I-SPC (Statistical Process Control) iyithuluzi elibalulekile enqubweni yokukhiqiza i-wafer, elisetshenziselwa ukuqapha, ukulawula, nokuthuthukisa ukuzinza kwezigaba ezahlukahlukene ekukhiqizeni.
1. Ukubuka konke kweSistimu ye-SPC
I-SPC iyindlela esebenzisa amasu ezibalo ukuqapha nokulawula izinqubo zokukhiqiza. Umsebenzi wayo oyinhloko ukuthola okungahambi kahle enkambisweni yokukhiqiza ngokuqoqa nokuhlaziya idatha yesikhathi sangempela, ukusiza onjiniyela ukuthi benze izinguquko nezinqumo ngesikhathi. Umgomo we-SPC ukunciphisa ukuhlukahluka enkambisweni yokukhiqiza, ukuqinisekisa ukuthi ikhwalithi yomkhiqizo ihlala izinzile futhi ihlangabezana nezimiso.
I-SPC isetshenziswa enqubweni yokuqopha ukuze:
Gada amapharamitha emishini ebalulekile (isb., izinga lokushintsha, amandla e-RF, ingcindezi yegumbi, izinga lokushisa, njll.)
Hlaziya izinkomba ezibalulekile zekhwalithi yomkhiqizo (isb., ububanzi bomugqa, ukujula kwe-etch, ubulukhuni bomphetho, njll.)
Ngokuqapha lezi zinhlaka, onjiniyela bangathola izitayela ezibonisa ukwehla kokusebenza kwemishini noma ukuphambuka enqubweni yokukhiqiza, ngaleyo ndlela banciphise amazinga okulahlwa.
2. Izingxenye Eziyisisekelo Zohlelo lwe-SPC
Uhlelo lwe-SPC lwakhiwe ngamamojula amaningana ayisihluthulelo:
Imojuli Yokuqoqwa Kwedatha: Iqoqa idatha yesikhathi sangempela evela kumishini kanye nokugeleza kwenqubo (isb., ngezinhlelo ze-FDC, ze-EES) futhi iqopha imingcele ebalulekile kanye nemiphumela yokukhiqiza.
Imojuli Yeshadi Lokulawula: Isebenzisa amashadi okulawula izibalo (isb., ishadi le-X-Bar, ishadi le-R, ishadi le-Cp/Cpk) ukuze ibone ukuzinza kwenqubo futhi isize ekunqumeni ukuthi inqubo iyalawula yini.
Isistimu Ye-Alarm: Iqala ama-alamu lapho amapharamitha abalulekile edlula imikhawulo yokulawula noma ebonisa izinguquko zethrendi, okwenza onjiniyela bathathe isinyathelo.
Imojuli Yokuhlaziya Nokubika: Ihlaziya imbangela eyinhloko yokungalingani ngokusekelwe kumashadi e-SPC futhi ikhiqiza njalo imibiko yokusebenza yenqubo nemishini.
3. Incazelo Eningiliziwe Yamashadi Okulawula ku-SPC
Amashadi okulawula angenye yamathuluzi asetshenziswa kakhulu ku-SPC, okusiza ukuhlukanisa phakathi "kokuhlukahluka okuvamile" (okubangelwa ukuhlukahluka kwenqubo yemvelo) kanye "nokwehluka okungavamile" (okubangelwa ukwehluleka kwemishini noma ukuphambuka kwenqubo). Amashadi okulawula avamile afaka:
Amashadi e-X-Bar kanye ne-R: Asetshenziswa ukuqapha isilinganiso kanye nobubanzi ngaphakathi kwamaqoqo okukhiqiza ukuze kubonwe ukuthi inqubo izinzile yini.
Izinkomba ze-Cp kanye ne-Cpk: Zisetshenziselwa ukukala ikhono lenqubo, okungukuthi, ukuthi umkhiqizo wenqubo ungahlangabezana yini nezidingo zencazelo ngokuqhubekayo. I-Cp ilinganisa ikhono elingenzeka, kuyilapho i-Cpk ibheka ukuphambuka kwesikhungo senqubo kusuka emikhawulweni yencazelo.
