Ukubuka Konke Kwamasu Okususa Amafilimu Amancane: I-MOCVD, i-Magnetron Sputtering, kanye ne-PECVD

Ekukhiqizweni kwe-semiconductor, ngenkathi i-photolithography kanye ne-etching kuyizinqubo ezivame ukukhulunywa ngazo, amasu okufaka ifilimu encane noma encane nawo abaluleke kakhulu. Lesi sihloko sethula izindlela eziningana ezivamile zokufaka ifilimu encane ezisetshenziswa ekwenziweni kwe-chip, okuhlanganisaI-MOCVD, ukubhoboza kwe-magnetron, futhiI-PECVD.

Kungani Izinqubo Zefilimu Ezincane Zibalulekile Ekukhiqizweni Kwezingcezu Zezingcezu?

Ngokwesibonelo, cabanga ngesinkwa esibhakiwe esilula. Sisodwa, singase sinambitheke singenambitheki. Kodwa-ke, ngokuxubha ubuso ngamasoso ahlukene—njenge-peaty bean paste noma i-sweet malt syrup—ungawushintsha ngokuphelele ukunambitheka kwaso. Lezi zingubo ezithuthukisa ukunambitheka zifanaamafilimu amancaneezinqubweni ze-semiconductor, kuyilapho i-flatbread ngokwayo imelelaisisekelo.

Ekwenziweni kwama-chip, amafilimu amancane asebenza izindima eziningi ezisebenzayo—ukushisa, ukuqhuba, ukudlulisa ukukhanya, ukumuncwa kokukhanya, njll.—futhi umsebenzi ngamunye udinga indlela ethile yokufaka.

1. Ukufakwa Komhwamuko Wamakhemikhali Ensimbi-Engokwemvelo (MOCVD)

I-MOCVD iyindlela ethuthukisiwe kakhulu futhi enembile esetshenziselwa ukubeka amafilimu amancane e-semiconductor kanye nezakhiwo ezincane zekhwalithi ephezulu. Idlala indima ebalulekile ekwakhiweni kwamadivayisi afana nama-LED, ama-laser, kanye ne-electronics enamandla.

Izingxenye Eziyinhloko Zohlelo lwe-MOCVD:

• Uhlelo Lokulethwa Kwegesi
  Unesibopho sokwethulwa okunembile kwama-reactant ekamelweni lokusabela. Lokhu kuhlanganisa nokulawulwa kokugeleza kwalokhu:

• Amagesi okuthwala

• Izinto ezandulela insimbi-organic

• Amagesi e-Hydride
  Uhlelo lunezindlela eziningi zokushintsha phakathi kwezindlela zokukhula nezokuhlanza.

• Igumbi Lokusabela
  Inhliziyo yesistimu lapho ukukhula kwezinto ezibonakalayo kwenzeka khona. Izingxenye zifaka:

  • I-graphite susceptor (isibambi se-substrate)

  • Izinzwa ze-heater kanye nezinga lokushisa

  • Amachweba okukhanya okuqapha endaweni

  • Izingalo zerobhothi zokulayisha/ukukhulula i-wafer ngokuzenzakalelayo

• Uhlelo Lokulawula Ukukhula
  Iqukethe abalawuli be-logic abahlelekayo kanye nekhompyutha ephethe. Lokhu kuqinisekisa ukuqapha okunembile kanye nokuphindeka kuyo yonke inqubo yokufaka.

• Ukuqapha Kwangaphakathi
  Amathuluzi anjenge-pyrometers kanye ne-reflectometers alinganisa:

  • Ubukhulu befilimu

  • Izinga lokushisa elingaphezulu

  • Ukugoba kwe-substrate
    Lokhu kuvumela impendulo yesikhathi sangempela kanye nokulungiswa.

• Uhlelo Lokwelapha Ukukhipha Umoya
  Yelapha imikhiqizo enobuthi ngokusebenzisa ukubola kokushisa noma i-catalysis yamakhemikhali ukuqinisekisa ukuphepha nokuhambisana nemvelo.

Ukucushwa kwe-Showerhead Ehlanganisiwe (CCS) Okuvaliwe:

Kuma-reactor e-MOCVD aqondile, ukwakheka kwe-CCS kuvumela amagesi ukuthi afakwe ngokulinganayo ngama-nozzles ashintshanayo esakhiweni se-showerhead. Lokhu kunciphisa ukusabela kwangaphambi kwesikhathi futhi kuthuthukisa ukuxubana okufanayo.

• Iisivikelo se-graphite esijikelezayokusiza kakhulu ukwenza ungqimba lomngcele wamagesi lube yi-homogeneous, kuthuthukiswe ukufana kwefilimu kulo lonke i-wafer.

2. Ukuphalaza kweMagnetron

Ukusputtering kwe-Magnetron kuyindlela yokubeka umuthi womoya ongokoqobo (i-PVD) esetshenziswa kabanzi ekubekeni amafilimu amancane kanye nopende, ikakhulukazi kuma-elekthronikhi, kuma-optics, kanye nase-ceramics.

