Ama-Silicon Wafers vs. Ama-Glass Wafers: Yini Esiyihlanzayo Ngempela? Kusukela Ku-Material Essence kuya Ku-Process-based Cleaning Solutions

Nakuba ama-wafer e-silicon ne-glass abelana ngomgomo ofanayo “wokuhlanzwa,” izinselele kanye nezindlela zokwehluleka ababhekana nazo ngesikhathi sokuhlanza zihluke kakhulu. Lokhu kungafani kuvela ezicini zezinto ezibonakalayo kanye nezidingo zokucaciswa kwe-silicon ne-glass, kanye “nefilosofi” ehlukile yokuhlanza eqhutshwa ukusetshenziswa kwayo kokugcina.

Okokuqala, ake sicacise: Yini ngempela esiyihlanzayo? Yikuphi ukungcola okuhilelekile?

Izinto ezingcolisayo zingahlukaniswa ngezigaba ezine:

1. Izinto Ezingcolisayo Zezinhlayiya

   • Uthuli, izinhlayiya zensimbi, izinhlayiya eziphilayo, izinhlayiya ezihudulayo (ezivela enqubweni ye-CMP), njll.

   • Lezi zinto ezingcolisayo zingabangela ukukhubazeka kwephethini, njengezifinyezo ezimfushane noma amasekethe avulekile.

2. Izinto Ezingcolisayo Zemvelo

   • Kufaka phakathi izinsalela ze-photoresist, izithasiselo ze-resin, amafutha esikhumba somuntu, izinsalela ze-solvent, njll.

   • Izinto ezingcolisayo eziphilayo zingakha izifihla-buso ezivimbela ukugqwala noma ukufakwa kwama-ion futhi zinciphise ukunamathela kwamanye amafilimu amancane.

3. Izinto Ezingcolisayo Ze-Ion Zensimbi

   • Insimbi, ithusi, i-sodium, i-potassium, i-calcium, njll., okuvela kakhulu emishinini, amakhemikhali, kanye nokuxhumana nabantu.

   • Kuma-semiconductor, ama-ion ensimbi ayizinto ezingcolisayo “ezibulala”, ezethula amazinga wamandla ebhendini enqatshelwe, okwandisa ukuvuza kwamanje, kufinyeze isikhathi sokuthwala, futhi kulimaze kakhulu izakhiwo zikagesi. Engilazini, angathinta ikhwalithi kanye nokunamathela kwamafilimu amancane alandelayo.

4. Isendlalelo se-Oxide Somdabu

   • Kuma-wafer e-silicon: Ungqimba oluncane lwe-silicon dioxide (i-Native Oxide) lwakha ngokwemvelo phezu komoya. Ubukhulu kanye nokufana kwalolu ngqimba lwe-oxide kunzima ukulawula, futhi kumele lususwe ngokuphelele ngesikhathi kwenziwa izakhiwo ezibalulekile njenge-gate oxides.

   • Kuma-wafer engilazi: Ingilazi ngokwayo iyisakhiwo senethiwekhi ye-silica, ngakho-ke akukho nkinga "yokususa ungqimba lwe-oxide lwendabuko." Kodwa-ke, ubuso kungenzeka ukuthi bushintshiwe ngenxa yokungcola, futhi lolu ngqimba ludinga ukususwa.

I. Imigomo Eyinhloko: Ukwehluka Phakathi Kokusebenza Kagesi Nokuphelela Komzimba

• Ama-Silicon Wafers

  • Umgomo oyinhloko wokuhlanza ukuqinisekisa ukusebenza kukagesi. Imininingwane ngokuvamile ifaka phakathi ukubalwa kwezinhlayiya okuqinile kanye nosayizi (isb., izinhlayiya ≥0.1μm kumele zisuswe ngempumelelo), ukugcwala kwama-ion ensimbi (isb., i-Fe, i-Cu kumele ilawulwe ibe yi-≤10¹⁰ ama-athomu/cm² noma ngaphansi), kanye namazinga ezinsalela zezinto eziphilayo. Ngisho nokungcola okuncane kakhulu kungaholela ekushintsheni kwesekethe, ukuvuza kwamanzi, noma ukwehluleka kobuqotho be-gate oxide.