Isibonelo, enqubweni yokuqopha, ungase uqaphe amapharamitha afana nesilinganiso sokuqopha kanye nobulukhuni bomphezulu. Uma izinga lokuqopha lomshini othile lidlula umkhawulo wokulawula, ungasebenzisa amashadi okulawula ukuze unqume ukuthi lokhu kuyinguquko yemvelo noma inkomba yokungasebenzi kahle komshini.
4. Ukusetshenziswa kwe-SPC kumishini yokuqopha
Enqubweni yokuqopha, ukulawula amapharamitha emishini kubalulekile, futhi i-SPC isiza ekuthuthukiseni ukuzinza kwenqubo ngezindlela ezilandelayo:
Ukuqapha Isimo Semishini: Izinhlelo ezifana ne-FDC ziqoqa idatha yesikhathi sangempela kumapharamitha abalulekile emishini yokuqopha (isb., amandla e-RF, ukugeleza kwegesi) bese zihlanganisa le datha namashadi okulawula e-SPC ukuthola izinkinga ezingaba khona zemishini. Isibonelo, uma ubona ukuthi amandla e-RF eshadini lokulawula ahluka kancane kancane enanini elibekiwe, ungathatha isinyathelo sokuqala sokulungisa noma sokulungisa ukuze ugweme ukuthinta ikhwalithi yomkhiqizo.
Ukuqapha Ikhwalithi Yomkhiqizo: Ungafaka futhi amapharamitha abalulekile ekhwalithi yomkhiqizo (isb., ukujula kwe-etch, ububanzi bomugqa) ohlelweni lwe-SPC ukuze uqaphe ukuzinza kwawo. Uma ezinye izinkomba zomkhiqizo ezibalulekile ziphambuka kancane kancane kumanani aqondiwe, uhlelo lwe-SPC luzokhipha i-alamu, okubonisa ukuthi kudingeka ukulungiswa kwenqubo.
Ukulungiswa Kokuvimbela (PM): I-SPC ingasiza ekwenzeni ngcono umjikelezo wokulungiswa kokuvimbela wemishini. Ngokuhlaziya idatha yesikhathi eside ekusebenzeni kwemishini kanye nemiphumela yenqubo, unganquma isikhathi esifanele sokulungiswa kwemishini. Isibonelo, ngokuqapha amandla e-RF kanye nesikhathi sokuphila se-ESC, unganquma ukuthi kudingeka nini ukuhlanza noma ukushintshwa kwezingxenye, ukunciphisa amazinga okwehluleka kwemishini kanye nesikhathi sokungasebenzi komkhiqizo.
5. Amathiphu Okusebenzisa Nsuku Zonke Ohlelo Lwe-SPC
Uma usebenzisa uhlelo lwe-SPC emisebenzini yansuku zonke, izinyathelo ezilandelayo zingalandelwa:
Chaza Amapharamitha Okulawula Okuyinhloko (i-KPI): Thola amapharamitha abaluleke kakhulu enkambisweni yokukhiqiza bese uwafaka ekuqapheni kwe-SPC. La mapharamitha kufanele ahlobane kakhulu nekhwalithi yomkhiqizo kanye nokusebenza kwemishini.
Setha Imikhawulo Yokulawula kanye Nemikhawulo Ye-alamu: Ngokusekelwe kudatha yomlando kanye nezidingo zenqubo, setha imikhawulo yokulawula efanelekile kanye nemikhawulo ye-alamu yepharamitha ngayinye. Imikhawulo yokulawula ivame ukusethwa ku-±3σ (ukuphambuka okujwayelekile), kuyilapho imikhawulo ye-alamu isekelwe ezimweni ezithile zenqubo kanye nemishini.
