I-Wafer ye-Sapphire engu-12 intshi yokukhiqiza i-High-Volume Semiconductor

I-Wafer ye-Sapphire engu-12 intshi yokukhiqiza i-Semiconductor enevolumu ephezulu Isithombe Esivelele

Incazelo emfushane:

I-wafer ye-sapphire engamasentimitha angu-12 yenzelwe ukuhlangabezana nesidingo esikhulayo sokukhiqizwa kwe-semiconductor yendawo enkulu, ene-high-throughput kanye ne-optoelectronic. Njengoba ukwakheka kwamadivayisi kuqhubeka nokukhula futhi imigqa yokukhiqiza iqhubekela kumafomethi e-wafer amakhulu, ama-substrates e-sapphire anobubanzi obukhulu kakhulu anikeza izinzuzo ezicacile ekukhiqizeni, ukwenza ngcono isivuno, kanye nokulawula izindleko.

Sithumelele i-imeyili

Izici

Umdwebo Oningiliziwe

Isingeniso se-wafer yesafire engu-intshi ezingu-12

Ekhiqizwe nge-Al₂O₃ yekristalu eyodwa emsulwa kakhulu, ama-wafer ethu e-sapphire angu-12 intshi ahlanganisa amandla amahle kakhulu okusebenza, ukuzinza kokushisa, kanye nekhwalithi yobuso. Ngokukhula kwekristalu okulungiselelwe kanye nokucutshungulwa kwe-wafer okunembile, lawa ma-substrate aletha ukusebenza okuthembekile kwezinhlelo zokusebenza ze-LED ezithuthukisiwe, i-GaN, kanye ne-semiconductor ezikhethekile.

Izici Zezinto Ezibalulekile

I-Sapphire (i-single-crystal aluminium oxide, i-Al₂O₃) yaziwa kakhulu ngezakhiwo zayo ezivelele zomzimba nezamakhemikhali. Ama-wafer e-sapphire angamasentimitha angu-12 athola zonke izinzuzo zezinto ze-sapphire ngenkathi ehlinzeka ngendawo engaphezulu engasetshenziswa kakhulu.

Izici ezibalulekile zezinto zifaka:

Ubulukhuni obuphezulu kakhulu kanye nokumelana nokuguguleka
Ukuqina okuhle kakhulu kokushisa kanye nendawo ephezulu yokuncibilika
Ukumelana okuphezulu kwamakhemikhali nama-asidi nama-alkali
Ukukhanya okuphezulu kokukhanya kusukela kuma-wavelength e-UV kuya ku-IR
Izakhiwo ezinhle kakhulu zokuvimbela ugesi

Lezi zici zenza ama-wafer e-sapphire angu-12 intshi afanelekele izindawo zokucubungula ezinzima kanye nezinqubo zokukhiqiza ze-semiconductor ezishisa kakhulu.

Inqubo Yokukhiqiza

Ukukhiqizwa kwama-wafer e-sapphire angu-12 intshi kudinga ukukhula kwekristalu okuthuthukisiwe kanye nobuchwepheshe bokucubungula obunembile kakhulu. Inqubo evamile yokukhiqiza ifaka:

Ukukhula Kwekristalu Elilodwa
Amakristalu e-sapphire acwengekile kakhulu akhuliswa kusetshenziswa izindlela ezithuthukisiwe ezifana ne-KY noma ezinye izindlela zokukhulisa amakristalu ezinobubanzi obukhulu, okuqinisekisa ukuqondiswa okufanayo kwamakristalu kanye nokucindezeleka okuphansi kwangaphakathi.
Ukubumba Nokusika Amakristalu
Ingot ye-sapphire ibunjwe kahle futhi inqunywe yaba ama-wafer angu-12 intshi kusetshenziswa imishini yokusika enokunemba okuphezulu ukuze kuncishiswe umonakalo ongaphansi komhlaba.
Ukugoqa Nokupholisha
Izinqubo ze-multi-step lapping kanye ne-chemical mechanical polishing (CMP) ziyasetshenziswa ukuze kufezwe ukugoba kobuso, ukuba yisicaba, kanye nokufana kobukhulu.
Ukuhlanza Nokuhlola
I-wafer ngayinye ye-sapphire engamasentimitha angu-12 ihlanzwa kahle futhi ihlolwe ngokuqinile, okuhlanganisa ikhwalithi yobuso, i-TTV, i-bow, i-warp, kanye nokuhlaziywa kwamaphutha.

Izicelo

Ama-wafer e-sapphire angu-12 intshi asetshenziswa kabanzi kubuchwepheshe obuthuthukisiwe nobusha, okuhlanganisa:

Izisekelo ze-LED ezinamandla aphezulu nokukhanya okuphezulu
Amadivayisi kagesi asekelwe ku-GaN namadivayisi e-RF
Isithwali semishini ye-semiconductor kanye ne-insulating substrates
Amafasitela abonakalayo kanye nezingxenye zokukhanya zendawo enkulu
Ukupakisha kwe-semiconductor okuthuthukisiwe kanye nabathwali bezinqubo ezikhethekile

Ububanzi obukhulu buvumela ukukhiqiza okuphezulu kanye nokusebenza kahle kwezindleko ekukhiqizweni ngobuningi.