• Ama-Wafer Engilazi

  • Njengezinto ezisetshenziswayo, izidingo eziyinhloko ukuphelela ngokomzimba kanye nokuqina kwamakhemikhali. Imininingwane igxila ezicini zezinga eliphezulu njengokungabikho kwemihuzuko, amabala angasuswa, kanye nokugcinwa kobulukhuni bomphezulu wokuqala kanye ne-geometry. Umgomo wokuhlanza ngokuyinhloko ukuqinisekisa ukuhlanzeka kokubona kanye nokunamathela okuhle kwezinqubo ezilandelayo njengokugqoka.

II. Imvelo Yezinto Ezibonakalayo: Umehluko Oyisisekelo Phakathi Kwekristalu Ne-Amorphous

• I-Silicon

  • I-silicon iyinto ekristalu, futhi ubuso bayo bukhula ngokwemvelo ungqimba lwe-silicon dioxide (SiO₂) oxide olungeyona iyunifomu. Lolu ngqimba lwe-oxide lubeka ingozi ekusebenzeni kukagesi futhi kumele lususwe ngokuphelele nangokulinganayo.

• Ingilazi

  • Ingilazi iyinethiwekhi ye-silica engaguquki. Izinto zayo ezinkulu zifana ngokwakheka nongqimba lwe-silicon oxide lwe-silicon, okusho ukuthi ingaqoshwa ngokushesha yi-hydrofluoric acid (HF) futhi isengozini yokuguguleka kwe-alkali enamandla, okuholela ekwandeni kokuqina noma ukuguquka kwendawo. Lo mehluko oyisisekelo usho ukuthi ukuhlanzwa kwe-silicon wafer kungabekezelela ukuqoshwa okulula, okulawulwayo ukuze kususwe ukungcola, kuyilapho ukuhlanzwa kwe-glass wafer kumele kwenziwe ngokucophelela okukhulu ukuze kugwenywe ukulimaza izinto eziyisisekelo.

III. Ukuqhathaniswa Kwezixazululo Zokuhlanza

Ngokusekelwe emigomweni eshiwo ngenhla kanye nezici zezinto ezibonakalayo, izixazululo zokuhlanza ama-wafer e-silicon ne-glass ziyahlukahluka:

• Inqubo Yokuhlanza I-Glass Wafer

  • Njengamanje, izimboni eziningi zokucubungula ingilazi zisebenzisa izinqubo zokuhlanza ngokusekelwe ezicini zezinto ezibonakalayo zengilazi, zithembele kakhulu ezintweni zokuhlanza ezibuthakathaka ze-alkaline.

  • Izici ze-Cleaning Ejenti:Lezi zinto zokuhlanza ezikhethekile ngokuvamile ziyi-alkaline ebuthakathaka, ene-pH engaba ngu-8-9. Ngokuvamile ziqukethe ama-surfactant (isb., i-alkyl polyoxyethylene ether), izinto zokuhlanza insimbi (isb., i-HEDP), kanye nezinsiza zokuhlanza eziphilayo, ezenzelwe ukuxuba nokubolisa izinto ezingcolisayo eziphilayo ezifana namafutha neminwe, kuyilapho zingcolisa kancane i-matrix yengilazi.

  • Ukugeleza Kwenqubo:Inqubo yokuhlanza evamile ihilela ukusebenzisa ukuhlushwa okuthile kwezinto zokuhlanza ezine-alkaline ezibuthakathaka emazingeni okushisa asukela ekushiseni kwegumbi kuya ku-60°C, kuhlanganiswe nokuhlanzwa kwe-ultrasonic. Ngemva kokuhlanza, ama-wafer adlula ezinyathelweni eziningi zokuhlanza ngamanzi ahlanzekile kanye nokomisa kancane (isb., ukuphakamisa kancane noma ukomisa nge-IPA vapor). Le nqubo ihlangabezana ngempumelelo nezidingo ze-wafer yengilazi yokuhlanzeka kokubona kanye nokuhlanzeka okuvamile.