Ukuqapha Nokuhlaziya Okuqhubekayo: Buyekeza njalo amashadi okulawula e-SPC ukuze uhlaziye izitayela kanye nokwehluka kwedatha. Uma amanye amapharamitha edlula imikhawulo yokulawula, kudingeka isinyathelo esisheshayo, njengokulungisa amapharamitha emishini noma ukwenza ukulungiswa kwemishini.
Ukuphathwa Kokungavamile kanye Nokuhlaziywa Kwembangela Eyinhloko: Uma kwenzeka okungavamile, uhlelo lwe-SPC luqopha ulwazi oluningiliziwe mayelana nesigameko. Udinga ukuxazulula inkinga futhi uhlaziye imbangela eyinhloko yokungavamile ngokusekelwe kulolu lwazi. Ngokuvamile kungenzeka ukuhlanganisa idatha evela ezinhlelweni ze-FDC, ezinhlelweni ze-EES, njll., ukuze kuhlaziywe ukuthi inkinga ibangelwa ukwehluleka kwemishini, ukuphambuka kwenqubo, noma izici zangaphandle zemvelo.
Ukuthuthukiswa Okuqhubekayo: Usebenzisa idatha yomlando eqoshwe uhlelo lwe-SPC, thola amaphuzu abuthakathaka enkambisweni bese uphakamisa izinhlelo zokuthuthukisa. Isibonelo, enkambisweni yokuqopha, hlaziya umthelela wesikhathi sokuphila kwe-ESC kanye nezindlela zokuhlanza emijikelezweni yokugcinwa kwemishini bese uqhubeka nokwenza ngcono amapharamitha okusebenza kwemishini.
6. Icala Lokusebenza Okusebenzayo
Njengesibonelo esisebenzayo, ake sithi unesibopho semishini yokuqopha i-E-MAX, futhi i-cathode yekamelo ibhekene nokuguguleka kwangaphambi kwesikhathi, okuholela ekwandeni kwamanani e-D0 (BARC defect). Ngokuqapha amandla e-RF kanye nesilinganiso se-etch ohlelweni lwe-SPC, ubona umkhuba lapho la mapharamitha ephambuka kancane kancane kumanani awo asethiwe. Ngemva kokuba i-alamu ye-SPC iqalisiwe, uhlanganisa idatha evela ohlelweni lwe-FDC bese unquma ukuthi inkinga ibangelwa ukulawulwa kokushisa okungazinzile ngaphakathi kwekamelo. Bese usebenzisa izindlela ezintsha zokuhlanza namasu okulungisa, ekugcineni wehlisa inani le-D0 kusuka ku-4.3 kuya ku-2.4, ngaleyo ndlela uthuthukisa ikhwalithi yomkhiqizo.
7.Ku-XINKEHUI ungathola.
Kwa-XINKEHUI, ungafinyelela i-wafer ephelele, kungaba yi-silicon wafer noma i-SiC wafer. Singochwepheshe ekuletheni ama-wafer asezingeni eliphezulu ezimbonini ezahlukahlukene, sigxile ekuqondeni nasekusebenzeni kahle.
(i-silicon wafer)
Ama-wafer ethu e-silicon enziwe ngobumsulwa obuphezulu kanye nokufana, okuqinisekisa izakhiwo zikagesi ezinhle kakhulu ezifanela izidingo zakho ze-semiconductor.
Ukuze kusetshenziswe kakhulu, ama-wafer ethu e-SiC anikeza ukuhanjiswa kokushisa okuhle kakhulu kanye nokusebenza kahle kwamandla aphezulu, afanelekela kakhulu ama-electronics kagesi kanye nezimo zokushisa okuphezulu.
(I-SiC wafer)
Nge-XINKEHUI, uthola ubuchwepheshe obusezingeni eliphezulu kanye nokusekelwa okuthembekile, okuqinisekisa ama-wafer ahlangabezana nezindinganiso eziphakeme kakhulu embonini. Sikhethele ukuphelela kwe-wafer yakho!
Isikhathi sokuthunyelwe: Okthoba-16-2024