Izinzuzo zama-Sapphire Wafers angu-12 intshi

Indawo enkulu engasetshenziswa ukuze kukhishwe idivayisi ephezulu nge-wafer ngayinye
Ukuqina kwenqubo okuthuthukisiwe kanye nokufana
Izindleko ezincishisiwe ngedivayisi ngayinye ekukhiqizweni okuphezulu
Amandla amahle kakhulu okusebenza ngomshini wokuphatha ngobukhulu obukhulu
Imininingwane engenziwa ngezifiso yezinhlelo zokusebenza ezahlukene

Izinketho Zokwenza Ngokwezifiso

Sinikeza ukwenza ngokwezifiso okuguquguqukayo kwama-wafers e-sapphire angu-12 intshi, kufaka phakathi:

Ukuqondiswa kwekristalu (indiza engu-C, indiza engu-A, indiza engu-R, njll.)
Ukujiya kanye nokubekezelela ububanzi
Ukupholisha ohlangothini olulodwa noma ohlangothini oluphindwe kabili
Iphrofayili yomphetho kanye nomklamo we-chamfer
Izidingo zobulukhuni bomphezulu kanye nobuphansi

Ipharamitha	Imininingwane	Amanothi
Ububanzi be-Wafer	Amasentimitha angu-12 (300 mm)	I-wafer ejwayelekile enobubanzi obukhulu
Izinto	I-Sapphire yekristalu elilodwa (Al₂O₃)	Ubumsulwa obuphezulu, ibanga le-elekthronikhi/lokukhanya
Ukuqondiswa Kwekristalu	Indiza engu-C (0001), indiza engu-A (11-20), indiza engu-R (1-102)	Izindlela zokuqondisa ongazikhethela ziyatholakala
Ubukhulu	430–500 μm	Ubukhulu obungokwezifiso buyatholakala uma uceliwe
Ukubekezelela Ubukhulu	±10 μm	Ukubekezelelana okuqinile kwamadivayisi athuthukile
Ukwehluka Kobukhulu Obuphelele (i-TTV)	≤10 μm	Iqinisekisa ukucutshungulwa okufanayo kuyo yonke i-wafer
Umnsalo	≤50 μm	Kulinganiswe phezu kwe-wafer yonke
I-Warp	≤50 μm	Kulinganiswe phezu kwe-wafer yonke
Ukuqedwa Komphezulu	Ipholishwe ohlangothini olulodwa (SSP) / Ipholishwe ohlangothini olulodwa (DSP)	Ubuso obuphezulu bekhwalithi yokukhanya
Ubulukhuni Bomphezulu (Ra)	≤0.5 nm (epholishiwe)	Ubushelelezi bezinga le-athomu lokukhula kwe-epitaxial
Iphrofayili Yomphetho	I-Chamfer / Unqenqema oluyindilinga	Ukuvimbela ukuqhekeka ngesikhathi sokuphatha
Ukunemba Kokuqondisa	±0.5°	Iqinisekisa ukukhula okufanele kwengqimba ye-epitaxial
Ubuningi obuphelele	<10 cm⁻²	Kukalwa ngokuhlolwa kokukhanya
Ukuthamba	≤2 μm / 100 mm	Iqinisekisa i-lithography efanayo kanye nokukhula kwe-epitaxial
Ukuhlanzeka	Ibanga 100 - Ibanga 1000	Iyahambisana negumbi lokuhlanza
Ukudluliselwa Kokukhanya	>85% (UV–IR)	Kuncike kubude be-wavelength kanye nobukhulu

Imibuzo Evame Ukubuzwa Nge-Wafer Ye-Sapphire Yamasentimitha angu-12

Q1: Bungakanani ubukhulu obujwayelekile be-wafer yesafire engamasentimitha angu-12?
A: Ubukhulu obujwayelekile busukela ku-430 μm kuya ku-500 μm. Ubukhulu obungokwezifiso bungakhiqizwa ngokwezidingo zamakhasimende.

Umbuzo 2: Yiziphi izindlela zokuhlobisa ngekristalu ezitholakalayo zama-wafers e-sapphire angu-12 intshi?
A: Sinikeza ukuqondiswa kwe-C-plane (0001), i-A-plane (11-20), kanye ne-R-plane (1-102). Ezinye ukuqondiswa kungenziwa ngezifiso ngokusekelwe ezidingweni ezithile zedivayisi.

Umbuzo 3: Iyini i-total thickness variation (TTV) ye-wafer?
A: Ama-wafer ethu e-sapphire angu-12 intshi ngokuvamile ane-TTV ≤10 μm, okuqinisekisa ukufana kuyo yonke indawo ye-wafer ukuze kwenziwe idivayisi esezingeni eliphezulu.

Mayelana NATHI

I-XKH igxile ekuthuthukisweni kobuchwepheshe obuphezulu, ekukhiqizweni, nasekuthengisweni kwengilazi ekhethekile ye-optical kanye nezinto ezintsha zekristalu. Imikhiqizo yethu ihlinzeka nge-optical electronics, i-consumer electronics, kanye nezempi. Sinikeza izingxenye ze-optical ze-Sapphire, izembozo zelensi yeselula, i-Ceramics, i-LT, i-Silicon Carbide SIC, i-Quartz, kanye nama-semiconductor crystal wafers. Ngobuchwepheshe obunekhono kanye nemishini esezingeni eliphezulu, sihamba phambili ekucutshungulweni komkhiqizo okungewona ojwayelekile, sihlose ukuba yibhizinisi elihamba phambili lezinto ze-optoelectronic tech.