• Inqubo Yokuhlanza I-Silicon Wafer

  • Ekucutshungulweni kwe-semiconductor, ama-silicon wafers ngokuvamile ahlanzwa i-RCA ejwayelekile, okuyindlela yokuhlanza ephumelela kakhulu ekwazi ukubhekana nazo zonke izinhlobo zokungcola ngokuhlelekile, ukuqinisekisa ukuthi izidingo zokusebenza kukagesi zamadivayisi e-semiconductor ziyahlangatshezwa.

IV. Lapho Ingilazi Ihlangabezana Nezindinganiso Eziphakeme “Zokuhlanzeka”

Uma kusetshenziswa ama-wafer engilazi ezicelweni ezidinga ukubalwa kwezinhlayiya okuqinile kanye namazinga e-ion ensimbi (isb., njengezinto ezisetshenziswayo ezinqubweni ze-semiconductor noma ezindaweni ezinhle kakhulu zokufakwa kwefilimu), inqubo yokuhlanza yangaphakathi ingase ingasanele. Kulesi simo, izimiso zokuhlanza ze-semiconductor zingasetshenziswa, kwethulwa isu lokuhlanza le-RCA eliguquliwe.

Ingqikithi yaleli cebo ukunciphisa nokwenza ngcono amapharamitha enqubo ye-RCA ejwayelekile ukuze kuhlangatshezwane nobuntu obubucayi bengilazi:

• Ukususwa Kwezinto Ezingcolile Zemvelo:Izixazululo ze-SPM noma amanzi e-ozone athambile angasetshenziswa ukubola ukungcola okungokwemvelo ngokusebenzisa i-oxidation enamandla.

• Ukususwa Kwezinhlayiya:Isixazululo se-SC1 esixutshwe kakhulu sisetshenziswa emazingeni okushisa aphansi kanye nezikhathi zokwelashwa ezimfushane ukuze kusetshenziswe ukuxoshwa kwayo ngogesi kanye nemiphumela yokucasuka okuncane ukususa izinhlayiya, kuyilapho kunciphisa ukugqwala engilazini.

• Ukususwa kwe-Ion yensimbi:Isixazululo se-SC2 esixutshiwe noma izixazululo ezilula ze-hydrochloric acid/dilute nitric acid zisetshenziselwa ukususa ukungcola kwensimbi nge-chelation.

• Imikhawulo Eqinile:I-DHF (i-di-ammonium fluoride) kumele igwenywe ngokuphelele ukuze kuvinjelwe ukugqwala kwe-substrate yengilazi.

Kuyo yonke inqubo eguquliwe, ukuhlanganisa ubuchwepheshe be-megasonic kuthuthukisa kakhulu ukusebenza kahle kokususwa kwezinhlayiya ezincane futhi kuthambile ebusweni.

Isiphetho

Izinqubo zokuhlanza ama-wafer e-silicon ne-glass ziwumphumela ongenakugwenywa wobunjiniyela obuphambene ngokusekelwe ezidingweni zazo zokugcina zokusetshenziswa, izakhiwo zezinto ezibonakalayo, kanye nezici zomzimba nezamakhemikhali. Ukuhlanzwa kwe-wafer ye-silicon kufuna "ukuhlanzeka kwezinga le-athomu" ukuze kusebenze ugesi, kuyilapho ukuhlanzwa kwe-wafer yeglasi kugxila ekufinyeleleni izindawo "eziphelele, ezingalimele". Njengoba ama-wafer engilazi esetshenziswa kakhulu ekusetshenzisweni kwe-semiconductor, izinqubo zawo zokuhlanza zizoshintsha ngokungenakugwenywa ngale kokuhlanza kwe-alkaline okubuthakathaka kwendabuko, kuthuthukiswe izixazululo ezicwengekile kakhulu, ezenziwe ngokwezifiso njengenqubo ye-RCA eguquliwe ukuze kuhlangatshezwane nezindinganiso zokuhlanzeka eziphakeme.