Isimiso Sokusebenza:

1. Izinto Eziqondiwe
   Izinto ezizofakwa—insimbi, i-oxide, i-nitride, njll.—zinamathele ku-cathode.

2. Igumbi Lokuhlanza I-Vacuum
   Le nqubo yenziwa ngaphansi kwe-vacuum ephezulu ukuze kugwenywe ukungcola.

3. Ukukhiqizwa kwe-Plasma
   Igesi engasebenzi, ngokuvamile i-argon, ihlanganiswa ibe yi-ion ukuze yakhe i-plasma.

4. Isicelo Sensimu Yama-Magnetic
   Insimu yamagnetic ivimba ama-electron eduze kwendawo okuhlosiwe kuyo ukuze kuthuthukiswe ukusebenza kahle kwe-ionization.

5. Inqubo Yokukhipha Amanzi
   Ama-ion ahlasela ithagethi, akhiphe ama-athomu ahamba egumbini bese ehlala phezu kwesisekelo.

Izinzuzo ze-Magnetron Sputtering:

• Ukufakwa Kwefilimu Elifanayoezindaweni ezinkulu.

• Amandla Okufaka Ama-Compounds Ayinkimbinkimbi, okuhlanganisa izinsimbi zokwenziwa kanye nezinto zobumba.

• Amapharamitha Enqubo Elungisekayoukuze kulawulwe ngokunembile ukujiya, ukwakheka, kanye nesakhiwo esincane.

• Ikhwalithi Ephezulu Yefilimungokunamathela okunamandla kanye namandla okusebenza.

• Ukuhambisana Kwezinto Ezibanzi, kusukela ezinsimbini kuya kuma-oxide nama-nitride.

• Ukusebenza Kwezinga Lokushisa Eliphansi, ifanelekela izindawo ezithintekayo ekushiseni.

3. Ukufakwa Komhwamuko Wamakhemikhali Othuthukisiwe Nge-Plasma (i-PECVD)

I-PECVD isetshenziswa kabanzi ekubekeni amafilimu amancane njenge-silicon nitride (SiNx), i-silicon dioxide (SiO₂), kanye ne-silicon engaguquki.

Isimiso:

Kuhlelo lwe-PECVD, amagesi angaphambili afakwa ekamelweni le-vacuum laphoi-plasma yokukhipha ukukhanyakukhiqizwa kusetshenziswa:

• Ukuvuselela kwe-RF

• I-voltage ephezulu ye-DC

• Imithombo ye-microwave noma ye-pulsed

I-plasma ivuselela ukusabela kwesigaba segesi, ikhiqize izinhlobo ezisabelayo ezihlala phansi ukuze zakhe ifilimu elincane.

Izinyathelo Zokufaka Imali:

1. Ukwakheka kwe-Plasma
   Ejabule ngamasimu kagesi, amagesi angaphambili ayashintsha abe yi-ion ukuze akhe ama-radical nama-ion asabelayo.

2. Ukusabela Nokuthutha
   Lezi zinhlobo zithola ukusabela kwesibili njengoba ziya endaweni engaphansi komhlaba.

3. Ukusabela Okungaphezulu
   Lapho zifika endaweni engaphansi komhlaba, ziyamunca, zisabela, bese zakha ifilimu eqinile. Eminye imikhiqizo ephumayo ikhishwa njengamagesi.

Izinzuzo ze-PECVD:

• Ukufana Okuhle Kakhulungokwakheka kwefilimu kanye nobukhulu bayo.

• Ukunamathela Okuqinilengisho nasemazingeni okushisa aphansi okufakwa.

• Amanani Okufaka Imali Aphezulu, okwenza ifaneleke ekukhiqizweni kwezimboni.

4. Amasu Okulinganisa Amafilimu Amancane

Ukuqonda izakhiwo zamafilimu amancane kubalulekile ekulawuleni ikhwalithi. Amasu avamile ahlanganisa:

(1) Ukwehlukaniswa kwe-X-ray (XRD)

• Inhloso: Hlaziya izakhiwo zekristalu, ama-lattice constant, kanye nokuqondiswa.

• Isimiso: Ngokusekelwe kuMthetho kaBragg, kulinganisa indlela ama-X-ray adlula ngayo ezintweni ezikristalu.

• Izicelo: I-Crystallography, ukuhlaziywa kwesigaba, ukulinganiswa kokucindezeleka, kanye nokuhlolwa kwefilimu encane.

(2) Ukuskena i-Electron Microscopy (SEM)

• Inhloso: Bheka ukuma kwendawo kanye nesakhiwo sayo esincane.

• Isimiso: Isebenzisa umsebe we-electron ukuskena ubuso besampula. Izimpawu ezitholakele (isb., ama-electron esibili kanye nama-backscattered) zembula imininingwane yobuso.

• Izicelo: Isayensi yezinto zokwakha, i-nanotech, i-biology, kanye nokuhlaziywa kokuhluleka.

(3) I-Atomic Force Microscopy (AFM)

• Inhloso: Izindawo zesithombe ngesisombululo se-athomu noma se-nanometer.

• Isimiso: I-probe ebukhali ihlola indawo ngenkathi igcina amandla okuxhumana aqhubekayo; ukufuduka okuqondile kudala ukuma kwe-3D.

• Izicelo: Ucwaningo lwesakhiwo se-nano, ukulinganiswa kobulukhuni bomphezulu, izifundo ze-biomolecular.