Ububanzi benduku yesikwele obuqediwe +2mm, Qinisekisa izinga lokuphasa lokupholisha |
| Ukulawula ukuphuka okuphambili | Umphetho ongahluziwe ≤0.5mm, Akukho ukuqhekeka, ikhwalithi ephezulu yobuso |
| Ukufana kobude be-arc | Ibanga lokuphrojektha <1.5mm, Ngaphandle kokuphambuka kwenduku ye-silicon |
| Ubukhulu bomshini (umshini owodwa) | 4800×3020×3660mm |
| Amandla aphelele alinganisiwe | 56kW |
| Isisindo esingapheli semishini | 12t |
Ithebula lenkomba yokunemba kwemishini:
| Into enembile | Ububanzi bokubekezelelana |
| Ukubekezelelana komkhawulo webha yesikwele | ± 0.15mm |
| Ububanzi bomphetho webha yesikwele | ≤0.20mm |
| I-engela kuzo zonke izinhlangothi zenduku yesikwele | 90°±0.05° |
| Ukuthamba kwenduku yesikwele | ≤0.15mm |
| Ukunemba kokubekwa okuphindaphindiwe kwerobhothi | ± 0.05mm |
Izinsizakalo ze-XKH:
I-XKH inikeza izinsizakalo zomjikelezo ogcwele zemishini ye-silicon yesiteshi esiphindwe kabili ye-mono-crystalline, okuhlanganisa ukwenza ngezifiso imishini (ehambisana nezinduku ezinkulu ze-silicon), ukugunyazwa kwenqubo (ukusika amapharamitha okwenziwa ngcono), ukuqeqeshwa kokusebenza kanye nokusekelwa kwangemva kokuthengisa (ukunikezwa kwezingxenye ezibalulekile, ukuxilongwa okukude), ukuqinisekisa ukuthi amakhasimende athola inzuzo ephezulu (>99%) kanye nokukhiqizwa kwezindleko eziphansi ezingasetshenziswa, kanye nokuhlinzeka ngezithuthukisi zobuchwepheshe (njengokwenza ngcono ukusika i-AI). Isikhathi sokulethwa siyizinyanga ezi-2-4.
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