Izindiza zekristalu nokuma kwekristalu yimiqondo emibili ewumongo ku-crystallography, ehlobene eduze nesakhiwo sekristalu kubuchwepheshe besekethe obuhlanganisiwe be-silicon.
1.Incazelo kanye nezakhiwo ze-Crystal Orientation
I-Crystal orientation imelela isiqondiso esithile ngaphakathi kwekristalu, ngokuvamile evezwa yizinkomba zokuma kwekristalu. I-Crystal orientation ichazwa ngokuxhuma noma yimaphi amaphuzu amabili e-lattice ngaphakathi kwesakhiwo se-crystal, futhi inezici ezilandelayo: i-crystal orientation ngayinye iqukethe inombolo engapheli yamaphoyinti e-lattice; i-crystal orientation eyodwa ingaba ne-multiple parallel crystal orientation okwakha umndeni we-crystal orientation; umndeni we-crystal orientation uhlanganisa wonke amaphuzu we-lattice ngaphakathi kwekristalu.
Ukubaluleka kokuma kwekristalu kulele ekuboniseni ukuhlelwa kokuqondisa kwama-athomu ngaphakathi kwekristalu. Isibonelo, i- [111] i-crystal orientation imelela isiqondiso esithile lapho izilinganiso zokuqagela zama-eksisi amathathu adidiyelwe kungu-1:1:1.
2. Incazelo kanye Nezakhiwo Ze-Crystal Planes
Indiza yekristalu indiza yokuhlelwa kwe-athomu ngaphakathi kwekristalu, emelwe ama-crystal plane indices (ama-Miller indices). Isibonelo, (111) ibonisa ukuthi ukuphindaphinda kokunqamuka kwendiza eyikristalu kuma-ax axhumanisayo kukusilinganiso esingu-1:1:1. Indiza yekristalu inezindawo ezilandelayo: indiza ngayinye yekristalu iqukethe inombolo engapheli yamaphoyinti e-lattice; indiza ngayinye yekristalu inenombolo engapheli yezindiza ezihambisanayo ezakha umndeni wendiza yekristalu; umndeni we-crystal plane uhlanganisa yonke i-crystal.
Ukunqunywa kwezinkomba ze-Miller kuhilela ukuthatha ama-intercepts endiza yekristalu ku-eksisi ngayinye exhumanisayo, ukuthola ukuphindaphinda kwakho, futhi kuguqulelwe kwinani elincane kakhulu. Isibonelo, indiza yekristalu (111) inokunqamula kuma-axes angu-x, y, no-z ngesilinganiso esingu-1:1:1.
3. Ubudlelwano Phakathi Kwe-Crystal Planes kanye Ne-Crystal Orientation
Izindiza zekristalu nokuma kwekristalu izindlela ezimbili ezihlukene zokuchaza ukwakheka kwejiyomethri yekristalu. I-crystal orientation ibhekisela ekuhlelweni kwama-athomu endaweni ethile, kuyilapho indiza eyikristalu ibhekisela ekuhlelweni kwama-athomu endizeni ethile. Laba ababili banokubhalelana okuthile, kodwa bamele imiqondo ehlukene yomzimba.
Ubudlelwano obubalulekile: Ivekhtha evamile yendiza eyikristalu (okungukuthi, i-vector perpendicular kuleyo ndiza) ihambisana nokuma kwekristalu. Isibonelo, i-vector evamile yendiza yekristalu (111) ihambisana [111] ne-crystal orientation, okusho ukuthi ukuhlelwa kwe-athomu ngakundlela [111] kuncike kuleyo ndiza.
Ezinqubweni ze-semiconductor, ukukhethwa kwezindiza zekristalu kuthinta kakhulu ukusebenza kwedivayisi. Isibonelo, kuma-semiconductors asekelwe ku-silicon, izindiza zekristalu ezivame ukusetshenziswa yizindiza (100) kanye (111) ngoba zinezinhlelo ezihlukene ze-athomu nezindlela zokuhlanganisa ngezindlela ezahlukene. Izakhiwo ezifana nokuhamba kwama-electron namandla angaphezulu ziyahlukahluka ezindizeni zekristalu ezihlukene, okunomthelela ekusebenzeni kanye nenqubo yokukhula yamadivayisi we-semiconductor.
4. Izicelo Ezisebenzayo Ezinqubweni Ze-Semiconductor
Ekwenziweni kwe-silicon-based semiconductor, i-crystal orientation nezindiza zekristalu zisetshenziswa ezicini eziningi:
Ukukhula kwe-Crystal: Amakristalu e-semiconductor avame ukukhuliswa ngokuhambisana ne-crystal orientation. Amakristalu e-silicon avame ukukhula ngokuhambisana [100] noma [111] orientation ngoba ukuzinza nokuhlelwa kwe-athomu kulezi zimo kuvumela ukukhula kwekristalu.
Inqubo ye-Etching: E-etching emanzi, izindiza zekristalu ezihlukene zinamazinga ahlukahlukene e-etching. Isibonelo, izilinganiso zokuhlanganisa ezindizeni ze-(100) kanye (111) ze-silicon ziyehluka, okuholela emiphumeleni ye-anisotropic etching.
Izici Zedivayisi: Ukuhamba kwe-electron kumadivayisi e-MOSFET kuthintwa indiza yekristalu. Imvamisa, ukuhamba kuphezulu endizeni ye-(100), yingakho ama-MOSFET esimanjemanje asuselwa ku-silicon esebenzisa kakhulu ama-wafer angu-100.
Kafushane, izindiza zekristalu nokuma kwekristalu izindlela ezimbili ezibalulekile zokuchaza ukwakheka kwamakristalu ku-crystallography. I-Crystal orientation imelela izakhiwo eziqondisayo ngaphakathi kwekristalu, kuyilapho izindiza zekristalu zichaza izindiza ezithile ngaphakathi kwekristalu. Le mibono emibili ihlobene kakhulu ekukhiqizeni ama-semiconductor. Ukukhethwa kwezindiza zekristalu kuthinta ngokuqondile izici ezibonakalayo namakhemikhali, kuyilapho ukuma kwekristalu kuthonya ukukhula kwekristalu nezindlela zokucubungula. Ukuqonda ubudlelwano phakathi kwezindiza zekristalu nemijikelezo kubalulekile ekuthuthukiseni izinqubo ze-semiconductor kanye nokuthuthukisa ukusebenza kwedivayisi.
Isikhathi sokuthumela: Oct-08-2024